Compliance Synthesis of CSFH MEMS-Based Microgrippers

2016 ◽  
Vol 139 (2) ◽  
Author(s):  
Matteo Verotti ◽  
Alden Dochshanov ◽  
Nicola P. Belfiore
Keyword(s):  
Compliant Mechanism ◽  
Theoretical Models ◽  
Interaction Force ◽  
Environment Interaction ◽  
Element Analysis ◽  
Flexure Hinges ◽  
Compliance Behavior ◽  
Mems Technology ◽  
Conjugate Surfaces ◽  
Gripping Force

In the last decades, grippers have been employed extensively at the microscale, for example, in microbiology and in microassembly. In these fields, specifically, it is essential to improve the performance of these systems in terms of precision, actuation, and sensing of the gripping force. Recent investigations drew attention on the tip–environment interaction force, which gave rise to further studies on the tip compliance behavior. This paper reveals a new method for designing MEMS technology-based compliant microgrippers with prescribed specifications for the jaw tip compliance. This approach relies on the equivalence between a compliant mechanism and its corresponding pseudorigid-body model (PRBM), the former embedding conjugate surfaces flexure hinges (CSFHs) as flexures. Such correspondence has been assessed by means of finite element analysis (FEA) simulations and theoretical models.

Large Stroke Series Compliant Mechanism

2012 ◽  
Vol 490-495 ◽  
pp. 1104-1108 ◽  
Author(s):  
Ming Cai Shan ◽  
Wei Ming Wang ◽  
Shu Yuan Ma ◽  
Shuang Liu
Keyword(s):  
Theoretical Model ◽  
Maximum Stress ◽  
Compliant Mechanism ◽  
Critical Parameters ◽  
Element Analysis ◽  
Flexure Hinges ◽  
Body Model ◽  
System A ◽  
Rigid Body Model ◽  
The Difference

To increase the stroke of precision positioning system, a novel series compliant mechanism is presented which is based on elliptical flexure hinges. Pseudo-rigid-body model and energy method are applied to establish the theoretical model of stiffness and maximum stress, which are critical parameters for the large stroke compliant mechanism. The relationships are analyzed between geometric parameters of the series complaint mechanism, stiffness and maximum stress. According that, the series compliant mechanism is designed with the stroke more than 5mm and stiffness less than 3.2N/mm. The difference is less than 5% between the results of finite element analysis and theoretical model computation, which proves the correctness of the application design.

Design of Contact-aided Compliant Flexure Hinge Mechanism Using Superelastic Nitinol

2021 ◽  
pp. 1-19
Author(s):  
Zhongyuan Ping ◽  
Tianci Zhang ◽  
Chi Zhang ◽  
Jianbin Liu ◽  
Siyang Zuo
Keyword(s):  
Compliant Mechanism ◽  
Nickel Titanium ◽  
Flexure Hinge ◽  
Maximum Strain ◽  
Clinical Value ◽  
Element Analysis ◽  
Flexure Hinges ◽  
Static Models ◽  
Flexible Instruments ◽  
Bending Behaviour

Abstract This paper presents a novel miniature contact-aided compliant mechanism (CCM) that includes flexure hinges and contact-aided structures. This continuum mechanism comprises a nickel–titanium alloy (Nitinol) tube with CCM cut via laser micromachining and actuated using wires bending from −80° to +80° in four directions. The proposed CCM has the following merits: perfect capacity for deflection around the centroid, a self-backbone, and improved torsional as well as tensile strengths. Further, it is pre-assembled. First, kinematic and static models are used to predict the bending behaviour of the mechanism. Thereafter, the maximum strain is evaluated using finite element analysis (FEA) then compared with the static models. Finally, the performances of the mechanism are characterized by experiments. The results validate the proposed models and demonstrate that the torsional and tensile strengths of the proposed CCM increased by more than 100% and 30%, respectively, compared with those of conventional non-CCMs with a similar fatigue life. Moreover, with the integrated forceps and probe, the proposed mechanism can achieve object transfer and square trajectory scanning of the targeted location. These experimental results demonstrate the potential clinical value of the proposed mechanism and provide important insights into the design of long and flexible instruments for endoscopic surgery.

Design and Development of a Dual-Axis Force Sensing MEMS Microgripper

2017 ◽  
Vol 9 (6) ◽  
Author(s):  
Sijie Yang ◽  
Qingsong Xu ◽  
Zhijie Nan
Keyword(s):  
Microelectromechanical Systems ◽  
Experimental Studies ◽  
Capacitive Sensor ◽  
Force Sensor ◽  
Interaction Force ◽  
Electrostatic Actuator ◽  
Element Analysis ◽  
Single Force ◽  
The Right ◽  
Gripping Force

This paper presents the design, simulation, fabrication, and testing processes of a new microelectromechanical systems (MEMS) microgripper, which integrates an electrostatic actuator and a capacitive force sensor. One advantage of the presented gripper is that the gripping force and interaction force in two orthogonal directions can be, respectively, detected by a single force sensor. The whole gripper structure consists of the left actuating part and right sensing part. It owns a simple structure and compact footprint. The actuator and sensor are fixed and linearly guided by four leaf flexures, respectively. The left arm of the gripper is driven through a lever amplification mechanism. By this structure, the displacement from the electrostatic actuator is transmitted and enlarged at the gripper tip. The right arm of the gripper is designed to detect the gripping and interaction forces using a capacitive sensor. The MEMS gripper is manufactured by SOIMUMPs process. The performance of the designed gripper is verified by conducting finite element analysis (FEA) simulation and experimental studies. Moreover, the demonstration of biocellulose gripping confirms the feasibility of the developed gripper device.

Design and analysis of a new flexure-based XY stage

2017 ◽  
Vol 28 (17) ◽  
pp. 2388-2402 ◽  
Author(s):  
Yiling Yang ◽  
Yanding Wei ◽  
Junqiang Lou ◽  
Fengran Xie
Keyword(s):  
Compliant Mechanism ◽  
Experimental Testing ◽  
Structural Parameters ◽  
Theoretical Models ◽  
Experimental Investigations ◽  
Element Analysis ◽  
Amplification Ratio ◽  
Parasitic Motion ◽  
Decoupled Motion ◽  
The Right

This article presents the design, modeling, and experimental testing of a novel piezo-driven XY stage with parallel, decoupled, and compact kinematic structure. The structural design of the stage is based on a hybrid compliant mechanism employing the right-circular double-rocker mechanism and the leaf-type parallelogram mechanism. The proposed XY stage is capable of producing a large workspace range, an excellent decoupled motion, and a suitable resonant frequency. By means of the pseudorigid-body-model method, the theoretical models of the XY stage are derived. Using the finite element analysis simulations, the optimal structural parameters are acquired, and the theoretical models are analyzed and validated. A prototype of the proposed stage was finally manufactured, and several experimental investigations were performed to validate its performances. The experimental results show that the XY stage has a large amplification ratio of 7.48 and a large workspace range of 150.3 µm × 147.9 µm. In addition, the parasitic motion along the y-axis ( x-axis) accounts for 0.94% (0.74%) of the x-axis ( y-axis) motion, which indicates that the stage possesses excellent decoupling characteristics.

scholarly journals Optimal Design for Compliant Mechanism Flexure Hinges: Bridge-Type

Micromachines ◽  
2021 ◽  
Vol 12 (11) ◽  
pp. 1304
Author(s):  
Chia-Nan Wang ◽  
Fu-Chiang Yang ◽  
Van Thanh Tien Nguyen ◽  
Quoc Manh Nguyen ◽  
Ngoc Thai Huynh ◽  
...  
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Taguchi Method ◽  
Compliant Mechanism ◽  
Element Analysis ◽  
Flexure Hinges ◽  
Bridge Type ◽  
Optimal Values ◽  
Grey Relational ◽  
Good Agreement

Compliant mechanisms’ design aims to create a larger workspace and simple structural shapes because these mechanical systems usually have small dimensions, reduced friction, and less bending. From that request, we designed optimal bridge-type compliant mechanism flexure hinges with a high magnification ratio, low stress by using a flexure joint, and especially no friction and no bending. This joint was designed with optimal dimensions for the studied mechanism by using the method of grey relational analysis (GRA), which is based on the Taguchi method (TM), and finite element analysis (FEA). Grey relational grade (GRG) has been estimated by an artificial neural network (ANN). The optimal values were in good agreement with the predicted value of the Taguchi method and regression analysis. The finite element analysis, signal-to-noise analysis, surface plot, and analysis of variance demonstrated that the design dimensions significantly affected the equivalent stress and displacement. The optimal values of displacement were also verified by the experiment. The outcomes were in good agreement with a deviation lower than 6%. Specifically, the displacement amplification ratio was obtained as 65.36 times compared with initial design.

MEMS-Based Conjugate Surfaces Flexure Hinge

2015 ◽  
Vol 137 (1) ◽  
Author(s):  
Matteo Verotti ◽  
Rocco Crescenzi ◽  
Marco Balucani ◽  
Nicola P. Belfiore
Keyword(s):  
Theoretical Models ◽  
Single Step ◽  
Flexure Hinge ◽  
Flexible Beam ◽  
Construction Process ◽  
Static Behavior ◽  
Element Analysis ◽  
Fea Simulation ◽  
Conjugate Surfaces ◽  
Minimum Stress

This paper presents a new concept flexure hinge for MEMS applications and reveals how to design, construct, and experimentally test. This hinge combines a curved beam, as a flexible element, and a pair of conjugate surfaces, whose contact depends on load conditions. The geometry is conceived in such a way that minimum stress conditions are maintained within the flexible beam. A comparison of the new design with the other kind of revolute and flexible joints is presented. Then, the static behavior of the hinge is analyzed by means of a theoretical approach, based on continuum mechanics, and the results are compared to those obtained by means of finite element analysis (FEA) simulation. A silicon hinge prototype is also presented and the construction process, based on single step lithography and reactive ion etching (RIE) technology, is discussed. Finally, a crucial in–SEM experiment is performed and the experimental results are interpreted through the theoretical models.

Design of a Single-Acting Constant-Force Actuator Based on Dielectric Elastomers

2008 ◽  
Author(s):  
Giovanni Berselli ◽  
Rocco Vertechy ◽  
Gabriele Vassura ◽  
Vincenzo Parenti Castelli
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Compliant Mechanism ◽  
Structural Parameters ◽  
Dielectric Elastomer ◽  
Constant Force ◽  
Element Analysis ◽  
Body Model ◽  
Rigid Body Model ◽  
Supporting Frame

The interest in actuators based on dielectric elastomer films as a promising technology in robotic and mechatronic applications is increasing. The overall actuator performances are influenced by the design of both the active film and the film supporting frame. This paper presents a single-acting actuator which is capable of supplying a constant force over a given range of motion. The actuator is obtained by coupling a rectangular film of silicone dielectric elastomer with a monolithic frame designed to suitably modify the force generated by the dielectric elastomer film. The frame is a fully compliant mechanism whose main structural parameters are calculated using a pseudo-rigid-body model and then verified by finite element analysis. Simulations show promising performance of the proposed actuator.

scholarly journals Design and Modeling of a Bio-Inspired Flexible Joint Actuator

Actuators ◽  
2021 ◽  
Vol 10 (5) ◽  
pp. 95
Author(s):  
Ming Xu ◽  
Cheng Rong ◽  
Long He
Keyword(s):  
Hydraulic System ◽  
Driving Forces ◽  
Theoretical Models ◽  
Element Analysis ◽  
Flexible Joint ◽  
Fea Model ◽  
The Finite Element Analysis ◽  
Series Of Experiments ◽  
The Mathematical Model ◽  
Moving Speed

Spiders rely on a hydraulic system to stretch their legs but use muscles to make their legs flex. The compound drive of hydraulics and muscle makes an integrate dexterous structure with powerful locomotion abilities, which perfectly meets the primary requirements of advanced robots. Inspired by this hydraulics-muscle co-drive joint, a novel flexible joint actuator was proposed and its driving characteristics were preliminarily explored. The bio-inspired flexible joint manifested as a double-constrained balloon actuator, which was fabricated by the composite process of 3D printing and casting. To evaluate its performance, the mathematical model was deduced, as well as the finite element analysis (FEA) model. A series of experiments on the rotation angles, driving forces, and efficiencies of the flexible joint were carried out and compared with the mathematical calculations and FEA simulations. The results show that the accuracy of the two theoretical models can be used to assess the joint actuator. The locomotion test of a soft arthropod robot with two flexible joints was also implemented, where the moving speed reached 22 mm/s and the feasibility of the proposed flexible joint applied to a soft robot was demonstrated.

Bistable Compliant Four-Bar Mechanisms With a Single Torsional Spring

2006 ◽  
Author(s):  
Adarsh Mavanthoor ◽  
Ashok Midha
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Mechanism Design ◽  
Compliant Mechanisms ◽  
Compliant Mechanism ◽  
Stored Energy ◽  
Element Analysis ◽  
Bistable Behavior ◽  
Torsional Spring ◽  
Bistable Mechanism

Significant reduction in cost and time of bistable mechanism design can be achieved by understanding their bistable behavior. This paper presents bistable compliant mechanisms whose pseudo-rigid-body models (PRBM) are four-bar mechanisms with a torsional spring. Stable and unstable equilibrium positions are calculated for such four-bar mechanisms, defining their bistable behavior for all possible permutations of torsional spring locations. Finite Element Analysis (FEA) and simulation is used to illustrate the bistable behavior of a compliant mechanism with a straight compliant member, using stored energy plots. These results, along with the four-bar and the compliant mechanism information, can then be used to design a bistable compliant mechanism to meet specified requirements.

Kinematic Synthesis of a D-Drive MEMS Device With Rigid-Body Replacement Method

2018 ◽  
Vol 140 (7) ◽  
Author(s):  
Paolo Sanò ◽  
Matteo Verotti ◽  
Paolo Bosetti ◽  
Nicola P. Belfiore
Keyword(s):  
Rigid Body ◽  
Experimental Testing ◽  
Micro Electro Mechanical System ◽  
Element Analysis ◽  
Kinematic Synthesis ◽  
Replacement Method ◽  
Rigid Body Model ◽  
Mems Device ◽  
Conjugate Surfaces ◽  
Line Path

In this paper, a microsystem with prescribed functional capabilities is designed and simulated. In particular, the development of a straight line path generator micro electro mechanical system (MEMS) device is presented. A new procedure is suggested for avoiding branch or circuit problems in the kinematic synthesis problem. Then, Ball's point detection is used to validate the obtained pseudo-rigid body model (PRBM). A compliant MEMS device is obtained from the PRBM through the rigid-body replacement method by making use of conjugate surfaces flexure hinges (CSFHs). Finally, the functional capability of the device is investigated by means of finite element analysis (FEA) simulations and experimental testing at the macroscale.

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