Particle fluxes in an electron cyclotron resonance plasma discharge

2001 ◽  
Vol 90 (3) ◽  
pp. 1124-1129
Author(s):  
J. González-Damián ◽  
C. Gutiérrez-Tapia
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Plasma Discharge ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Particle Fluxes ◽  
Resonance Plasma

Self-consistent simulation of electron cyclotron resonance plasma discharge

2000 ◽  
Vol 7 (7) ◽  
pp. 3062-3067 ◽  
Author(s):  
Minghai Liu ◽  
Xiwei Hu ◽  
Qinchong Wu ◽  
Guoyang Yu ◽  
Yuan Pan
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Plasma Discharge ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Self Consistent ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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