MEMS-Based Conjugate Surfaces Flexure Hinge

2015 ◽  
Vol 137 (1) ◽  
Author(s):  
Matteo Verotti ◽  
Rocco Crescenzi ◽  
Marco Balucani ◽  
Nicola P. Belfiore

This paper presents a new concept flexure hinge for MEMS applications and reveals how to design, construct, and experimentally test. This hinge combines a curved beam, as a flexible element, and a pair of conjugate surfaces, whose contact depends on load conditions. The geometry is conceived in such a way that minimum stress conditions are maintained within the flexible beam. A comparison of the new design with the other kind of revolute and flexible joints is presented. Then, the static behavior of the hinge is analyzed by means of a theoretical approach, based on continuum mechanics, and the results are compared to those obtained by means of finite element analysis (FEA) simulation. A silicon hinge prototype is also presented and the construction process, based on single step lithography and reactive ion etching (RIE) technology, is discussed. Finally, a crucial in–SEM experiment is performed and the experimental results are interpreted through the theoretical models.

2016 ◽  
Vol 139 (2) ◽  
Author(s):  
Matteo Verotti ◽  
Alden Dochshanov ◽  
Nicola P. Belfiore

In the last decades, grippers have been employed extensively at the microscale, for example, in microbiology and in microassembly. In these fields, specifically, it is essential to improve the performance of these systems in terms of precision, actuation, and sensing of the gripping force. Recent investigations drew attention on the tip–environment interaction force, which gave rise to further studies on the tip compliance behavior. This paper reveals a new method for designing MEMS technology-based compliant microgrippers with prescribed specifications for the jaw tip compliance. This approach relies on the equivalence between a compliant mechanism and its corresponding pseudorigid-body model (PRBM), the former embedding conjugate surfaces flexure hinges (CSFHs) as flexures. Such correspondence has been assessed by means of finite element analysis (FEA) simulations and theoretical models.


Sensors ◽  
2021 ◽  
Vol 21 (4) ◽  
pp. 1459
Author(s):  
Varshitha Yashvanth ◽  
Sazzadur Chowdhury

This paper presents a novel technique to reduce acoustic crosstalk in capacitive micromachined ultrasonic transducer (CMUT) arrays. The technique involves fabricating a thin layer of diisocyanate enhanced silica aerogel on the top surface of a CMUT array. The silica aerogel layer introduces a highly nanoporous permeable layer to reduce the intensity of the Scholte wave at the CMUT-fluid interface. 3D finite element analysis (FEA) simulation in COMSOL shows that the developed technique can provide a 31.5% improvement in crosstalk reduction for the first neighboring element in a 7.5 MHz CMUT array. The average improvement of crosstalk level over the −6 dB fractional bandwidth was 22.1%, which is approximately 5 dB lower than that without an aerogel layer. The results are in excellent agreement with published experimental results to validate the efficacy of the new technique.


Actuators ◽  
2021 ◽  
Vol 10 (5) ◽  
pp. 95
Author(s):  
Ming Xu ◽  
Cheng Rong ◽  
Long He

Spiders rely on a hydraulic system to stretch their legs but use muscles to make their legs flex. The compound drive of hydraulics and muscle makes an integrate dexterous structure with powerful locomotion abilities, which perfectly meets the primary requirements of advanced robots. Inspired by this hydraulics-muscle co-drive joint, a novel flexible joint actuator was proposed and its driving characteristics were preliminarily explored. The bio-inspired flexible joint manifested as a double-constrained balloon actuator, which was fabricated by the composite process of 3D printing and casting. To evaluate its performance, the mathematical model was deduced, as well as the finite element analysis (FEA) model. A series of experiments on the rotation angles, driving forces, and efficiencies of the flexible joint were carried out and compared with the mathematical calculations and FEA simulations. The results show that the accuracy of the two theoretical models can be used to assess the joint actuator. The locomotion test of a soft arthropod robot with two flexible joints was also implemented, where the moving speed reached 22 mm/s and the feasibility of the proposed flexible joint applied to a soft robot was demonstrated.


2013 ◽  
Vol 804 ◽  
pp. 320-324
Author(s):  
Xiang Zan Xie

This paper adopts universal finite element calculation software to carry out finite element analysis for Tianerya trench-buried inverted siphon. Researching variation law of the inverted siphons stress and displacement in construction process and operational process. The calculation results further shown design schemes rationality and safety. The analysis results provide a certain reference for design of trench-buried inverted siphon structure.


2012 ◽  
Vol 204-208 ◽  
pp. 2167-2171
Author(s):  
Yu Lan Wang ◽  
Guo Dong Zheng

Finite element analysis and calculation are held on the superstructure of the auxiliary channel bridge at the right branching of Beijiang Bridge for a short condition and the service phase. The theoretical launching force is calculated and amended in construction. The results show that when considering load effects such as the dead loads of box girders, the live loads of decks and the pre-stressed secondary forces, the eccentric stress state will appear on the webs, and the steel stress produced by shrinkage and creep of concrete can not be ignored. So the launching force must be amended during the construction process. These conclusions have a certain reference value on the bridge design and construction.


Author(s):  
Peng Qi ◽  
Hongbin Liu ◽  
Lakmal Seneviratne ◽  
Kaspar Althoefer

Flexible robot arms have been developed for various medical and industrial applications because of their compliant structures enabling safe environmental interactions. This paper introduces a novel flexible robot arm comprising a number of elastically deformable planar spring elements arranged in series. The effects of flexure design variations on their layer compliance properties are investigated. Numerical studies of the different layer configurations are presented and finite Element Analysis (FEA) simulation is conducted. Based on the suspended platform’s motion of each planar spring, this paper then provides a new method for kinematic modeling of the proposed robot arm. The approach is based on the concept of simultaneous rotation and the use of Rodrigues’ rotation formula and is applicable to a wide class of continuum-style robot arms. At last, the flexible robot arms respectively integrated with two different types of compliance layers are prototyped. Preliminary test results are reported.


2011 ◽  
Vol 314-316 ◽  
pp. 1792-1795
Author(s):  
Hu Huang ◽  
Hong Wei Zhao ◽  
Jie Yang ◽  
Shun Guang Wan ◽  
Jie Mi ◽  
...  

In this paper, a miniaturization nanoindentation and scratch device was developed. Finite element analysis was carried out to study static and modal characteristics of x/y flexure hinge and z axis driving hinge as well as effect of geometric parameters on output performances of z axis driving hinge. Results indicated that x/y flexure hinge and z axis driving hinge had enough strength and high natural frequencies. Geometric parameters of z axis driving hinge affected output performances significantly. The model of developed device was established. Indentation experiments of Si and amorphous alloy showed that the developed miniaturization nanoindentation and scratch device worked well and can carry out indentation experiments with certain accuracy.


2021 ◽  
Vol 335 ◽  
pp. 03011
Author(s):  
Mohammed Shariff Mohamed Sulaiman ◽  
Seong Chun Koay ◽  
Ming Yeng Chan ◽  
Hui Leng Choo ◽  
Ming Meng Pang ◽  
...  

This research investigated the lattice structure fabricated using corn husk fibre reinforced recycled polystyrene composite using Finite Element Analysis (FEA). The material’s properties of this composite material were obtained from previous study. Then, the lattice structure of lattice structure was created using Creo® software and the FEA simulation was done by ANSYS software. In this study, the lattice structures were created using triangular prism and hexagonal prism. The analysis was divided into two conditions: 1) lattice structure with different prism shape and similar surface area, 2) lattice structure with varies of strut thickness and 3) lattice structure with different prism shape and similar lattice parameter. The results show the lattice structure with triangular prism have more structural integrity than hexagonal prism. Then, lattice structure with triangular prism can be built with lesser material but stronger and stiffer than lattice structure with hexagonal prism.


2021 ◽  
Author(s):  
Guodong Zhu ◽  
Dawei Gao

Energy efficiency and leakage magnetic field (LMF) are two important issues in inductive chargers. In this work, the maximum achievable coil efficiency and the corresponding LMF strength are formulated as functions of system parameters, and figure of merits (FOM) are proposed for assessing the efficiency and LMF performance of the coil assemblies. The target application is electric vehicle inductive chargers where the LMF is suppressed via passive shielding. The impact of the coil assembly’s geometric parameters on both FOMs is examined through a combination of finite element analysis (FEA) simulation and magnetic circuit analysis, and measures to improve the FOMs are studied Optimization of an exemplary coil assembly within given dimensional limits is conducted and the performance improvement is verified by FEA simulation results. <br>


2018 ◽  
Vol 140 (7) ◽  
Author(s):  
Paolo Sanò ◽  
Matteo Verotti ◽  
Paolo Bosetti ◽  
Nicola P. Belfiore

In this paper, a microsystem with prescribed functional capabilities is designed and simulated. In particular, the development of a straight line path generator micro electro mechanical system (MEMS) device is presented. A new procedure is suggested for avoiding branch or circuit problems in the kinematic synthesis problem. Then, Ball's point detection is used to validate the obtained pseudo-rigid body model (PRBM). A compliant MEMS device is obtained from the PRBM through the rigid-body replacement method by making use of conjugate surfaces flexure hinges (CSFHs). Finally, the functional capability of the device is investigated by means of finite element analysis (FEA) simulations and experimental testing at the macroscale.


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