Preparation of TiN films by arc ion plating using dc and pulsed biases

2004 ◽  
Vol 22 (2) ◽  
pp. 250-254 ◽  
Author(s):  
M. D. Huang ◽  
Y. P. Lee ◽  
C. Dong ◽  
G. Q. Lin ◽  
C. Sun ◽  
...  
Keyword(s):  
Arc Ion Plating ◽  
Tin Films ◽  
Ion Plating

ChemInform Abstract: Characterization of TiN Films Prepared by Electron Shower, Arc Ion- Plating and Sputtering Methods.

ChemInform ◽  
2010 ◽  
Vol 26 (47) ◽  
pp. no-no
Author(s):  
H. YUMOTO ◽  
K. KANEKO ◽  
M. ISHIHARA ◽  
K. AKASI ◽  
T. KANEKO
Keyword(s):  
Arc Ion Plating ◽  
Tin Films ◽  
Ion Plating ◽  
Abstract Characterization ◽  
Electron Shower

Dependence to processing conditions of structure in TiN films deposited by arc ion plating

Vacuum ◽  
2004 ◽  
Vol 74 (3-4) ◽  
pp. 647-651 ◽  
Author(s):  
Tatsuya Matsue ◽  
Takao Hanabusa ◽  
Yasukazu Ikeuchi
Keyword(s):  
Processing Conditions ◽  
Arc Ion Plating ◽  
Tin Films ◽  
Ion Plating

Effect of Axial Magnetic Field on the Microstructure, Hardness and Wear Resistance of TiN Films Deposited by Arc Ion Plating

2015 ◽  
Vol 28 (8) ◽  
pp. 984-993 ◽  
Author(s):  
Yan-Hui Zhao ◽  
Wen-Jin Yang ◽  
Chao-Qian Guo ◽  
Yu-Qiu Chen ◽  
Bao-Hai Yu ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Wear Resistance ◽  
Axial Magnetic Field ◽  
Arc Ion Plating ◽  
Tin Films ◽  
Ion Plating

scholarly journals Mechanical Properties of TiN Films Deposited on Aluminium Substrates by Arc Ion Plating Method.

1999 ◽  
Vol 65 (635) ◽  
pp. 1635-1641 ◽  
Author(s):  
Yasuhiro MIKI ◽  
Tadashi TANIGUCHI ◽  
Kazuya KUSAKA ◽  
Takao HANABUSA ◽  
Eiji MAITANI
Keyword(s):  
Mechanical Properties ◽  
Arc Ion Plating ◽  
Tin Films ◽  
Ion Plating ◽  
Plating Method

Macroparticle-free TiN films prepared by arc ion-plating process

1994 ◽  
Vol 68-69 ◽  
pp. 141-145 ◽  
Author(s):  
G.H. Kang ◽  
H. Uchida ◽  
E.S. Koh
Keyword(s):  
Arc Ion Plating ◽  
Tin Films ◽  
Ion Plating

REDUCTION IN MACROPARTICLES DURING THE DEPOSITION OF TiN FILMS PREPARED BY ARC ION PLATING

1990 ◽  
pp. 312-323
Author(s):  
K. AKARI ◽  
H. TAMAGAKI ◽  
T. KUMAKIRI ◽  
K. TSUJI ◽  
E.S. KOH ◽  
...  
Keyword(s):  
Arc Ion Plating ◽  
Tin Films ◽  
Ion Plating

Oxidition Resistance of Multi-Arc Ion Plating TiN Films

2013 ◽  
Vol 706-708 ◽  
pp. 180-183
Author(s):  
Jie Wang ◽  
Shi Hang Jiang ◽  
Juan Juan Wang
Keyword(s):  
Oxidation Resistance ◽  
Arc Ion Plating ◽  
Tin Films ◽  
Good Oxidation Resistance ◽  
Ion Plating ◽  
Oxidation Test ◽  
Tin Film ◽  
Cyclic Oxidation Test ◽  
Electron Spectrometry ◽  
Short Time

Depositing TiN Film on the surface of 4Cr5MoSiV1 with multi-arc ion plating technology method. And 350°C, 450°C, 550°C and 650 °C short oxidation test and 550 °C cyclic oxidation test. By scanning electron microscopy (SEM) and electron spectrometry (EDS) to analysis micro-structure and phase structure of test samples, study TiN film on oxidation resistance, and utilize indentation method to measure mechanical properties. Results show: In a short time under oxidizing conditions, at 550 °C the TiN film still has a good oxidation resistance. The film still have a sufficient bonding strength below 600 °C.

Evaluation of nanocrystalline TiN films prepared by arc ion plating

2009 ◽  
Vol 15 (6) ◽  
pp. 943-948 ◽  
Author(s):  
Shi Hong Zhang ◽  
Yun Kon Joo ◽  
Jae Young Cho ◽  
Hui Gon Chun ◽  
Tong Yul Cho ◽  
...  
Keyword(s):  
Arc Ion Plating ◽  
Tin Films ◽  
Ion Plating

Macroparticles on TiN films prepared by the arc ion plating process

1990 ◽  
Vol 43-44 ◽  
pp. 324-335 ◽  
Author(s):  
C.N. Tai ◽  
E.S. Koh ◽  
K. Akari
Keyword(s):  
Arc Ion Plating ◽  
Tin Films ◽  
Ion Plating
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