The deposition behavior of SiO[sub 2]–TiO[sub 2] thin film by metalorganic chemical vapor deposition method

Si-Moo Lee; Jeong-Hoon Park; Kug-Sun Hong; Woon-Jo Cho; Dong-Lae Kim

doi:10.1116/1.1287154

The deposition behavior of SiO[sub 2]–TiO[sub 2] thin film by metalorganic chemical vapor deposition method

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1287154 ◽

2000 ◽

Vol 18 (5) ◽

pp. 2384 ◽

Cited By ~ 16

Author(s):

Si-Moo Lee ◽

Jeong-Hoon Park ◽

Kug-Sun Hong ◽

Woon-Jo Cho ◽

Dong-Lae Kim

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Deposition Behavior ◽

Metalorganic Chemical

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Microstructure and Optical Properties of Al[sub x]Ga[sub 1−x]N∕GaN Heterostructure Thin Films Grown on Si(111) Substrate by Plasma Assisted Metalorganic Chemical Vapor Deposition Method

10.1063/1.2906048 ◽

2008 ◽

Author(s):

H. Sutanto ◽

A. Subagio ◽

E. Supriyanto ◽

P. Arifin ◽

M. Budiman ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Gan Heterostructure ◽

Metalorganic Chemical

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Properties of Lithium Phosphorus Oxynitride Films Prepared By Metalorganic Chemical Vapor Deposition Method

ECS Meeting Abstracts ◽

10.1149/ma2017-01/5/485 ◽

2017 ◽

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Lithium Phosphorus Oxynitride ◽

Metalorganic Chemical

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Three-Step Growth of Well-Aligned ZnO Nanotube Arrays by Self-Catalyzed Metalorganic Chemical Vapor Deposition Method

Crystal Growth & Design ◽

10.1021/cg900557n ◽

2009 ◽

Vol 9 (10) ◽

pp. 4555-4561 ◽

Cited By ~ 51

Author(s):

Chia Cheng Wu ◽

Dong Sing Wuu ◽

Po Rung Lin ◽

Tsai Ning Chen ◽

Ray Hua Horng

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Nanotube Arrays ◽

Deposition Method ◽

Zno Nanotube ◽

Step Growth ◽

Metalorganic Chemical

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Effect of dislocations on luminescence properties of silicon-doped GaN grown by metalorganic chemical vapor deposition method

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1667509 ◽

2004 ◽

Vol 22 (2) ◽

pp. 624 ◽

Cited By ~ 7

Author(s):

Jahangir Alam ◽

Ravi Bathe ◽

R. D. Vispute ◽

John M. Zavada ◽

Cole W. Litton ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Luminescence Properties ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Silicon Doped ◽

Metalorganic Chemical

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Low-temperature growth and n-type doping of CdTe by the remote-plasma-assisted metalorganic chemical vapor deposition method

Vacuum ◽

10.1016/s0042-207x(00)00333-x ◽

2000 ◽

Vol 59 (2-3) ◽

pp. 678-685 ◽

Cited By ~ 4

Author(s):

Madan Niraula ◽

Daisuke Mochizuki ◽

Toru Aoki ◽

Yoichiro Nakanishi ◽

Yoshinori Hatanaka

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Remote Plasma ◽

Temperature Growth ◽

Metalorganic Chemical

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Low loss GaAs optical waveguides grown by the metalorganic chemical vapor deposition method

Applied Physics Letters ◽

10.1063/1.96210 ◽

1985 ◽

Vol 47 (3) ◽

pp. 186-187 ◽

Cited By ~ 20

Author(s):

K. Hiruma ◽

H. Inoue ◽

K. Ishida ◽

H. Matsumura

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Optical Waveguides ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Low Loss ◽

Metalorganic Chemical

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Low Temperature Synthesis of AlN Films by ICP-Assisted Metalorganic Chemical Vapor Deposition Method

Integrated Ferroelectrics ◽

10.1080/10584580490895707 ◽

2004 ◽

Vol 68 (1) ◽

pp. 95-103

Author(s):

CHENG-HSIEN CHOU ◽

JIN-HUA HUANG ◽

YUNG-CHEN LIN ◽

NYAN HWA TAI ◽

I-NAN LIN

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Metalorganic Chemical

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c-Axis-OrientedPb(Zr,Ti)O3Thin Films Prepared by Digital Metalorganic Chemical Vapor Deposition Method

Japanese Journal of Applied Physics ◽

10.1143/jjap.33.4066 ◽

1994 ◽

Vol 33 (Part 1, No. 7A) ◽

pp. 4066-4069 ◽

Cited By ~ 7

Author(s):

Yoshihiro Sotome ◽

Junji Senzaki ◽

Shin-ichi Morita ◽

Satoshi Tanimoto ◽

Tadahiko Hirai ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Metalorganic Chemical

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Study of Mg-doped GaN Thin Films Grown on c-Plane Sapphire Substrate by Plasma Assisted Metalorganic Chemical Vapor Deposition Method

10.1063/1.2906072 ◽

2008 ◽

Author(s):

A. Subagio ◽

H. Sutanto ◽

E. Supriyanto ◽

M. Budiman ◽

P. Arifin ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Sapphire Substrate ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Metalorganic Chemical ◽

Mg Doped

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Preparation ofC-Axis-Oriented PLT Thin Films by the Metalorganic Chemical Vapor Deposition Method

Japanese Journal of Applied Physics ◽

10.1143/jjap.29.l1874 ◽

1990 ◽

Vol 29 (Part 2, No. 10) ◽

pp. L1874-L1876 ◽

Cited By ~ 19

Author(s):

Koji Tominaga ◽

Masaki Miyajima ◽

Yukio Sakashita ◽

Hideo Segawa ◽

Masaru Okada

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Metalorganic Chemical

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