157-nm Resist Materials Using Main-Chain Fluorinated Polymers

2004 ◽  
pp. 72-85
Author(s):  
Toshiro Itani ◽  
Hiroyuki Watanabe ◽  
Tamio Yamazaki ◽  
Seiichi Ishikawa ◽  
Naomi Shida ◽  
...  
Keyword(s):  
Main Chain ◽  
Fluorinated Polymers

157-nm Single-Layer Resists Based on Main-Chain-Fluorinated Polymers

2003 ◽  
Vol 42 (Part 1, No. 6B) ◽  
pp. 3743-3747 ◽  
Author(s):  
Shigeo Irie ◽  
Seiichi Ishikawa ◽  
Takuya Hagiwara ◽  
Tamio Yamazaki ◽  
Takamitsu Furukawa ◽  
...  
Keyword(s):  
Main Chain ◽  
Single Layer ◽  
Fluorinated Polymers

Dissolution behavior of main-chain-fluorinated polymers for 157 nm lithography

2004 ◽  
Vol 22 (6) ◽  
pp. 3509 ◽  
Author(s):  
T. Kodani ◽  
T. Ishikawa ◽  
T. Yoshida ◽  
T. Hayami ◽  
M. Koh ◽  
...  
Keyword(s):  
Main Chain ◽  
Dissolution Behavior ◽  
Fluorinated Polymers

Novel main-chain-fluorinated polymers for 157-nm photoresists

2003 ◽  
Author(s):  
Minoru Toriumi ◽  
Meiten Koh ◽  
Takuji Ishikawa ◽  
T. Kodani ◽  
Takayuki Araki ◽  
...  
Keyword(s):  
Main Chain ◽  
Fluorinated Polymers

Temperature-dependent photoluminescence from MEH-PPV and MEH-OPPV containing oxadiazole in the main chain

2006 ◽  
Vol 84 (1-2) ◽  
pp. 203-206 ◽  
Author(s):  
F. Kong ◽  
X.L. Wu ◽  
G.S. Huang ◽  
R.K. Yuan ◽  
C.Z. Yang ◽  
...  
Keyword(s):  
Main Chain ◽  
Temperature Dependent ◽  
Temperature Dependent Photoluminescence

scholarly journals Internal constraints and arrested relaxation in main-chain nematic elastomers

2021 ◽  
Vol 12 (1) ◽  
Author(s):  
Takuya Ohzono ◽  
Kaoru Katoh ◽  
Hiroyuki Minamikawa ◽  
Mohand O. Saed ◽  
Eugene M. Terentjev
Keyword(s):  
Mechanical Properties ◽  
Main Chain ◽  
Polymer Networks ◽  
Nematic Order ◽  
Nematic Elastomers ◽  
Nematic Director ◽  
Highly Nonlinear ◽  
Nonlinear Mechanical ◽  
Liquid Crystal Elastomers ◽  
Memory Applications

AbstractNematic liquid crystal elastomers (N-LCE) exhibit intriguing mechanical properties, such as reversible actuation and soft elasticity, which manifests as a wide plateau of low nearly-constant stress upon stretching. N-LCE also have a characteristically slow stress relaxation, which sometimes prevents their shape recovery. To understand how the inherent nematic order retards and arrests the equilibration, here we examine hysteretic stress-strain characteristics in a series of specifically designed main-chain N-LCE, investigating both macroscopic mechanical properties and the microscopic nematic director distribution under applied strains. The hysteretic features are attributed to the dynamics of thermodynamically unfavoured hairpins, the sharp folds on anisotropic polymer strands, the creation and transition of which are restricted by the nematic order. These findings provide a new avenue for tuning the hysteretic nature of N-LCE at both macro- and microscopic levels via different designs of polymer networks, toward materials with highly nonlinear mechanical properties and shape-memory applications.

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