Pressure dependent mode transition in an electron cyclotron resonance plasma discharge

2001 ◽  
Vol 19 (5) ◽  
pp. 2446-2452 ◽  
Author(s):  
Ane Aanesland ◽  
Åshild Fredriksen
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Plasma Discharge ◽  
Electron Cyclotron ◽  
Mode Transition ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Self-consistent simulation of electron cyclotron resonance plasma discharge

2000 ◽  
Vol 7 (7) ◽  
pp. 3062-3067 ◽  
Author(s):  
Minghai Liu ◽  
Xiwei Hu ◽  
Qinchong Wu ◽  
Guoyang Yu ◽  
Yuan Pan
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Plasma Discharge ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Self Consistent ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
Sign in / Sign up

Export Citation Format

Share Document