Electron-beam lithography with aromatic self-assembled monolayers on silicon surfaces

A. Küller; M. A. El-Desawy; V. Stadler; W. Geyer; W. Eck; A. Gölzhäuser

doi:10.1116/1.1715083

Electron-beam lithography with aromatic self-assembled monolayers on silicon surfaces

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1715083 ◽

2004 ◽

Vol 22 (3) ◽

pp. 1114 ◽

Cited By ~ 9

Author(s):

A. Küller ◽

M. A. El-Desawy ◽

V. Stadler ◽

W. Geyer ◽

W. Eck ◽

...

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

Silicon Surfaces ◽

Self Assembled Monolayers ◽

Assembled Monolayers ◽

Self Assembled

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Oxygen gas assisted electron beam lithography in organosilane self-assembled monolayers

Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. ◽

10.1109/imnc.2004.245792 ◽

2004 ◽

Author(s):

M. Yamaguchi ◽

N. Saito ◽

O. Takai

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

Self Assembled Monolayers ◽

Assembled Monolayers ◽

Oxygen Gas ◽

Self Assembled

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Directed Immobilization of Protein-Coated Nanospheres to Nanometer-Scale Patterns Fabricated by Electron Beam Lithography of Poly(ethylene glycol) Self-Assembled Monolayers

Langmuir ◽

10.1021/la052306v ◽

2006 ◽

Vol 22 (11) ◽

pp. 5100-5107 ◽

Cited By ~ 52

Author(s):

Jonas Rundqvist ◽

Jan H. Hoh ◽

David B. Haviland

Keyword(s):

Electron Beam ◽

Ethylene Glycol ◽

Electron Beam Lithography ◽

Self Assembled Monolayers ◽

Nanometer Scale ◽

Poly Ethylene Glycol ◽

Assembled Monolayers ◽

Self Assembled ◽

Poly Ethylene

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Nanoscale Patterning of Protein Using Electron Beam Lithography of Organosilane Self-Assembled Monolayers

Small ◽

10.1002/smll.200500091 ◽

2005 ◽

Vol 1 (8-9) ◽

pp. 833-837 ◽

Cited By ~ 62

Author(s):

Guo-Jun Zhang ◽

Takashi Tanii ◽

Tamotsu Zako ◽

Takumi Hosaka ◽

Takeo Miyake ◽

...

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

Self Assembled Monolayers ◽

Nanoscale Patterning ◽

Assembled Monolayers ◽

Self Assembled

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Bioactive Templates Fabricated by Low-Energy Electron Beam Lithography of Self-Assembled Monolayers

Langmuir ◽

10.1021/la0009543 ◽

2001 ◽

Vol 17 (1) ◽

pp. 178-182 ◽

Cited By ~ 71

Author(s):

C. K. Harnett ◽

K. M. Satyalakshmi ◽

H. G. Craighead

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

Low Energy ◽

Energy Electron ◽

Self Assembled Monolayers ◽

Assembled Monolayers ◽

Low Energy Electron ◽

Self Assembled

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Secondary-electron signal level measurements of self-assembled monolayers for spatial-phase-locked electron-beam lithography

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.3646897 ◽

2011 ◽

Vol 29 (6) ◽

pp. 06F308 ◽

Cited By ~ 2

Author(s):

Lin Lee Cheong ◽

Jose M. Lobez ◽

Euclid E. Moon ◽

Jeffrey T. Hastings ◽

Henry I. Smith

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

Secondary Electron ◽

Self Assembled Monolayers ◽

Spatial Phase ◽

Assembled Monolayers ◽

Self Assembled

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Electron-Beam-Induced Damage in Self-Assembled Monolayers

The Journal of Physical Chemistry ◽

10.1021/jp960705g ◽

1996 ◽

Vol 100 (39) ◽

pp. 15900-15909 ◽

Cited By ~ 71

Author(s):

Kannan Seshadri ◽

Karl Froyd ◽

Atul N. Parikh ◽

David L. Allara ◽

Michael J. Lercel ◽

...

Keyword(s):

Electron Beam ◽

Self Assembled Monolayers ◽

Assembled Monolayers ◽

Self Assembled

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Synthesis of Aryl-Terminated Polyenaldehydes and Polyenetriethoxysilanes for Preparation of Self-Assembled Monolayers on Silicon Surfaces

Synthesis ◽

10.1055/s-2001-15224 ◽

2001 ◽

Vol 2001 (09) ◽

pp. 1368-1376 ◽

Cited By ~ 5

Author(s):

Franz Effenberger ◽

Markus Wezstein

Keyword(s):

Silicon Surfaces ◽

Self Assembled Monolayers ◽

Assembled Monolayers ◽

Self Assembled

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Fluorescent Nanoparticle Adhesion Assay: a Novel Method for Surface pKa Determination of Self-Assembled Monolayers on Silicon Surfaces

Langmuir ◽

10.1021/la203560k ◽

2012 ◽

Vol 28 (7) ◽

pp. 3403-3411 ◽

Cited By ~ 30

Author(s):

Koen van der Maaden ◽

Karen Sliedregt ◽

Alexander Kros ◽

Wim Jiskoot ◽

Joke Bouwstra

Keyword(s):

Silicon Surfaces ◽

Self Assembled Monolayers ◽

Adhesion Assay ◽

Assembled Monolayers ◽

Pka Determination ◽

Novel Method ◽

Fluorescent Nanoparticle ◽

Self Assembled

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Direct observation of patterned self-assembled monolayers and bilayers on silica-on-silicon surfaces

Optical Materials Express ◽

10.1364/ome.5.000149 ◽

2014 ◽

Vol 5 (1) ◽

pp. 149 ◽

Cited By ~ 1

Author(s):

Hadas Alon ◽

Idan Bakish ◽

Josh Nehrer ◽

Assaf Y. Anderson ◽

Chaim N. Sukenik ◽

...

Keyword(s):

Direct Observation ◽

Silicon Surfaces ◽

Self Assembled Monolayers ◽

Assembled Monolayers ◽

Self Assembled

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A comparative study of the growth of octadecyltrichlorosilane and 3-mercaptopropyltrimethoxysilane self-assembled monolayers on hydrophilic silicon surfaces

Applied Surface Science ◽

10.1016/j.apsusc.2008.06.051 ◽

2008 ◽

Vol 255 (5) ◽

pp. 1726-1735 ◽

Cited By ~ 32

Author(s):

Shang-Ray Yang ◽

Bernd O. Kolbesen

Keyword(s):

Comparative Study ◽

Silicon Surfaces ◽

Self Assembled Monolayers ◽

Assembled Monolayers ◽

Self Assembled

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