Field emission characteristics of multiwalled carbon nanotubes grown at low temperatures using electron cyclotron resonance chemical vapor deposition

Yun Sung Woo; Duk Young Jeon; In Taek Han; Young Jun Park; Ha Jin Kim; Jae Eun Jung; Jong Min Kim; Nae Sung Lee

doi:10.1116/1.1580116

Field emission characteristics of multiwalled carbon nanotubes grown at low temperatures using electron cyclotron resonance chemical vapor deposition

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1580116 ◽

2003 ◽

Vol 21 (4) ◽

pp. 1660 ◽

Cited By ~ 9

Author(s):

Yun Sung Woo ◽

Duk Young Jeon ◽

In Taek Han ◽

Young Jun Park ◽

Ha Jin Kim ◽

...

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Field Emission ◽

Vapor Deposition ◽

Low Temperatures ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Emission Characteristics ◽

Multiwalled Carbon

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Effect of Ion Bombardment on Microstructures of Carbon Nanotubes Grown by Electron Cyclotron Resonance Chemical Vapor Deposition at Low Temperatures

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.1410 ◽

2003 ◽

Vol 42 (Part 1, No. 3) ◽

pp. 1410-1413 ◽

Cited By ~ 13

Author(s):

Yun-Sung Woo ◽

In-Taek Han ◽

Young-Jun Park ◽

Ha-Jin Kim ◽

Jae-Eun Jung ◽

...

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Low Temperatures ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Ion Bombardment ◽

Electron Cyclotron

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Effect of Catalytic Layer Thickness on Growth and Field Emission Characteristics of Carbon Nanotubes Synthesized at Low Temperatures Using Thermal Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.41.4679 ◽

2002 ◽

Vol 41 (Part 1, No. 7A) ◽

pp. 4679-4685 ◽

Cited By ~ 6

Author(s):

Young-Jun Park ◽

In-Taek Han ◽

Ha-Jin Kim ◽

Yun-Sung Woo ◽

Nae-Sung Lee ◽

...

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Layer Thickness ◽

Field Emission ◽

Vapor Deposition ◽

Low Temperatures ◽

Chemical Vapor ◽

Emission Characteristics ◽

Catalytic Layer ◽

Thermal Chemical Vapor Deposition

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Field Emission Characteristics and Growth Analysis of Carbon Nanotubes by Plasma-enhanced Chemical Vapor Deposition

Journal of the Korean Institute of Electrical and Electronic Material Engineers ◽

10.4313/jkem.2003.16.12s.1248 ◽

2003 ◽

Vol 16 (12S) ◽

pp. 1248-1254

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Field Emission ◽

Vapor Deposition ◽

Growth Analysis ◽

Chemical Vapor ◽

Emission Characteristics

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Study on the electron cyclotron resonance plasma chemical vapor deposition of carbon nanotubes

Materials Science and Engineering B ◽

10.1016/j.mseb.2007.03.008 ◽

2007 ◽

Vol 140 (1-2) ◽

pp. 44-47

Author(s):

Zhi Wang ◽

Dechun Ba ◽

Peijiang Cao ◽

ChunhongYu ◽

Ji Liang

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Resonance Plasma

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Heteroepitaxy of AlN on α-Al2O3 by electron cyclotron resonance plasma-assisted chemical vapor deposition at low temperatures

Journal of Crystal Growth ◽

10.1016/0022-0248(93)90279-6 ◽

1993 ◽

Vol 132 (1-2) ◽

pp. 337-340 ◽

Cited By ~ 3

Author(s):

Wei Zhang ◽

Yoshihiro Someno ◽

Makoto Sasaki ◽

Toshio Hirai

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Low Temperatures ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Α Al2o3 ◽

Resonance Plasma

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A comparative study of nitrogen plasma effect on field emission characteristics of single wall carbon nanotubes synthesized by plasma enhanced chemical vapor deposition

Applied Surface Science ◽

10.1016/j.apsusc.2014.10.116 ◽

2014 ◽

Vol 322 ◽

pp. 236-241 ◽

Cited By ~ 9

Author(s):

Avshish Kumar ◽

Shama Parveen ◽

Samina Husain ◽

Javid Ali ◽

Mohammad Zulfequar ◽

...

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Comparative Study ◽

Field Emission ◽

Vapor Deposition ◽

Chemical Vapor ◽

Nitrogen Plasma ◽

Single Wall Carbon Nanotubes ◽

Emission Characteristics ◽

Plasma Effect

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Effects of direct-current bias on the carbonization of Si(100) at low temperatures using electron cyclotron resonance chemical vapor deposition

Thin Solid Films ◽

10.1016/s0040-6090(03)00365-1 ◽

2003 ◽

Vol 435 (1-2) ◽

pp. 340-343

Author(s):

Jae Hwack Pyo ◽

Ki-Woong Whang

Keyword(s):

Chemical Vapor Deposition ◽

Direct Current ◽

Vapor Deposition ◽

Low Temperatures ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Direct Current Bias

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Microcrystalline SiC Films Grown by Electron Cyclotron Resonance Chemical Vapor Deposition at Low Temperatures

Japanese Journal of Applied Physics ◽

10.1143/jjap.34.5527 ◽

1995 ◽

Vol 34 (Part 1, No. 10) ◽

pp. 5527-5532 ◽

Cited By ~ 12

Author(s):

Kuan-Lun Cheng ◽

Huang-Chung Cheng ◽

Chih-Chien Liu ◽

ChiapyngLee ◽

Tri-Rung Yew

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Low Temperatures ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Sic Films

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Effect of nitrogen flow on the properties of carbon nitride films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Vacuum ◽

10.1016/j.vacuum.2021.110223 ◽

2021 ◽

pp. 110223

Author(s):

Sixu Lin ◽

Dong Xie ◽

Yongliang Tang ◽

Yiwen Wang ◽

Fengjuan Jing ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Carbon Nitride ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Nitrogen Flow ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Evolution of structure in thin microcrystalline silicon films grown by electron-cyclotron resonance chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.1289783 ◽

2000 ◽

Vol 88 (7) ◽

pp. 4376 ◽

Cited By ~ 40

Author(s):

M. Birkholz ◽

B. Selle ◽

E. Conrad ◽

K. Lips ◽

W. Fuhs

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Silicon Films ◽

Microcrystalline Silicon ◽

Evolution Of Structure

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