Epitaxial Ti1-xWxN alloys grown on MgO(001) by ultrahigh vacuum reactive magnetron sputtering: Electronic properties and long-range cation ordering

2003 ◽  
Vol 21 (1) ◽  
pp. 140-146 ◽  
Author(s):  
F. Tian ◽  
J. D’Arcy-Gall ◽  
T.-Y. Lee ◽  
M. Sardela ◽  
D. Gall ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Electronic Properties ◽  
Long Range ◽  
Ultrahigh Vacuum ◽  
Reactive Magnetron Sputtering ◽  
Cation Ordering ◽  
Reactive Magnetron

Electronic properties of Cr1−xAlxN thin films deposited by reactive magnetron sputtering

2002 ◽  
Vol 420-421 ◽  
pp. 312-317 ◽  
Author(s):  
R Sanjinés ◽  
O Banakh ◽  
C Rojas ◽  
P.E Schmid ◽  
F Lévy
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Electronic Properties ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron

Development of preferred orientation in polycrystalline TiN layers grown by ultrahigh vacuum reactive magnetron sputtering

1995 ◽  
Vol 67 (20) ◽  
pp. 2928-2930 ◽  
Author(s):  
J. E. Greene ◽  
J.‐E. Sundgren ◽  
L. Hultman ◽  
I. Petrov ◽  
D. B. Bergstrom
Keyword(s):  
Magnetron Sputtering ◽  
Ultrahigh Vacuum ◽  
Preferred Orientation ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron
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