Effect of catalyst on growth behavior of carbon nanotubes synthesized by microwave heating thermal chemical vapor deposition process

Hsiu-Fung Cheng; Yen Chuo; Chen-Shien Chou; Jin-Hua Huang; Kuo-Shung Liu; I-Nan Lin

doi:10.1116/1.1531150

Effect of catalyst on growth behavior of carbon nanotubes synthesized by microwave heating thermal chemical vapor deposition process

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1531150 ◽

2003 ◽

Vol 21 (1) ◽

pp. 400 ◽

Cited By ~ 3

Author(s):

Hsiu-Fung Cheng ◽

Yen Chuo ◽

Chen-Shien Chou ◽

Jin-Hua Huang ◽

Kuo-Shung Liu ◽

...

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Microwave Heating ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Growth Behavior ◽

Chemical Vapor Deposition Process ◽

Thermal Chemical Vapor Deposition ◽

Vapor Deposition Process

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Effect of catalyst on growth behavior of carbon nanotube synthesizing by microwave heating thermal chemical vapor deposition process

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1375818 ◽

2001 ◽

Vol 19 (3) ◽

pp. 1026 ◽

Cited By ~ 3

Author(s):

Shi-Cheng Chen ◽

Liang-Yuan Shih ◽

Yu-Chen Chang ◽

George-C Tu ◽

I-Nan Lin

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Nanotube ◽

Microwave Heating ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Growth Behavior ◽

Chemical Vapor Deposition Process ◽

Thermal Chemical Vapor Deposition ◽

Vapor Deposition Process

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Carbon nanotubes, nanofilaments and nanobeads by thermal chemical vapor deposition process

Materials Science and Engineering B ◽

10.1016/s0921-5107(02)00309-4 ◽

2002 ◽

Vol 96 (1) ◽

pp. 24-28 ◽

Cited By ~ 41

Author(s):

Debabrata Pradhan ◽

Maheshwar Sharon

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Thermal Chemical Vapor Deposition ◽

Vapor Deposition Process

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Enhanced Straylight Suppression of Short Carbon Nanotubes by using Platinum Silicide Catalyst Enhancer in Rapid Thermal Chemical Vapor Deposition Process

Applied Surface Science ◽

10.1016/j.apsusc.2021.152250 ◽

2021 ◽

pp. 152250

Author(s):

H.M. Iftekhar Jaim ◽

John G. Hagopian

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Thermal Chemical Vapor Deposition ◽

Platinum Silicide ◽

Short Carbon ◽

Vapor Deposition Process

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Carbon nanotubes induced by n-diamond in a thermal chemical vapor deposition process

Scientia Sinica Chimica ◽

10.1360/032011-215 ◽

2011 ◽

Vol 41 (8) ◽

pp. 1415-1420

Author(s):

ChunYing SHU ◽

Bao WANG ◽

ChunRu WANG ◽

Li JIANG ◽

Feng JIANG

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Thermal Chemical Vapor Deposition ◽

Vapor Deposition Process

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Growth of carbon nanotubes using microwave plasma-enhanced chemical vapor deposition process

Materials Chemistry and Physics ◽

10.1016/s0254-0584(03)00314-6 ◽

2003 ◽

Vol 82 (3) ◽

pp. 571-574 ◽

Cited By ~ 7

Author(s):

Ruo-Mei Liu ◽

Jyh-Ming Ting

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process

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Continuous synthesis of high-crystalline carbon nanotubes by controlling the configuration of the injection part in the floating catalyst chemical vapor deposition process

Carbon letters ◽

10.1007/s42823-020-00131-3 ◽

2020 ◽

Vol 30 (6) ◽

pp. 613-619 ◽

Cited By ~ 1

Author(s):

Ji Hong Park ◽

Junbeom Park ◽

Sung-Hyun Lee ◽

Seung Min Kim

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Continuous Synthesis ◽

Catalyst Chemical Vapor Deposition ◽

Vapor Deposition Process

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Optimization of the chemical vapor deposition process for carbon nanotubes fabrication

Applied Surface Science ◽

10.1016/s0169-4332(02)00210-6 ◽

2002 ◽

Vol 191 (1-4) ◽

pp. 223-239 ◽

Cited By ~ 30

Author(s):

M Grujicic ◽

G Cao ◽

Bonnie Gersten

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process

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Hafnium oxide gate stack prepared by in situ rapid thermal chemical vapor deposition process for advanced gate dielectrics

Journal of Applied Physics ◽

10.1063/1.1500420 ◽

2002 ◽

Vol 92 (5) ◽

pp. 2807-2809 ◽

Cited By ~ 31

Author(s):

S. J. Lee ◽

T. S. Jeon ◽

D. L. Kwong ◽

R. Clark

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Hafnium Oxide ◽

Gate Dielectrics ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Thermal Chemical Vapor Deposition ◽

Vapor Deposition Process

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Microwave-assisted chemical vapor deposition process for synthesizing carbon nanotubes

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1352722 ◽

2001 ◽

Vol 19 (3) ◽

pp. 1030 ◽

Cited By ~ 9

Author(s):

Teng-Fan Kuo ◽

Zhen-Yu Juang ◽

Chuen-Horng Tsai ◽

You-Ming Tsau ◽

Hsiu-Fung Cheng ◽

...

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Microwave Assisted ◽

Vapor Deposition Process

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Growth and properties of vertically well-aligned GaN nanowires by thermal chemical vapor deposition process

Materials Letters ◽

10.1016/j.matlet.2010.11.041 ◽

2011 ◽

Vol 65 (4) ◽

pp. 763-765 ◽

Cited By ~ 4

Author(s):

S.M. Kang ◽

B.K. Kang ◽

D.H. Yoon

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Thermal Chemical Vapor Deposition ◽

Gan Nanowires ◽

Vapor Deposition Process

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