Casimir Effect on Superharmonic Resonance of Bio-NEMS Circular Plate Resonator Sensors

Author(s):  
Martin Botello ◽  
Dumitru I. Caruntu

Casimir effect on superharmonic resonance of electrostatically actuated bio-nano-electro-mechanical system (Bio-NEMS) circular plate resonator sensor is investigated. The plate sensor resonator is clamped at the outer end and suspended over a parallel ground plate. The sensor can be used for detecting human viruses. Superharmonic resonance of the second order, frequency near one-fourth the natural frequency of the resonator, is induced using Alternating Current (AC) voltage. The magnitude of the AC voltage is also large enough to be consider hard excitation acting on the resonator. Beside Casimir effect, other external forces (i.e. electrostatic force and viscous air damping) acting on the MEMS resonator create a nonlinear behaviors such as bifurcation and pull-in instability. Hence, numerical models, such as Method of Multiple Scales (MMS) and Reduced Order Model (ROM), are used to predict the frequency-amplitude response for MEMS resonator. MMS transforms the nonlinear partial differential equation of motion into two simpler problems, namely zero-order and first-order. While, ROM, based on the Galerkin procedure which uses the mode shapes of vibration of the resonator as a basis of functions, transforms the nonlinear partial differential equation of motion into a system of ordinary differential equation with respect to dimensionless time. The frequency-amplitude response allows one to observe the behavior of the system for a range of frequencies near the superharmonic resonance. The effects of parameters such as Casimir effect, voltage, and damping on the frequency-amplitude response are reported.

Author(s):  
Martin Botello ◽  
Julio Beatriz ◽  
Dumitru I. Caruntu

The superharmonic resonance of second order of microelectro-mechanical system (MEMS) circular plate resonator under electrostatic actuation is investigated. The MEMS resonator consists of a clamped circular plate suspended over a parallel ground plate under an applied Alternating Current (AC) voltage. The AC voltage is characterized as hard excitation, i.e. the magnitude is large enough, and the operating frequency is near one-fourth of the natural frequency of the resonator. Reduced Order Model (ROM), based on the Galerkin procedure, transforms the partial differential equation of motion into a system of ordinary differential equations in time using mode shapes of vibration of the circular plate resonator. Three numerical methods are used to predict the voltage-amplitude response of the MEMS plate resonator. First, the Method of Multiple Scales (MMS) is directly applied to the partial differential equation of motion which is this way transformed into zero-order and first-order problems. Second, ROM using two modes of vibration is numerical integrated using MATLAB to predict time responses, and third, the AUTO 07P software for continuation and bifurcation to predict the voltage-amplitude response. The nonlinear behavior (i.e. bifurcation and pull-in instability) of the system is attributed to the inclusion of viscous air damping and electrostatic force in the model. The influences of various parameters (i.e. detuning frequency and damping) are also investigated in this work.


Author(s):  
Martin Botello ◽  
Christian Reyes ◽  
Julio Beatriz ◽  
Dumitru I. Caruntu

This paper investigates the frequency response of superharmonic resonance of the second order of electrostatically actuated nano-electro-mechanical system (NEMS) resonator sensor. The structure of the MEMS device is a resonator cantilever over a ground plate under Alternating Current (AC) voltage. Superharmonic resonance insinuates that the AC voltage is operating in a frequency near one-fourth the natural frequency of the resonator. The forces acting on the system are electrostatic, damping and Casimir force. For the electrostatic force, the AC voltage is in the category of hard excitation in order to induce a bifurcation phenomenon. For Casimir forces to affect the system, the gap distance between the cantilever resonator and base plate is in the range of 20 nm to 1 μm. The differential equation of motion is converted to dimensionless by choosing the gap as reference length for deflections, the length of the resonator for the axial coordinate, and reference time based on the characteristics of the structure. The Method of Multiple Scales (MMS) is used to model the characteristic of the system. MMS transforms the nonlinear partial differential equation of motion into two simpler problems, namely zero-order and first-order. The influences of parameters (i.e. Casimir, damping, second voltage and fringe) were also investigated.


Author(s):  
Ram Dayal Pankaj ◽  
Arun Kumar ◽  
Chandrawati Sindhi

The Ritz variational method has been applied to the nonlinear partial differential equation to construct a model for travelling wave solution. The spatially periodic trial function was chosen in the form of combination of Jacobian Elliptic functions, with the dependence of its parameters


Author(s):  
Dumitru I. Caruntu ◽  
Julio Beatriz ◽  
Jonathan Perez

Abstract This paper deals with voltage-amplitude response of superharmonic resonance of second order of electrostatically actuated clamped MEMS circular plates. A flexible MEMS circular plate, parallel to a ground plate, and under AC voltage, constitute the structure under consideration. Hard excitations due to voltage large enough and AC frequency near one fourth of the natural frequency of the MEMS plate resonator lead the MEMS plate into superharmonic resonance of second order. These excitations produce resonance away from the primary resonance zone. No DC component is included in the voltage applied. The equation of motion of the MEMS plate is solved using two modes of vibration reduced order model (ROM), that is then solved through a continuation and bifurcation analysis using the software package AUTO 07P. This predicts the voltage-amplitude response of the electrostatically actuated MEMS plate. Also, a numerical integration of the system of differential equations using Matlab is used to produce time responses of the system. A typical MEMS silicon circular plate resonator is used to conduct numerical simulations. For this resonator the quantum dynamics effects such as Casimir effect are considered. Also, the Method of Multiple Scales (MMS) is used in this work. All methods show agreement for dimensionless voltage values less than 6. The amplitude increases with the increase of voltage, except around the dimensionless voltage value of 4, where the resonance shows two saddle-node bifurcations and a peak amplitude significantly larger than the amplitudes before and after the dimensionless voltage of 4. A light softening effect is present. The pull-in dimensionless voltage is found to be around 16. The effects of damping and frequency on the voltage response are reported. As the damping increases, the peak amplitude decreases. while the pull-in voltage is not affected. As the frequency increases, the peak amplitude is shifted to lower values and lower voltage values. However, the pull-in voltage and the behavior for large voltage values are not affected.


2013 ◽  
Vol 5 (04) ◽  
pp. 407-422 ◽  
Author(s):  
Matthew A. Beauregard ◽  
Qin Sheng

AbstractFinite difference computations that involve spatial adaptation commonly employ an equidistribution principle. In these cases, a new mesh is constructed such that a given monitor function is equidistributed in some sense. Typical choices of the monitor function involve the solution or one of its many derivatives. This straightforward concept has proven to be extremely effective and practical. However, selections of core monitoring functions are often challenging and crucial to the computational success. This paper concerns six different designs of the monitoring function that targets a highly nonlinear partial differential equation that exhibits both quenching-type and degeneracy singularities. While the first four monitoring strategies are within the so-calledprimitiveregime, the rest belong to a later category of themodifiedtype, which requires the priori knowledge of certain important quenching solution characteristics. Simulated examples are given to illustrate our study and conclusions.


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