Robust Control of Piezo Actuator for Active Error Compensation in Diamond Turning
Abstract This paper describes a new control strategy for the micro positioning system used in a diamond turning process to improve workpiece geometry in spite of hysteresis nonlinearity and guideway/spindle errors. The control strategy consists of two nested loops. The inner loop is a model-based robust controller, which compensates for the hysteresis nonlinearity associated with piezo actuators, and the outer loop is a P-integrator learning controller which eliminates the unmodeled error sources such as guideway and spindle errors. This control strategy was applied to the error compensation in a diamond turning process. Cutting tests were conducted and showed an order of magnitude improvement in the workpiece form accuracy from 10 μm to 1μm on an aluminum alloy disk.