Composition, structural, and electrical properties of fluorinated silicon–nitride thin films grown by remote plasma-enhanced chemical-vapor deposition from SiF[sub 4]/NH[sub 3] mixtures

J. Fandiño; A. Ortiz; L. Rodrı́guez-Fernandez; J. C. Alonso

doi:10.1116/1.1699335

Composition, structural, and electrical properties of fluorinated silicon–nitride thin films grown by remote plasma-enhanced chemical-vapor deposition from SiF[sub 4]/NH[sub 3] mixtures

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1699335 ◽

2004 ◽

Vol 22 (3) ◽

pp. 570 ◽

Cited By ~ 6

Author(s):

J. Fandiño ◽

A. Ortiz ◽

L. Rodrı́guez-Fernandez ◽

J. C. Alonso

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Silicon Nitride ◽

Electrical Properties ◽

Vapor Deposition ◽

Chemical Vapor ◽

Remote Plasma ◽

Structural And Electrical Properties

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Structural and electrical properties of SrTiO3 thin films prepared by plasma enhanced metalorganic chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581714 ◽

1999 ◽

Vol 17 (4) ◽

pp. 1982-1986 ◽

Cited By ~ 13

Author(s):

Y. B. Hahn ◽

D. O. Kim

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Electrical Properties ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Structural And Electrical Properties ◽

Metalorganic Chemical

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Comparative studies of structural and electrical properties of doped microcrystalline silicon thin films deposited by hot-wire chemical vapor deposition

2008 33rd IEEE Photovolatic Specialists Conference ◽

10.1109/pvsc.2008.4922565 ◽

2008 ◽

Author(s):

P. Kumar ◽

B. Schroeder

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Electrical Properties ◽

Vapor Deposition ◽

Comparative Studies ◽

Chemical Vapor ◽

Hot Wire ◽

Microcrystalline Silicon ◽

Silicon Thin Films ◽

Structural And Electrical Properties

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Local atomic structure in thin films of silicon nitride and silicon diimide produced by remote plasma-enhanced chemical-vapor deposition

Physical Review B ◽

10.1103/physrevb.33.7069 ◽

1986 ◽

Vol 33 (10) ◽

pp. 7069-7076 ◽

Cited By ~ 259

Author(s):

D. V. Tsu ◽

G. Lucovsky ◽

M. J. Mantini

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Silicon Nitride ◽

Atomic Structure ◽

Vapor Deposition ◽

Chemical Vapor ◽

Local Atomic Structure ◽

Remote Plasma

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Structural and electrical properties of epitaxial Bi2Se3 thin films grown by hybrid physical-chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.4704680 ◽

2012 ◽

Vol 100 (16) ◽

pp. 162110 ◽

Cited By ~ 32

Author(s):

Joseph E. Brom ◽

Yue Ke ◽

Renzhong Du ◽

Dongjin Won ◽

Xiaojun Weng ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Electrical Properties ◽

Vapor Deposition ◽

Chemical Vapor ◽

Physical Chemical ◽

Structural And Electrical Properties

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Structural and Electrical Properties of SnO2:F Thin Films Prepared by Chemical Vapor Deposition Method

Acta Physica Polonica A ◽

10.12693/aphyspola.131.222 ◽

2017 ◽

Vol 131 (1) ◽

pp. 222-225 ◽

Cited By ~ 8

Author(s):

N. Najafi ◽

S.M. Rozati

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Electrical Properties ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Structural And Electrical Properties

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Structural and electrical properties of Al2O3 thin films on p-Si grown by low-pressure metalorganic chemical vapor deposition

Applied Surface Science ◽

10.1016/0169-4332(93)90768-7 ◽

1993 ◽

Vol 65-66 ◽

pp. 854-857 ◽

Cited By ~ 9

Author(s):

T.W. Kim ◽

S.S. Yom ◽

W.N. Kang ◽

Y.S. Yoon ◽

Chayeon Kim ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Electrical Properties ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Low Pressure ◽

Structural And Electrical Properties ◽

Metalorganic Chemical

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Structural and electrical properties of Cu2O thin films deposited on ZnO by metal organic chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3491036 ◽

2010 ◽

Vol 28 (6) ◽

pp. 1338-1343 ◽

Cited By ~ 15

Author(s):

SeongHo Jeong ◽

Eray S. Aydil

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Electrical Properties ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Structural And Electrical Properties ◽

Metal Organic ◽

Cu2o Thin Films ◽

Organic Chemical Vapor Deposition

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Structural and electrical properties of BaTiO3thin films grown onp‐InSb substrate by metalorganic chemical vapor deposition at low temperature

Applied Physics Letters ◽

10.1063/1.109550 ◽

1993 ◽

Vol 62 (15) ◽

pp. 1788-1790 ◽

Cited By ~ 16

Author(s):

T. W. Kim ◽

M. Jung ◽

H. J. Kim ◽

Y. S. Yoon ◽

W. N. Kang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Electrical Properties ◽

Low Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Structural And Electrical Properties ◽

Metalorganic Chemical

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Visible photoluminescence from silicon nanoclusters embedded in silicon nitride films prepared by remote plasma-enhanced chemical vapor deposition

Physica E Low-dimensional Systems and Nanostructures ◽

10.1016/j.physe.2006.12.047 ◽

2007 ◽

Vol 38 (1-2) ◽

pp. 148-151 ◽

Cited By ~ 6

Author(s):

A. Benami ◽

G. Santana ◽

B.M. Monroy ◽

A. Ortiz ◽

J.C. Alonso ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Silicon Nitride ◽

Vapor Deposition ◽

Chemical Vapor ◽

Silicon Nanoclusters ◽

Remote Plasma ◽

Visible Photoluminescence ◽

Silicon Nitride Films

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Synthesis and Electrical Properties of (Bi1/2Na1/2)TiO3(BNT) Ferroelectric Thin Films by Liquid Sprayed Mist Chemical Vapor Deposition Technique

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2006.038 ◽

2006 ◽

Vol 6 (11) ◽

pp. 3479-3482

Author(s):

Bok-Hee Kim ◽

Sang-Hee Kim ◽

Jong-Hwan Kim ◽

Kun-Jae Lee ◽

Yong-Ho Choa ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Electrical Properties ◽

Vapor Deposition ◽

Chemical Vapor ◽

Ferroelectric Thin Films ◽

Deposition Technique ◽

Chemical Vapor Deposition Technique ◽

Vapor Deposition Technique

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