Ballistic electron emission microscopy study of barrier height inhomogeneities introduced in Au/n-Si Schottky contacts by a HF pretreatment

C. Detavernier; R. L. Van Meirhaeghe; R. Donaton; K. Maex; F. Cardon

doi:10.1063/1.368475

Ballistic electron emission microscopy study of barrier height inhomogeneities introduced in Au/n-Si Schottky contacts by a HF pretreatment

Journal of Applied Physics ◽

10.1063/1.368475 ◽

1998 ◽

Vol 84 (6) ◽

pp. 3226-3231 ◽

Cited By ~ 74

Author(s):

C. Detavernier ◽

R. L. Van Meirhaeghe ◽

R. Donaton ◽

K. Maex ◽

F. Cardon

Keyword(s):

Barrier Height ◽

Electron Emission ◽

Microscopy Study ◽

Schottky Contacts ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy

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The origin of the integral barrier height in inhomogeneous Au/Co/GaAs67P33-Schottky contacts: A ballistic electron emission microscopy study

Journal of Applied Physics ◽

10.1063/1.366691 ◽

1998 ◽

Vol 83 (1) ◽

pp. 358-365 ◽

Cited By ~ 37

Author(s):

Alexander Olbrich ◽

Johann Vancea ◽

Franz Kreupl ◽

Horst Hoffmann

Keyword(s):

Barrier Height ◽

Electron Emission ◽

Microscopy Study ◽

Schottky Contacts ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy

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Ballistic electron emission microscopy study of Schottky contacts on 6H- and 4H-SiC

Applied Physics Letters ◽

10.1063/1.120910 ◽

1998 ◽

Vol 72 (7) ◽

pp. 839-841 ◽

Cited By ~ 28

Author(s):

H.-J. Im ◽

B. Kaczer ◽

J. P. Pelz ◽

W. J. Choyke

Keyword(s):

Electron Emission ◽

Microscopy Study ◽

Schottky Contacts ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy

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A ballistic electron emission microscopy study of barrier height inhomogeneities introduced in Au/III-V semiconductor Schottky barrier contacts by chemical pretreatments

Semiconductor Science and Technology ◽

10.1088/0268-1242/14/9/321 ◽

1999 ◽

Vol 14 (9) ◽

pp. 871-877 ◽

Cited By ~ 103

Author(s):

G M Vanalme ◽

L Goubert ◽

R L Van Meirhaeghe ◽

F Cardon ◽

P Van Daele

Keyword(s):

Schottky Barrier ◽

Barrier Height ◽

Electron Emission ◽

Microscopy Study ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy ◽

Chemical Pretreatments

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A ballistic electron emission microscopy (BEEM) study of the barrier height change of Au/n-GaAs Schottky contacts due to mechanical polishing

Semiconductor Science and Technology ◽

10.1088/0268-1242/10/4/021 ◽

1995 ◽

Vol 10 (4) ◽

pp. 504-508 ◽

Cited By ~ 1

Author(s):

J L Everaert ◽

R L Van Meirhaeghe ◽

W H Laflere ◽

F Cardon

Keyword(s):

Barrier Height ◽

Electron Emission ◽

Schottky Contacts ◽

Mechanical Polishing ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Height Change ◽

Emission Microscopy

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Comparison of the spatial variation in the barrier height of Si and GaAs Schottky diodes as measured by ballistic electron emission microscopy

Control of Semiconductor Interfaces ◽

10.1016/b978-0-444-81889-8.50048-1 ◽

1994 ◽

pp. 261-266

Author(s):

Karen L. Kavanag ◽

A. Alec Talin ◽

Brent A. Morgan ◽

R. Stanley Williams ◽

Ken Ring

Keyword(s):

Spatial Variation ◽

Barrier Height ◽

Electron Emission ◽

Schottky Diodes ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy

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Ballistic electron emission microscopy study of PtSi–n-Si(100) Schottky diodes

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.586416 ◽

1992 ◽

Vol 10 (2) ◽

pp. 580 ◽

Cited By ~ 31

Author(s):

Philipp Niedermann

Keyword(s):

Electron Emission ◽

Schottky Diodes ◽

Microscopy Study ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy

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Cross Sectional Ballistic Electron Emission Microscopy for Schottky Barrier Height Profiling on Heterostructures

Japanese Journal of Applied Physics ◽

10.1143/jjap.45.2204 ◽

2006 ◽

Vol 45 (3B) ◽

pp. 2204-2207

Author(s):

Doris Rakoczy ◽

Gottfried Strasser ◽

Jürgen Smoliner

Keyword(s):

Schottky Barrier ◽

Barrier Height ◽

Electron Emission ◽

Schottky Barrier Height ◽

Ballistic Electron Emission Microscopy ◽

Cross Sectional ◽

Ballistic Electron ◽

Emission Microscopy

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A ballistic electron emission microscopy study of ferromagnetic thin films embedded in Au/GaAs(100)

Journal of Physics Condensed Matter ◽

10.1088/0953-8984/15/38/016 ◽

2003 ◽

Vol 15 (38) ◽

pp. 6485-6492 ◽

Cited By ~ 3

Author(s):

T Zhang ◽

T-H Shen ◽

D Greig ◽

J A D Matthew ◽

M Hopkinson

Keyword(s):

Thin Films ◽

Electron Emission ◽

Microscopy Study ◽

Ballistic Electron Emission Microscopy ◽

Ferromagnetic Thin Films ◽

Ballistic Electron ◽

Emission Microscopy

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A ballistic electron emission microscopy (BEEM) study of the barrier height change of Au/n-GaAs Schottky barriers due to reactive ion etching

Semiconductor Science and Technology ◽

10.1088/0268-1242/12/7/023 ◽

1997 ◽

Vol 12 (7) ◽

pp. 907-912 ◽

Cited By ~ 33

Author(s):

G M Vanalme ◽

R L Van Meirhaeghe ◽

F Cardon ◽

P Van Daele

Keyword(s):

Barrier Height ◽

Electron Emission ◽

Reactive Ion Etching ◽

Schottky Barriers ◽

Ballistic Electron Emission Microscopy ◽

Ion Etching ◽

Ballistic Electron ◽

Height Change ◽

Emission Microscopy

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Nanometer-Scale Investigation of Schottky Contacts and Conduction Band Structure on 4H-, 6H- and 15R-SiC Using Ballistic Electron Emission Microscopy

Materials Science Forum ◽

10.4028/www.scientific.net/msf.264-268.813 ◽

1998 ◽

Vol 264-268 ◽

pp. 813-816 ◽

Cited By ~ 4

Author(s):

Hyoung Jin Im ◽

B. Kaczer ◽

J.P. Pelz ◽

Jin Ming Chen ◽

Wolfgang J. Choyke

Keyword(s):

Band Structure ◽

Conduction Band ◽

Electron Emission ◽

Schottky Contacts ◽

Nanometer Scale ◽

Ballistic Electron Emission Microscopy ◽

Ballistic Electron ◽

Emission Microscopy

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