Investigation of in situ trench etching process and Bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems

Author(s):  
Kitt Wai Kok ◽  
Won Jong Yoo ◽  
K. Sooriakumar ◽  
J. Sheng Pan ◽  
E. Y. Lee
2019 ◽  
Vol 115 ◽  
pp. 364-373 ◽  
Author(s):  
Yinghua Lin ◽  
Changchun Jiang ◽  
Zhenheng Lin ◽  
Qingtang Chen ◽  
Yongping Lei ◽  
...  

1990 ◽  
Vol 194 ◽  
Author(s):  
J. J. Valencia ◽  
J. P. A. Löfvander ◽  
J. Rösler ◽  
C. G. Levi ◽  
R. Mehrabian

AbstractAdditions of ∼5%B1 and ∼9%Ta to binary γ-TiAl result in the formation of a monoboride isomorphous with TiB but containing Ta in solid solution. This boride exhibits strongly anisotropic growth from the melt, producing rod-like primary phases which are of potential interest for creep strengthening of the γ matrix. Fibrous borides with aspect ratios larger than ∼20 and volume fractions of ∼0.12 have been produced in arc-melted Ti-48AI-9Ta-4.3B alloys. Creep testing at 1255 K indicates that these “in-situ” composites have much higher creep strength than γ-TiAl, but the contribution of the reinforcements is relatively small compared with the solute-strengthening of the matrix.


2011 ◽  
Vol 412 ◽  
pp. 219-222 ◽  
Author(s):  
Hai Da Liao ◽  
Wei Ping Zhang ◽  
Xiao Ming Sun ◽  
Liang Shi ◽  
Ming Feng Qin

Electrolyte containing F–was employed to conduct two-step anodic oxidation. Through adjustment of the composition of electrolyte, TiO2nanotube array with high aspect ratio was grown in situ on Ti matrix, and meanwhile the binary doping with non-metallic elements, namely, F and S, was achieved. Using FSEM, XRD and EDS, the characterization on the topography, structure and doped elements of TiO2nanotubes were performed. Taking methyl orange as the target degradation substance and using xenon lamp to simulate natural lighting, the comparison between the doped non-high-aspect-ratio nanotube and the doped high-aspect-ratio nanotube was made to investigate the related photoelectrocatalytic property. The results showed that the photoelectrocatalytic property of doped nanotube with high aspect ratio was significantly superior to that with non-high aspect ratio. The mixed crystal ratio of anatase and rutile obtained after calcination for 2h at 500°C enabled higher photoelectrocatalytic activity of TiO2nanotube array.


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