Investigation of in situ trench etching process and Bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems
2002 ◽
Vol 20
(5)
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pp. 1878
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Keyword(s):
2007 ◽
Vol 25
(6)
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pp. 1808
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2019 ◽
Vol 115
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pp. 364-373
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Keyword(s):
Keyword(s):
2011 ◽
Vol 412
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pp. 219-222
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Keyword(s):
2003 ◽
Vol 21
(4)
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pp. 1550-1562
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2015 ◽
Vol 19
(3)
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pp. 777-787
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2002 ◽
Vol 12
(5)
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pp. 574-581
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Keyword(s):
2002 ◽
Vol 20
(1)
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pp. 154
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