Comparison of silicon dioxide layers grown from three polymethylsiloxane precursors in a high-density oxygen plasma
2003 ◽
Vol 21
(4)
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pp. 1064-1068
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2017 ◽
pp. 0-0
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Keyword(s):
2011 ◽
Vol 279
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pp. 115-119
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1996 ◽
Vol 14
(3)
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pp. 1028-1032
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Keyword(s):
2014 ◽
Vol 29
(6)
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pp. 791-798
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Keyword(s):
2014 ◽
Vol 24
(3)
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pp. 035010
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Keyword(s):
1997 ◽
Vol 15
(3)
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pp. 629
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