High aspect ratio microelectromechanical systems: A versatile approach using carbon nanotubes as a framework
Keyword(s):
2020 ◽
Vol 124
(15)
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pp. 8359-8370
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Keyword(s):
2010 ◽
Vol 19
(1)
◽
pp. 67-72
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2003 ◽
Vol 21
(4)
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pp. 1550-1562
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