Ion-bombardment effects on PtSi/n-Si Schottky contacts studied by ballistic electron emission microscopy

Guo-Ping Ru; Xin-Ping Qu; Shi-Yang Zhu; Bing-Zong Li; C. Detavernier; R. L. Van Meirhaeghe; F. Cardon; R. A. Donaton; K. Maex

doi:10.1116/1.1305269

Ion-bombardment effects on PtSi/n-Si Schottky contacts studied by ballistic electron emission microscopy

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1305269 ◽

2000 ◽

Vol 18 (4) ◽

pp. 1942 ◽

Cited By ~ 1

Author(s):

Guo-Ping Ru ◽

Xin-Ping Qu ◽

Shi-Yang Zhu ◽

Bing-Zong Li ◽

C. Detavernier ◽

...

Keyword(s):

Electron Emission ◽

Ion Bombardment ◽

Schottky Contacts ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy

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Ballistic electron emission microscopy study of Schottky contacts on 6H- and 4H-SiC

Applied Physics Letters ◽

10.1063/1.120910 ◽

1998 ◽

Vol 72 (7) ◽

pp. 839-841 ◽

Cited By ~ 28

Author(s):

H.-J. Im ◽

B. Kaczer ◽

J. P. Pelz ◽

W. J. Choyke

Keyword(s):

Electron Emission ◽

Microscopy Study ◽

Schottky Contacts ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy

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Nanometer-Scale Investigation of Schottky Contacts and Conduction Band Structure on 4H-, 6H- and 15R-SiC Using Ballistic Electron Emission Microscopy

Materials Science Forum ◽

10.4028/www.scientific.net/msf.264-268.813 ◽

1998 ◽

Vol 264-268 ◽

pp. 813-816 ◽

Cited By ~ 4

Author(s):

Hyoung Jin Im ◽

B. Kaczer ◽

J.P. Pelz ◽

Jin Ming Chen ◽

Wolfgang J. Choyke

Keyword(s):

Band Structure ◽

Conduction Band ◽

Electron Emission ◽

Schottky Contacts ◽

Nanometer Scale ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy

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The origin of the integral barrier height in inhomogeneous Au/Co/GaAs67P33-Schottky contacts: A ballistic electron emission microscopy study

Journal of Applied Physics ◽

10.1063/1.366691 ◽

1998 ◽

Vol 83 (1) ◽

pp. 358-365 ◽

Cited By ~ 37

Author(s):

Alexander Olbrich ◽

Johann Vancea ◽

Franz Kreupl ◽

Horst Hoffmann

Keyword(s):

Barrier Height ◽

Electron Emission ◽

Microscopy Study ◽

Schottky Contacts ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy

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Spatial resolution of ballistic electron emission microscopy measured on metal/quantum-well Schottky contacts

Applied Physics Letters ◽

10.1063/1.2120899 ◽

2005 ◽

Vol 87 (18) ◽

pp. 182105 ◽

Cited By ~ 14

Author(s):

C. Tivarus ◽

J. P. Pelz ◽

M. K. Hudait ◽

S. A. Ringel

Keyword(s):

Quantum Well ◽

Spatial Resolution ◽

Electron Emission ◽

Schottky Contacts ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy

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Ballistic electron emission microscopy study of barrier height inhomogeneities introduced in Au/n-Si Schottky contacts by a HF pretreatment

Journal of Applied Physics ◽

10.1063/1.368475 ◽

1998 ◽

Vol 84 (6) ◽

pp. 3226-3231 ◽

Cited By ~ 74

Author(s):

C. Detavernier ◽

R. L. Van Meirhaeghe ◽

R. Donaton ◽

K. Maex ◽

F. Cardon

Keyword(s):

Barrier Height ◽

Electron Emission ◽

Microscopy Study ◽

Schottky Contacts ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy

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A ballistic electron emission microscopy (BEEM) study of the barrier height change of Au/n-GaAs Schottky contacts due to mechanical polishing

Semiconductor Science and Technology ◽

10.1088/0268-1242/10/4/021 ◽

1995 ◽

Vol 10 (4) ◽

pp. 504-508 ◽

Cited By ~ 1

Author(s):

J L Everaert ◽

R L Van Meirhaeghe ◽

W H Laflere ◽

F Cardon

Keyword(s):

Barrier Height ◽

Electron Emission ◽

Schottky Contacts ◽

Mechanical Polishing ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Height Change ◽

Emission Microscopy

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Theory of ballistic electron emission microscopy

Progress in Surface Science ◽

10.1016/s0079-6816(00)00022-8 ◽

2001 ◽

Vol 66 (1-2) ◽

pp. 3-51 ◽

Cited By ~ 37

Author(s):

P.L. de Andres ◽

F.J. Garcia-Vidal ◽

K. Reuter ◽

F. Flores

Keyword(s):

Electron Emission ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy

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Ballistic electron emission microscopy investigation of SiGe nanostructures fabricated using reactive-ion etching

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.585939 ◽

1992 ◽

Vol 10 (6) ◽

pp. 3112 ◽

Cited By ~ 8

Author(s):

J. G. Couillard

Keyword(s):

Electron Emission ◽

Reactive Ion Etching ◽

Ballistic Electron Emission Microscopy ◽

Ion Etching ◽

Ballistic Electron ◽

Microscopy Investigation ◽

Emission Microscopy

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Observation of misfit dislocations at the InxGa1−xAs/GaAs interface by ballistic‐electron‐emission microscopy

Applied Physics Letters ◽

10.1063/1.116950 ◽

1996 ◽

Vol 69 (7) ◽

pp. 940-942 ◽

Cited By ~ 11

Author(s):

E. Y. Lee ◽

S. Bhargava ◽

M. A. Chin ◽

V. Narayanamurti ◽

K. J. Pond ◽

...

Keyword(s):

Electron Emission ◽

Misfit Dislocations ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy

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Comparison of the spatial variation in the barrier height of Si and GaAs Schottky diodes as measured by ballistic electron emission microscopy

Control of Semiconductor Interfaces ◽

10.1016/b978-0-444-81889-8.50048-1 ◽

1994 ◽

pp. 261-266

Author(s):

Karen L. Kavanag ◽

A. Alec Talin ◽

Brent A. Morgan ◽

R. Stanley Williams ◽

Ken Ring

Keyword(s):

Spatial Variation ◽

Barrier Height ◽

Electron Emission ◽

Schottky Diodes ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy

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