Microwave-assisted chemical vapor deposition process for synthesizing carbon nanotubes

Teng-Fan Kuo; Zhen-Yu Juang; Chuen-Horng Tsai; You-Ming Tsau; Hsiu-Fung Cheng; I-Nan Lin

doi:10.1116/1.1352722

Microwave-assisted chemical vapor deposition process for synthesizing carbon nanotubes

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1352722 ◽

2001 ◽

Vol 19 (3) ◽

pp. 1030 ◽

Cited By ~ 9

Author(s):

Teng-Fan Kuo ◽

Zhen-Yu Juang ◽

Chuen-Horng Tsai ◽

You-Ming Tsau ◽

Hsiu-Fung Cheng ◽

...

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Microwave Assisted ◽

Vapor Deposition Process

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Carbon nanotubes, nanofilaments and nanobeads by thermal chemical vapor deposition process

Materials Science and Engineering B ◽

10.1016/s0921-5107(02)00309-4 ◽

2002 ◽

Vol 96 (1) ◽

pp. 24-28 ◽

Cited By ~ 41

Author(s):

Debabrata Pradhan ◽

Maheshwar Sharon

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Thermal Chemical Vapor Deposition ◽

Vapor Deposition Process

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Growth of carbon nanotubes using microwave plasma-enhanced chemical vapor deposition process

Materials Chemistry and Physics ◽

10.1016/s0254-0584(03)00314-6 ◽

2003 ◽

Vol 82 (3) ◽

pp. 571-574 ◽

Cited By ~ 7

Author(s):

Ruo-Mei Liu ◽

Jyh-Ming Ting

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process

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Enhanced Straylight Suppression of Short Carbon Nanotubes by using Platinum Silicide Catalyst Enhancer in Rapid Thermal Chemical Vapor Deposition Process

Applied Surface Science ◽

10.1016/j.apsusc.2021.152250 ◽

2021 ◽

pp. 152250

Author(s):

H.M. Iftekhar Jaim ◽

John G. Hagopian

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Thermal Chemical Vapor Deposition ◽

Platinum Silicide ◽

Short Carbon ◽

Vapor Deposition Process

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Continuous synthesis of high-crystalline carbon nanotubes by controlling the configuration of the injection part in the floating catalyst chemical vapor deposition process

Carbon letters ◽

10.1007/s42823-020-00131-3 ◽

2020 ◽

Vol 30 (6) ◽

pp. 613-619 ◽

Cited By ~ 1

Author(s):

Ji Hong Park ◽

Junbeom Park ◽

Sung-Hyun Lee ◽

Seung Min Kim

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Continuous Synthesis ◽

Catalyst Chemical Vapor Deposition ◽

Vapor Deposition Process

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Optimization of the chemical vapor deposition process for carbon nanotubes fabrication

Applied Surface Science ◽

10.1016/s0169-4332(02)00210-6 ◽

2002 ◽

Vol 191 (1-4) ◽

pp. 223-239 ◽

Cited By ~ 30

Author(s):

M Grujicic ◽

G Cao ◽

Bonnie Gersten

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process

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Carbon nanotubes obtained along variations in chemical vapor deposition process for improvement in mechanical properties of an epoxy composite

Journal of Analytical and Applied Pyrolysis ◽

10.1016/j.jaap.2015.03.020 ◽

2015 ◽

Vol 113 ◽

pp. 483-490 ◽

Cited By ~ 3

Author(s):

A. Gómez Sánchez ◽

P.G. González ◽

L. García González ◽

F.G. Granados Martínez ◽

N. Flores Ramírez ◽

...

Keyword(s):

Mechanical Properties ◽

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Epoxy Composite ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process

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Cubic and tetragonal maghemite formation inside carbon nanotubes under chemical vapor deposition process conditions

Fullerenes Nanotubes and Carbon Nanostructures ◽

10.1080/1536383x.2020.1784146 ◽

2020 ◽

Vol 28 (11) ◽

pp. 913-918

Author(s):

B. A. Kulnitskiy ◽

V. Z. Mordkovich ◽

A. R. Karaeva ◽

S. A. Urvanov ◽

V. D. Blank

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Process Conditions ◽

Vapor Deposition Process

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A plasma enhanced chemical vapor deposition process to achieve branched carbon nanotubes

Carbon ◽

10.1016/j.carbon.2008.06.059 ◽

2008 ◽

Vol 46 (12) ◽

pp. 1611-1614 ◽

Cited By ~ 30

Author(s):

Y. Abdi ◽

S. Mohajerzadeh ◽

J. Koohshorkhi ◽

M.D. Robertson ◽

C.M. Andrei

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process

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Optimization of the chemical vapor deposition process for carbon nanotubes fabrication

Applied Surface Science ◽

10.1016/s0169-4332(02)00892-9 ◽

2002 ◽

Vol 199 (1-4) ◽

pp. 90-106 ◽

Cited By ~ 28

Author(s):

M Grujicic ◽

G Cao ◽

Bonnie Gersten

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process

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Grafting carbon nanotubes onto copper fibers using a one-step chemical vapor deposition process

Materials Letters ◽

10.1016/j.matlet.2015.04.038 ◽

2015 ◽

Vol 153 ◽

pp. 96-98 ◽

Cited By ~ 5

Author(s):

Yingxi Xie ◽

Longsheng Lu ◽

Yong Tang ◽

Qingfeng Chen

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

One Step ◽

Vapor Deposition Process

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