High-resolution scanning spreading resistance microscopy of surrounding-gate transistors

2004 ◽  
Vol 22 (1) ◽  
pp. 377 ◽  
Author(s):  
D. Álvarez ◽  
S. Schömann ◽  
B. Goebel ◽  
D. Manger ◽  
T. Schlösser ◽  
...  
Keyword(s):  
High Resolution ◽  
Spreading Resistance ◽  
Surrounding Gate

High-resolution characterization of ultrashallow junctions by measuring in vacuum with scanning spreading resistance microscopy

2007 ◽  
Vol 90 (19) ◽  
pp. 192103 ◽  
Author(s):  
L. Zhang ◽  
K. Ohuchi ◽  
K. Adachi ◽  
K. Ishimaru ◽  
M. Takayanagi ◽  
...  
Keyword(s):  
High Resolution ◽  
Spreading Resistance ◽  
Ultrashallow Junctions

Understanding device performance by incorporating 2D-carrier profiles from high resolution scanning spreading resistance microscopy into device simulations

2012 ◽  
Vol 74 ◽  
pp. 38-42 ◽  
Author(s):  
Aftab Nazir ◽  
Pierre Eyben ◽  
Trudo Clarysse ◽  
Geert Hellings ◽  
Andreas Schulze ◽  
...  
Keyword(s):  
High Resolution ◽  
Device Performance ◽  
Spreading Resistance
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