Deposition of diamond films at low pressure in a planar large-area microwave surface wave plasma source

2001 ◽  
Vol 19 (6) ◽  
pp. 2835 ◽  
Author(s):  
W. Y. Yeh ◽  
J. Hwang ◽  
T. J. Wu ◽  
W. J. Guan ◽  
C. S. Kou ◽  
...  
Keyword(s):  
Surface Wave ◽  
Diamond Films ◽  
Plasma Source ◽  
Low Pressure ◽  
Large Area

Development of a large-area planar surface-wave plasma source with a cavity launcher driven by a 915 MHz UHF wave

2013 ◽  
Vol 22 (2) ◽  
pp. 025002 ◽  
Author(s):  
Xijiang Chang ◽  
Kazuki Kunii ◽  
Rongqing Liang ◽  
Masaaki Nagatsu
Keyword(s):  
Surface Wave ◽  
Plasma Source ◽  
Planar Surface ◽  
Large Area

High Rate, High Quality, Diamond Synthesis by the Combustion Flame Process

1994 ◽  
Vol 349 ◽  
Author(s):  
K.V. Ravi ◽  
D.S. Olson ◽  
C.A. Koch
Keyword(s):  
Diamond Films ◽  
Chemical Vapor ◽  
Low Pressure ◽  
High Rate ◽  
Synthesis Process ◽  
Oh Radicals ◽  
Diamond Synthesis ◽  
Large Area ◽  
Combustion Flame ◽  
Bulk Diamond

ABSTRACTAmong the various low pressure techniques being developed for the synthesis of diamond films and bulk diamond slabs the combustion flame synthesis process has some distinct advantages. In this approach the combustion reaction between acetylene and oxygen is utilized to generate the requisite energy to activate excess acetylene in the gas mix leading to the deposition of diamond films on a temperature controlled substrate brought into contact with the flame. Other diamond synthesis approaches, such as microwave enhanced and the filament assisted chemical vapor deposition processes, and the various arc jet techniques utilize mixtures of hydrogen and methane as the process gases. Oxygen and oxidizing specie ( such as OH radicals) in the flame ambient may be much more effective than atomic hydrogen in promoting the growth of diamond over the growth of graphite and other non- diamond forms of carbon. In addition this technique enables the growth of diamond at high rates and is relatively easily scaled for large area synthesis. In this paper a discussion of this technique is presented drawing upon recent research by the authors as well as published work to present a general discussion of the issues involved in the development of this technique of low pressure diamond synthesis.

A large-area plasma source excited by a tunable surface wave cavity

1999 ◽  
Vol 70 (5) ◽  
pp. 2331-2337 ◽  
Author(s):  
T. J. Wu ◽  
C. S. Kou
Keyword(s):  
Surface Wave ◽  
Plasma Source ◽  
Large Area

Design of Surface-Wave Sustained Plasma Flat Panel Lamps

2013 ◽  
Vol 756-759 ◽  
pp. 4537-4540
Author(s):  
Kun Wang ◽  
Jian Li
Keyword(s):  
Surface Wave ◽  
Large Scale ◽  
Plasma Source ◽  
Low Pressure ◽  
Flat Panel ◽  
Experimental Apparatus

Surface-Wave sustained plasma (SWP) source is a novel plasma source technology. It can generate large scale plasma at low pressure. SWP is fit for the plasma antennas because of exciting from one pole. The flat panel lamps are widely used in many fields. In this paper, a flat panel lamp is designed based on the Surface-Wave sustained plasma (SWP) source. The design blueprints are introduced and discussed. The design programs of single luminous surface and double luminous surfaces SWP flat panel lamps are introduced. The experimental apparatus is designed for the SWP flat panel lamps in the end.

A planar-type surface-wave plasma source with a subwavelength diffraction grating inclusion for large-area plasma applications

2009 ◽  
Vol 106 (1) ◽  
pp. 013314 ◽  
Author(s):  
Zhaoquan Chen ◽  
Minghai Liu ◽  
Liang Tang ◽  
Peng Hu ◽  
Xiwei Hu
Keyword(s):  
Surface Wave ◽  
Diffraction Grating ◽  
Plasma Source ◽  
Large Area ◽  
Plasma Applications
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