Diagonal Mode van der Pauw Stress Sensors: Proof of Diagonal-Mode Conjecture

2018 ◽  
Vol 140 (4) ◽  
Author(s):  
Richard C. Jaeger ◽  
Jeffrey C. Suhling ◽  
Jun Chen

The conjecture discussed in our previous paper [Jaeger, R. C., Motalab, M., Hussain, S., and Suhling, J. C., 2014, “Four-Wire Bridge Measurements of Silicon van der Pauw Stress Sensors,” ASME J. Electron. Packag., 136(4), p. 041014; Jaeger, R. C., Motalab, M., Hussain, S., and Suhling, J. C., 2018, Erratum: “Four-Wire Bridge Measurements of Silicon van der Pauw Stress Sensors,” ASME J. Electron. Packag., 140(1), p. 017001] was backed up by measurements and simulation results, but not mathematically proven. A proof based upon two-port impedance parameter reciprocity is presented with additional experimental confirmation.

2014 ◽  
Vol 2014 (1) ◽  
pp. 000483-000487
Author(s):  
Uday S. Goteti ◽  
Francy J. Akkara ◽  
Richard C. Jaeger ◽  
Michael C. Hamilton ◽  
Jeffrey C. Suhling

Packaging-induced die-stresses due to temperature effects on various materials of the package are characterized using piezoresistive van der Pauw stress sensors over a temperature range of −180° C to 80° C. Piezo-resistive coefficients extracted previously are then used to obtain a mapping between change in resistance and corresponding stress at all tested temperatures. The obtained values of stress are compared with finite element simulation results.


Author(s):  
Richard C. Jaeger ◽  
Jun Chen ◽  
Jeffrey C. Suhling ◽  
Leonid Fursin

Stress sensors have shown potential to provide “health monitoring” of a wide range of issues related to packaging of integrated circuits, and silicon carbide offers the advantage of much higher temperature sensor operation with application in packaged high-voltage, high-power SiC devices as well as both automotive and aerospace systems, geothermal plants, and deep well drilling, to name a few. This paper discusses the theory and uniaxial calibration of resistive stress sensors on 4H silicon carbide (4H-SiC) and provides new theoretical descriptions for four-element resistor rosettes and van der Pauw (VDP) stress sensors. The results delineate the similarities and differences relative to those on (100) silicon: resistors on the silicon face of 4H-SiC respond to only four of the six components of the stress state; a four-element rosette design exists for measuring the in-plane stress components; two stress quantities can be measured in a temperature compensated manner. In contrast to silicon, only one combined coefficient is required for temperature compensated stress measurements. Calibration results from a single VDP device can be used to calculate the basic lateral and transverse piezoresistance coefficients for 4H-SiC material. Experimental results are presented for lateral and transverse piezoresistive coefficients for van der Pauw structures and p- and n-type resistors. The VDP devices exhibit the expected 3.16 times higher stress sensitivity than standard resistor rosettes.


2014 ◽  
Vol 136 (4) ◽  
Author(s):  
Richard C. Jaeger ◽  
Mohammad Motalab ◽  
Safina Hussain ◽  
Jeffrey C. Suhling

Under the proper orientations and excitations, the transverse output of rotationally symmetric four-contact van der Pauw (VDP) stress sensors depends upon only the in-plane shear stress or the difference of the in-plane normal stresses on (100) silicon. In bridge-mode, each sensor requires only one four-wire measurement and produces an output voltage with a sensitivity that is 3.16 times that of the equivalent resistor rosettes or bridges, just as in the normal VDP sensor mode that requires two separate measurements. Both numerical and experimental results are presented to validate the conjectured behavior of the sensor. Similar results apply to sensors on (111) silicon. The output voltage results provide a simple mathematical expression for the offset voltage in Hall effect devices or the response of pseudo Hall-effect sensors. Bridge operation facilitates use of the VDP structure in embedded stress sensors in integrated circuits.


Author(s):  
Richard C. Jaeger ◽  
Mohammad Motalab ◽  
Safina Hussain ◽  
Jeffrey C. Suhling

Four-wire resistance characterization of van der Pauw stress sensors is discussed. Under the proper orientations and excitations, the output of the four-contact sensors can be shown to depend upon only the in-plane shear stress or the in-plane normal stress difference on (100) silicon. The other stress terms are cancelled out by the symmetry of the structure, and the measurements are inherently temperature compensated. In bridge-mode, each sensor requires only one measurement and produces an output voltage that is directly proportional to the shear stress or in-plane normal stress difference, and the sensitivity is 3.16 times that of the equivalent resistor sensors, just as in the normal van der Pauw mode. Experimental, theoretical, finite-difference and finite-element and simulation results are presented demonstrating the behavior of the sensor. The two sensors can be merged into one eight-contact device, or n- and p-tye sensors can be overlaid in standard IC processes. Similar results apply to sensors on (111) silicon.


2011 ◽  
Vol 383-390 ◽  
pp. 2269-2275
Author(s):  
Wei Gao ◽  
Jun Hong Zhang ◽  
Xu Sheng Wu ◽  
Jing Hong Zhao

In an excitation control system of some DC generator, there are accidents sometimes thanks to the snobbery unit. To solve these bothersome, based on an snubber unit of the excitation control circuit, namely a Buck converter topology with rectifier bridge, with the filter capacitance and the exciting winding impedance parameter assured, the preferences of the resistance and capacitance of the snubber circuit is investigated by simulation. The result is that it can limit the switching-on peak current of the switch when the snubber resistance and capacitance’s parameters are increased suitably, and the former one can lose more energy on the snubber resistance, then the latter one can reduce the striking current in the snubber resistance at the switching-on time. Finally, the simulation results are provided to verify that the exact selection of the snubber resistance and capacitance’s parameters can make excitation controlling circuit more stable and reliable.


SPE Journal ◽  
2001 ◽  
Vol 6 (04) ◽  
pp. 452-464 ◽  
Author(s):  
R. Freedman ◽  
S. Lo ◽  
M. Flaum ◽  
G.J. Hirasaki ◽  
A. Matteson ◽  
...  

Agronomie ◽  
2002 ◽  
Vol 22 (4) ◽  
pp. 413-425 ◽  
Author(s):  
Matteo Balderacchi ◽  
Ghasam Alavi ◽  
Ettore Capri ◽  
Alberto Vicari ◽  
Cesare Accinelli ◽  
...  

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