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J. C. Wolfe
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Vol 193 ◽  
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Dominique Mailly ◽  
Olivier Dalstein ◽  
Marco Faustini ◽  
Gediminas Seniutinas ◽  
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Ion Beam Lithography ◽  
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scholarly journals Nanoaperture fabrication in ultra-smooth single-grain gold films with helium ion beam lithography

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Jinxin Li ◽  
Alex Belianinov ◽  
Zhao Ma ◽  
C Kyle Renshaw ◽  
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Keyword(s):  
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Ion Beam Lithography ◽  
Helium Ion ◽  
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Author(s):  
Rudra Kumar ◽  
Manvendra Chauhan ◽  
Mohamad G. Moinuddin ◽  
Satinder K. Sharma ◽  
Kenneth E. Gonsalves
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Metal Oxide ◽  
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Ion Beam Lithography ◽  
Helium Ion ◽  
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Xin Zhuang ◽  
Wu Wang ◽  
Rui Gu ◽  
Dongsheng He ◽  
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Keyword(s):  
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Helium Ion

scholarly journals Helium ion beam lithography on fullerene molecular resists for sub-10nm patterning

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Philip Prewett ◽  
Ejaz Huq ◽  
Darren M. Bagnall ◽  
Alex P.G. Robinson ◽  
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Resists for Helium Ion Beam Lithography: Recent Advances

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Author(s):  
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Keyword(s):  
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Ion Beam Lithography ◽  
Recent Advances ◽  
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