Static friction and surface roughness studies of surface micromachined electrostatic micromotors using an atomic force/friction force microscope
2001 ◽
Vol 19
(4)
◽
pp. 1777-1785
◽
Keyword(s):
Keyword(s):
1998 ◽
Vol 212
(1)
◽
pp. 1-18
◽
1996 ◽
Vol 54
◽
pp. 866-867
Keyword(s):