Electrostatically Actuated Coupled MEMS Resonators

2011 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Kyle N. Taylor
Keyword(s):  
Nonlinear Response ◽  
Multiple Scales ◽  
Equations Of Motion ◽  
System Structure ◽  
Lagrange Equations ◽  
Electrostatically Actuated ◽  
Beam System ◽  
Mems Resonators ◽  
The Mathematical Model ◽  
Steady State Solutions

This paper deals with the nonlinear response of an electrostatically actuated cantilever beam system composed of two micro beam resonators near natural frequency. The mathematical model of the system is obtained using Lagrange equations. The equations of motion are nondimensionalized and then the method of multiple scales is used to find steady state solutions. Both AC and DC actuation voltages of the first beam are considered, while the influence on the system of DC on the second beam is explored. Graphical representations of the influence of the detuning parameters are provided for a typical micro beam system structure.

Nonlinear Dynamics of Electrostatically Actuated Coupled MEMS Parallel Cantilever Resonators

2012 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Kyle N. Taylor
Keyword(s):  
Nonlinear Response ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Equations Of Motion ◽  
Lagrange Equations ◽  
Electrostatically Actuated ◽  
Frequency Responses ◽  
Beam System ◽  
Ground Plate ◽  
Steady State Solutions

This paper deals with the nonlinear response of a coupled cantilever system composed of two micro beams electrostatically actuated. The AC frequency of actuation is near natural frequency of the cantilevers. The two cantilevers are identical. Lagrange equations are used to develop a mathematical model of the system. These equations of motion are nondimensionalized and subjected to the method of multiple scales in order to find steady state solutions. Alternating Current (AC) and Direct Current (DC) actuation voltages are applied between the first cantilever and ground plate with DC voltage applied between the first and second cantilevers. Amplitude-frequency and phase-frequency responses of the system are provided for typical micro beam system structures.

Reduced Order Model for MEMS Cantilever Resonators Under Soft AC Voltage Near Natural Frequency

2012 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Israel Martinez
Keyword(s):  
Natural Frequency ◽  
Nonlinear Response ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Electrostatic Force ◽  
Reduced Order Model ◽  
Order Model ◽  
Reduced Order ◽  
First Order ◽  
Electrostatically Actuated

The nonlinear response of an electrostatically actuated cantilever beam microresonator is investigated. The AC voltage is of frequency near resonator’s natural frequency. A first order fringe correction of the electrostatic force and viscous damping are included in the model. The dynamics of the resonator is investigated using the Reduced Order Model (ROM) method, based on Galerkin procedure. Steady-state motions are found. Numerical results for the uniform microresonator are compared with those obtained via the Method of Multiple Scales (MMS).

scholarly journals Nonlinear tuning of microresonators for dynamic range enhancement

2015 ◽  
Vol 471 (2179) ◽  
pp. 20140969 ◽  
Author(s):  
M. Saghafi ◽  
H. Dankowicz ◽  
W. Lacarbonara
Keyword(s):  
Nonlinear Response ◽  
Dynamic Range ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Equations Of Motion ◽  
Path Following ◽  
Critical Amplitude ◽  
Inertia Effects ◽  
Response Characteristics ◽  
The Galerkin Method

This paper investigates the development of a novel framework and its implementation for the nonlinear tuning of nano/microresonators. Using geometrically exact mechanical formulations, a nonlinear model is obtained that governs the transverse and longitudinal dynamics of multilayer microbeams, and also takes into account rotary inertia effects. The partial differential equations of motion are discretized, according to the Galerkin method, after being reformulated into a mixed form. A zeroth-order shift as well as a hardening effect are observed in the frequency response of the beam. These results are confirmed by a higher order perturbation analysis using the method of multiple scales. An inverse problem is then proposed for the continuation of the critical amplitude at which the transition to nonlinear response characteristics occurs. Path-following techniques are employed to explore the dependence on the system parameters, as well as on the geometry of bilayer microbeams, of the magnitude of the dynamic range in nano/microresonators.

Influence of Timestep and Mesh Sizes on Numerical Simulations of Boundary Value Problem Model of Electrostatically Actuated MEMS Resonators

2019 ◽  
Author(s):  
Julio Beatriz ◽  
Dumitru I. Caruntu
Keyword(s):  
Boundary Value Problem ◽  
Numerical Simulations ◽  
Multiple Scales ◽  
Boundary Value ◽  
Mesh Size ◽  
Problem Solver ◽  
Time Step ◽  
Problem Model ◽  
Electrostatically Actuated ◽  
Mems Resonators

Abstract This paper deals with the effects of mesh size and time step on the numerical simulations using bvp4c, a Matlab Boundary Value Problem solver, on the time response of electrostatically actuated MEMS resonators. These results are compared to the reduced order model as well as the method of multiple scales to test how accurate these results are at lower amplitudes. The refinement of mesh size leads to more accurate results to a certain extent, as it eventually reaches a convergence. It should be said that the larger the mesh size, the longer the calculations take. A similar result occurs with timestep size. The smaller the timestep the more accurate the results. However, the CPU time increases significantly. However, beyond a certain timestep, any smaller time step would not yield any noticeable differences. Thus it can be said convergence has been reached.

Reduced Order Model of Two Coupled MEMS Parallel Cantilever Resonators Under DC and AC Voltage Near Natural Frequency

2012 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Kyle N. Taylor
Keyword(s):  
Frequency Response ◽  
Natural Frequency ◽  
Multiple Scales ◽  
Equations Of Motion ◽  
Reduced Order Model ◽  
Lagrange Equations ◽  
Order Model ◽  
Reduced Order ◽  
Dc Voltage ◽  
Ground Plate

This paper deals with a system of two coupled parallel identical MEMS cantilever resonators and a ground plate. Alternating Current (AC) and Direct Current (DC) voltages are applied between the first resonator and ground plate, and a DC voltage applied between the resonators. The AC voltage frequency is near natural frequency of the resonators. The electrostatic forces produced by voltages are nonlinear. System equations of motion are obtained using Lagrange equations, then nondimensionalized. The Method of Multiple Scales (MMS) is used to find the steady state frequency response. The Reduced Order Model (ROM) is used to validate MMS results. Matlab is used to find cantilever frequency response of the resonator tip. The DC voltage between resonators is showed to significantly influence the response of the first resonator.

Dynamic Behavior and Stability of a Rotor Under Base Excitation

2006 ◽  
Vol 128 (5) ◽  
pp. 576-585 ◽  
Author(s):  
M. Duchemin ◽  
A. Berlioz ◽  
G. Ferraris
Keyword(s):  
Dynamic Behavior ◽  
Multiple Scales ◽  
Equations Of Motion ◽  
Ritz Method ◽  
Base Excitation ◽  
Flexible Rotor ◽  
Lagrange Equations ◽  
Rotor Systems ◽  
Simple Systems ◽  
Flexible Rotor Systems

The dynamic behavior of flexible rotor systems subjected to base excitation (support movements) is investigated theoretically and experimentally. The study focuses on behavior in bending near the critical speeds of rotation. A mathematical model is developed to calculate the kinetic energy and the strain energy. The equations of motion are derived using Lagrange equations and the Rayleigh-Ritz method is used to study the basic phenomena on simple systems. Also, the method of multiple scales is applied to study stability when the system mounting is subjected to a sinusoidal rotation. An experimental setup is used to validate the presented results.

Nonlinear Vibrations of a Beam-Spring-Mass System

1994 ◽  
Vol 116 (4) ◽  
pp. 433-439 ◽  
Author(s):  
M. Pakdemirli ◽  
A. H. Nayfeh
Keyword(s):  
Nonlinear Response ◽  
Nonlinear Vibrations ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Nonlinear Partial Differential Equations ◽  
Primary Resonance ◽  
Fast Time ◽  
Lagrange Equations ◽  
Response Curves ◽  
Mass System

The nonlinear response of a simply supported beam with an attached spring-mass system to a primary resonance is investigated, taking into account the effects of beam midplane stretching and damping. The spring-mass system has also a cubic nonlinearity. The response is found by using two different perturbation approaches. In the first approach, the method of multiple scales is applied directly to the nonlinear partial differential equations and boundary conditions. In the second approach, the Lagrangian is averaged over the fast time scale, and then the equations governing the modulation of the amplitude and phase are obtained as the Euler-Lagrange equations of the averaged Lagrangian. It is shown that the frequency-response and force-response curves depend on the midplane stretching and the parameters of the spring-mass system. The relative importance of these effects depends on the parameters and location of the spring-mass system.

Electrostatically Actuated MEMS Cantilevers of Linear Thickness Variation

2013 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Mostafa M. Fath El-Den
Keyword(s):  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Electrostatic Force ◽  
Constant Width ◽  
Thickness Variation ◽  
Electrostatically Actuated ◽  
Phase Amplitude ◽  
Mems Cantilevers ◽  
Relationship Of ◽  
Steady State Solutions

This paper deals with nonuniform linear thickness variation and constant width MEMS cantilever resonators electrostatically actuated through AC voltage near half natural frequency. The frequency response of the structure is investigated. Nonlinearities in the system arise from the electrostatic force. The electrostatic actuation introduces parametric coefficients in both linear and nonlinear parts of the governing equation. The method of multiple scales (MMS) is used to obtain the phase-amplitude relationship of the system, and the steady-state solutions. Parameters’ influences are reported.

Frequency Response of Parametric Resonance of Double Wall Carbon Nanotube Under Electrostatic Actuation for Noncoaxial Vibration

2017 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Ezequiel Juarez
Keyword(s):  
Carbon Nanotube ◽  
Frequency Response ◽  
Multiple Scales ◽  
Van Der Waals ◽  
First Order ◽  
Electrostatically Actuated ◽  
The Stability ◽  
Euler Bernoulli Beam ◽  
Steady State Solutions ◽  
High Length

In this paper, the Method of Multiple Scales is used to investigate the influences of dimensionless damping and voltage parameters on the amplitude-frequency response of an electrostatically actuated double-walled carbon nanotube. The forces responsible for the nonlinearities in the vibrational behavior are intertube van der Waals and electrostatic forces. Soft AC excitation and small viscous damping forces are assumed. Herein, the noncoaxial case is investigated at near-zero amplitude conditions in the free vibration, which eliminates the influence of the cubic van der Waals in the first-order solution. The DWCNT structure is modelled as a cantilever beam with Euler-Bernoulli beam assumptions since the DWCNT is characterized with high length-diameter ratio. The results shown assume steady-state solutions in the first-order MMS solution. The importance of the results in this paper are the effect of damping and detuning frequency on the stability of the DWCNT vibration.

Simultaneous Resonance of Soft AC Doubly Actuated MEMS Resonators

2014 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Natural Frequency ◽  
Phase Difference ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
The Other ◽  
Voltage Amplitude ◽  
Amplitude Response ◽  
Electrostatically Actuated ◽  
Mems Resonators ◽  
Voltage Phase

This paper deals with electrostatically actuated microelectromechanical (MEMS) cantilever resonators under soft AC double actuation. The cantilever is between two parallel ground plates. The two AC frequencies are one near half natural frequency, and the other near natural frequency. There is a phase difference between the two voltages. The system undergoes a simultaneous resonance. The voltage-amplitude response is investigated. The effects of the second voltage, phase difference between voltages, and frequency on the response are reported. The method of multiple scales is used in this paper.

Sign in / Sign up

Export Citation Format

Share Document