Simultaneous Resonances of Electrostatically Actuated MEMS Resonators

2014 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Frequency Response ◽  
Natural Frequency ◽  
Electrostatic Actuation ◽  
The Other ◽  
Electrostatically Actuated ◽  
Mems Resonators ◽  
Simultaneous Resonances

This paper deals with simultaneous resonance of MEMS cantilever resonator sensors under double electrostatic actuation. The system consists of a MEMS cantilever between two parallel fixed plates. The two frequencies of actuation are one near natural frequency, and the other near half natural frequency. The frequency response of the structure is investigated, and parameter influences reported.

ROM of Electrostatically Actuated MEMS Resonators Under Simultaneous Resonances

2014 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Frequency Response ◽  
Natural Frequency ◽  
Electrostatic Actuation ◽  
Reduced Order Model ◽  
Order Model ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Mems Resonator ◽  
Mems Resonators ◽  
Simultaneous Resonances

This paper deals with MEMS resonator sensors under double electrostatic actuation. The system consists of a MEMS cantilever between two parallel fixed plates. The frequencies of actuation are near natural frequency and near half natural frequency. The frequency response of the simultaneous resonance of the structure is investigated using Reduced Order Model (ROM) method.

Voltage Response of MEMS Resonators Under Simultaneous Resonances

2014 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Natural Frequency ◽  
Electrostatic Actuation ◽  
Voltage Response ◽  
Mems Resonator ◽  
Mems Resonators ◽  
Simultaneous Resonances

This paper deals with MEMS resonator sensors under double electrostatic actuation. The system consists of a MEMS cantilever between two parallel fixed plates. The frequencies of actuation are AC near natural frequency, and AC half natural frequency. The voltage response of the structure is investigated, and parameter influences reported.

Simultaneous Resonance of Soft AC Doubly Actuated MEMS Resonators

2014 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Natural Frequency ◽  
Phase Difference ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
The Other ◽  
Voltage Amplitude ◽  
Amplitude Response ◽  
Electrostatically Actuated ◽  
Mems Resonators ◽  
Voltage Phase

This paper deals with electrostatically actuated microelectromechanical (MEMS) cantilever resonators under soft AC double actuation. The cantilever is between two parallel ground plates. The two AC frequencies are one near half natural frequency, and the other near natural frequency. There is a phase difference between the two voltages. The system undergoes a simultaneous resonance. The voltage-amplitude response is investigated. The effects of the second voltage, phase difference between voltages, and frequency on the response are reported. The method of multiple scales is used in this paper.

Casimir Effect on Simultaneous Resonances of Electrostatically Actuated MEMS Resonators

2015 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Natural Frequency ◽  
Bottom Electrode ◽  
Multiple Scales ◽  
Casimir Effect ◽  
Parallel Plates ◽  
Casimir Forces ◽  
Electrostatically Actuated ◽  
Mems Resonator ◽  
Mems Resonators ◽  
Simultaneous Resonances

This paper deals with the influence of Casimir effect on MEMS resonator sensors under double electrostatic actuation and simultaneous resonances. The MEMS cantilever is between two parallel plates (electrodes) under soft AC double actuation. The AC voltage with the bottom electrode is of frequency near half natural frequency of the resonator and the AC voltage with the top electrode is of frequency near natural frequency of the resonator. The method of multiple scales is used to model the behavior of the system. In the model the damping, fringing, voltage, and Casimir forces are taken into consideration and the effects of these parameters on the frequency response are reported. Designing MEMS resonators for applications in fields such as automotive and biomedical can benefit from this work.

Reduced Order Model of Electrostatically Actuated MEMS Resonators Resonance Near Half Natural Frequency

2012 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Israel Martinez ◽  
Martin W. Knecht
Keyword(s):  
Frequency Response ◽  
Natural Frequency ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Reduced Order Model ◽  
Order Model ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Amplitude Frequency Response ◽  
Mems Resonators

This paper uses the Reduced Order Model (ROM) method to investigate the influence of nonlinearities from parametric electrostatic excitation due to soft AC voltage of frequency near half natural frequency of the MEMS cantilever resonator on its frequency response. Most of the analysis in literature investigates pull-in phenomenon, stability, amplitude–frequency relations, or finds time responses of such systems. In this work it is showed that the bifurcation points in the amplitude-frequency response occur at lower frequencies and amplitudes than predicted by the Method of Multiple Scales (MMS), a perturbation method. This result is extremely important for predicting pull-in phenomena. Also the ROM predicts pull-in instability for large initial amplitudes and AC frequencies less than half natural frequency of the resonator. MMS fails to predict this behavior. Increasing the damping and/or decreasing the voltage increases the frequency at which the system undergoes into a pull-in phenomenon.

Nonlinear Parametric Resonance for NEMS and MEMS Biosensor Applications

2010 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Martin W. Knecht
Keyword(s):  
Natural Frequency ◽  
Parametric Resonance ◽  
Nonlinear Behavior ◽  
Electrostatic Actuation ◽  
Mass Detection ◽  
Actuation Frequency ◽  
Electrostatically Actuated ◽  
Biosensor Applications

This paper deals with electrostatically actuated resonator micro- and nano-sensor for mass detection for applications in medicine and biology. Nonlinear parametric resonance of the sensor when the electrostatic actuation frequency is near natural frequency of the system is investigated. Mass deposition is included and its effect on the nonlinear behavior of the resonator is predicted.

Boundary Value Problem Method to Investigate Superharmonic Resonance of MEMS Resonators

2017 ◽  
Author(s):  
Julio Beatriz ◽  
Martin Botello ◽  
Christian Reyes ◽  
Dumitru I. Caruntu
Keyword(s):  
Differential Equation ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Equation Of Motion ◽  
The Other ◽  
Superharmonic Resonance ◽  
Electrostatically Actuated ◽  
Amplitude Frequency Response ◽  
Problem Method ◽  
Mems Resonators

This paper deals with two different methods to analyze the amplitude frequency response of an electrostatically actuated micro resonator. The methods used in this paper are the method of multiple scales, which is an analytical method with one mode of vibration. The other method is based on system of odes which is derived using the partial differential equation of motion, as well as the boundary conditions. This system is then solved using a built in matlab function known as BVP4C. Results are then shown comparing the two methods, under a variety of parameters, including the influence of damping, voltage, and fringe.

Parametric Resonance of MEMS Circular Plate Resonators

2015 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Reynaldo Oyervides
Keyword(s):  
Frequency Response ◽  
Natural Frequency ◽  
Circular Plate ◽  
Parametric Resonance ◽  
Elastic Plate ◽  
Electrostatic Force ◽  
Circular Plates ◽  
Electrostatically Actuated ◽  
Sensing Applications ◽  
Ground Plate

This paper investigates parametric resonance of electrostatically actuated MEMS circular plates for resonator sensing applications. The system consists of a clamped circular elastic plate over a ground plate. Soft AC voltage of frequency near natural frequency of the plate gives the electrostatic force that leads the elastic plate into vibration, more specifically into parametric resonance which can be used afterwards for biosensing purposes. Frequency response and corresponding bifurcations are reported. The effects of damping and voltage are predicted.

Reduced Order Model of Frequency Response of Superharmonic Resonance of Electrostatically Actuated MEMS Resonators

2015 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Frequency Response ◽  
Electrostatic Force ◽  
Reduced Order Model ◽  
Order Model ◽  
Reduced Order ◽  
Superharmonic Resonance ◽  
Electrostatically Actuated ◽  
Mems Resonator ◽  
Mems Resonators ◽  
Ground Plate

This paper deals with superharmonic resonance of electrostatically actuated MEMS resonator sensors. The system consists of a MEMS cantilever on top of a parallel ground plate. An AC voltage of frequency near one fourth the natural frequency of the resonator provides the electrostatic force of actuation. The frequency response of the superharmonic resonance of the structure is investigated using two term Reduced Order Model (ROM) method.

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