Characterization of extreme ultraviolet lithography mask defects by actinic inspection with broadband extreme ultraviolet illumination

Mincheol Park; Moonsuk Yi; Paul Mirkarimi; Cindy Larson; Jeffrey Bokor

doi:10.1116/1.1523397

Characterization of extreme ultraviolet lithography mask defects by actinic inspection with broadband extreme ultraviolet illumination

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1523397 ◽

2002 ◽

Vol 20 (6) ◽

pp. 3000 ◽

Cited By ~ 4

Author(s):

Mincheol Park ◽

Moonsuk Yi ◽

Paul Mirkarimi ◽

Cindy Larson ◽

Jeffrey Bokor

Keyword(s):

Extreme Ultraviolet ◽

Extreme Ultraviolet Lithography ◽

Ultraviolet Lithography ◽

Ultraviolet Illumination

Download Full-text

Characterization of out-of-band radiation and plasma parameters in laser-produced Sn plasmas for extreme ultraviolet lithography light sources

Journal of Applied Physics ◽

10.1063/1.2952033 ◽

2008 ◽

Vol 104 (1) ◽

pp. 013305 ◽

Cited By ~ 15

Author(s):

S. Namba ◽

S. Fujioka ◽

H. Sakaguchi ◽

H. Nishimura ◽

Y. Yasuda ◽

...

Keyword(s):

Extreme Ultraviolet ◽

Light Sources ◽

Extreme Ultraviolet Lithography ◽

Plasma Parameters ◽

Ultraviolet Lithography

Download Full-text

Characterization of extreme ultraviolet lithography mask defects from extreme ultraviolet far-field scattering patterns

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1319843 ◽

2000 ◽

Vol 18 (6) ◽

pp. 2930 ◽

Cited By ~ 2

Author(s):

Moonsuk Yi ◽

Seongtae Jeong ◽

Seno Rekawa ◽

Jeffrey Bokor

Keyword(s):

Extreme Ultraviolet ◽

Far Field ◽

Extreme Ultraviolet Lithography ◽

Ultraviolet Lithography

Download Full-text

Picosecond ultrasonic characterization of Mo/Si multilayers for extreme ultraviolet lithography

10.1117/12.351136 ◽

1999 ◽

Cited By ~ 2

Author(s):

Nen-Wen Pu ◽

Seongtae Jeong ◽

Rian Zhao ◽

Jeffrey Bokor

Keyword(s):

Extreme Ultraviolet ◽

Extreme Ultraviolet Lithography ◽

Ultraviolet Lithography ◽

Ultrasonic Characterization

Download Full-text

Characterization of multilayer reflective coatings for extreme ultraviolet lithography

10.1063/1.1291768 ◽

2000 ◽

Author(s):

Marco Wedowski

Keyword(s):

Extreme Ultraviolet ◽

Extreme Ultraviolet Lithography ◽

Ultraviolet Lithography ◽

Reflective Coatings

Download Full-text

Velocity characterization of particulate debris from laser-produced plasmas used for extreme-ultraviolet lithography

Applied Optics ◽

10.1364/ao.34.006513 ◽

1995 ◽

Vol 34 (28) ◽

pp. 6513 ◽

Cited By ~ 13

Author(s):

H. A. Bender ◽

D. O’Connell ◽

W. T. Silfvast

Keyword(s):

Extreme Ultraviolet ◽

Extreme Ultraviolet Lithography ◽

Ultraviolet Lithography ◽

Particulate Debris

Download Full-text

Experimental test chamber design for optics exposure testing and debris characterization of a xenon discharge produced plasma source for extreme ultraviolet lithography

Microelectronic Engineering ◽

10.1016/j.mee.2005.11.012 ◽

2006 ◽

Vol 83 (3) ◽

pp. 476-484 ◽

Cited By ~ 15

Author(s):

Keith C. Thompson ◽

Erik L. Antonsen ◽

Matthew R. Hendricks ◽

Brian E. Jurczyk ◽

M. Williams ◽

...

Keyword(s):

Experimental Test ◽

Extreme Ultraviolet ◽

Test Chamber ◽

Plasma Source ◽

Extreme Ultraviolet Lithography ◽

Ultraviolet Lithography ◽

Chamber Design ◽

Exposure Testing

Download Full-text

Characterization of Surface Variation of Chemically Amplified Photoresist to Evaluate Extreme Ultraviolet Lithography Stochastics Effects

Journal of Photopolymer Science and Technology ◽

10.2494/photopolymer.34.63 ◽

2021 ◽

Vol 34 (1) ◽

pp. 63-70

Author(s):

Eric Liu ◽

Amir Hegazy ◽

Hyeonseon Choi ◽

Maximilian Weires ◽

Robert Brainard ◽

...

Keyword(s):

Extreme Ultraviolet ◽

Extreme Ultraviolet Lithography ◽

Ultraviolet Lithography ◽

Chemically Amplified ◽

Surface Variation ◽

Chemically Amplified Photoresist

Download Full-text

Characterization of an expanded-field Schwarzschild objective for extreme ultraviolet lithography

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.587448 ◽

1994 ◽

Vol 12 (6) ◽

pp. 3820 ◽

Cited By ~ 3

Author(s):

G. D. Kubiak

Keyword(s):

Extreme Ultraviolet ◽

Extreme Ultraviolet Lithography ◽

Ultraviolet Lithography

Download Full-text

Characterization of ruthenium thin films as capping layer for extreme ultraviolet lithography mask blanks

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2799963 ◽

2007 ◽

Vol 25 (6) ◽

pp. 1859 ◽

Cited By ~ 7

Author(s):

Pei-yang Yan ◽

Eberhard Spiller ◽

Paul Mirkarimi

Keyword(s):

Thin Films ◽

Extreme Ultraviolet ◽

Extreme Ultraviolet Lithography ◽

Ultraviolet Lithography ◽

Capping Layer

Download Full-text

Characterization of defect detection sensitivity in inspection of mask substrates and blanks for extreme-ultraviolet lithography

10.1117/12.569849 ◽

2004 ◽

Cited By ~ 9

Author(s):

Edita Tejnil ◽

Eric M. Gullikson ◽

Alan R. Stivers

Keyword(s):

Defect Detection ◽

Extreme Ultraviolet ◽

Detection Sensitivity ◽

Extreme Ultraviolet Lithography ◽

Ultraviolet Lithography

Download Full-text