Dissolution behavior of main-chain-fluorinated polymers for 157 nm lithography

T. Kodani; T. Ishikawa; T. Yoshida; T. Hayami; M. Koh; T. Moriya; T. Yamashita; M. Toriumi; T. Araki; H. Aoyama; T. Hagiwara; T. Furukawa; T. Itani; K. Fujii

doi:10.1116/1.1826064

Dissolution behavior of main-chain-fluorinated polymers for 157 nm lithography

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1826064 ◽

2004 ◽

Vol 22 (6) ◽

pp. 3509 ◽

Cited By ~ 1

Author(s):

T. Kodani ◽

T. Ishikawa ◽

T. Yoshida ◽

T. Hayami ◽

M. Koh ◽

...

Keyword(s):

Main Chain ◽

Dissolution Behavior ◽

Fluorinated Polymers

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157-nm Resist Materials Using Main-Chain Fluorinated Polymers

ACS Symposium Series - Polymers for Microelectronics and Nanoelectronics ◽

10.1021/bk-2004-0874.ch006 ◽

2004 ◽

pp. 72-85

Author(s):

Toshiro Itani ◽

Hiroyuki Watanabe ◽

Tamio Yamazaki ◽

Seiichi Ishikawa ◽

Naomi Shida ◽

...

Keyword(s):

Main Chain ◽

Fluorinated Polymers

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157-nm Single-Layer Resists Based on Main-Chain-Fluorinated Polymers

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.3743 ◽

2003 ◽

Vol 42 (Part 1, No. 6B) ◽

pp. 3743-3747 ◽

Cited By ~ 2

Author(s):

Shigeo Irie ◽

Seiichi Ishikawa ◽

Takuya Hagiwara ◽

Tamio Yamazaki ◽

Takamitsu Furukawa ◽

...

Keyword(s):

Main Chain ◽

Single Layer ◽

Fluorinated Polymers

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157-nm single layer resists based on main-chain-fluorinated polymers

2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. ◽

10.1109/imnc.2002.1178555 ◽

2003 ◽

Author(s):

S. Irie ◽

S. Ishikawa ◽

T. Yamazaki ◽

T. Furukawa ◽

T. Itani

Keyword(s):

Main Chain ◽

Single Layer ◽

Fluorinated Polymers

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Novel main-chain-fluorinated polymers for 157-nm photoresists

10.1117/12.485085 ◽

2003 ◽

Cited By ~ 9

Author(s):

Minoru Toriumi ◽

Meiten Koh ◽

Takuji Ishikawa ◽

T. Kodani ◽

Takayuki Araki ◽

...

Keyword(s):

Main Chain ◽

Fluorinated Polymers

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283. Differences in Dissolution Behavior in a Phagolysosomal Simulant Fluid for Single-Component and Multicomponent Beryllium Materials Associated with Beryllium Sensitization and Chronic Beryllium Disease

10.3320/1.2758747 ◽

2005 ◽

Author(s):

A. Stefaniak ◽

G. Day ◽

M. Hoover ◽

P. Breysse ◽

R. Scripsick

Keyword(s):

Single Component ◽

Dissolution Behavior ◽

Chronic Beryllium Disease ◽

Beryllium Disease ◽

Beryllium Sensitization

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Dissolution Behavior of an Amorphous Solid Dispersion in Surfactant Containing Media

10.26226/morressier.57ea3d6ad462b8028d88e2d5 ◽

2016 ◽

Author(s):

Guangyu Ma

Keyword(s):

Solid Dispersion ◽

Amorphous Solid ◽

Amorphous Solid Dispersion ◽

Dissolution Behavior

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Solving the Problem of Silicon Dioxide Melting Based on Deviation Model

Non-Metallic Material Science ◽

10.30564/omms.v2i1.1653 ◽

2020 ◽

Vol 2 (1) ◽

Author(s):

Yuhan Sun

Keyword(s):

Silicon Dioxide ◽

Blast Furnace Slag ◽

Melting Process ◽

Melting Rate ◽

Dissolution Behavior ◽

Characteristic Parameters ◽

Contour Feature ◽

Time Periods ◽

Main Component ◽

Furnace Slag

Abstract: In order to reveal the dissolution behavior of iron tailings in blast furnace slag, we studied the main component of silica in iron tailings. First, edge contour features need to be established to represent the melting process of silica. We choose shape, perimeter, area and generalized radius as objects. By independently analyzing the influence of these four indexes on the melting rate, the area and shape were selected as the characteristic parameters of the edge contour of the silica particles. Then, the actual melting rate of the silica is estimated by the edge contour feature index. Finally, we can calculate the melting rate of the first second of three time periods of 0.00010312mm3/s，0.0002399mm3/s，0.0000538mm3/s.

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