Design and Development of a Dual-Axis Force Sensing MEMS Microgripper

2017 ◽  
Vol 9 (6) ◽  
Author(s):  
Sijie Yang ◽  
Qingsong Xu ◽  
Zhijie Nan

This paper presents the design, simulation, fabrication, and testing processes of a new microelectromechanical systems (MEMS) microgripper, which integrates an electrostatic actuator and a capacitive force sensor. One advantage of the presented gripper is that the gripping force and interaction force in two orthogonal directions can be, respectively, detected by a single force sensor. The whole gripper structure consists of the left actuating part and right sensing part. It owns a simple structure and compact footprint. The actuator and sensor are fixed and linearly guided by four leaf flexures, respectively. The left arm of the gripper is driven through a lever amplification mechanism. By this structure, the displacement from the electrostatic actuator is transmitted and enlarged at the gripper tip. The right arm of the gripper is designed to detect the gripping and interaction forces using a capacitive sensor. The MEMS gripper is manufactured by SOIMUMPs process. The performance of the designed gripper is verified by conducting finite element analysis (FEA) simulation and experimental studies. Moreover, the demonstration of biocellulose gripping confirms the feasibility of the developed gripper device.

2016 ◽  
Vol 139 (2) ◽  
Author(s):  
Matteo Verotti ◽  
Alden Dochshanov ◽  
Nicola P. Belfiore

In the last decades, grippers have been employed extensively at the microscale, for example, in microbiology and in microassembly. In these fields, specifically, it is essential to improve the performance of these systems in terms of precision, actuation, and sensing of the gripping force. Recent investigations drew attention on the tip–environment interaction force, which gave rise to further studies on the tip compliance behavior. This paper reveals a new method for designing MEMS technology-based compliant microgrippers with prescribed specifications for the jaw tip compliance. This approach relies on the equivalence between a compliant mechanism and its corresponding pseudorigid-body model (PRBM), the former embedding conjugate surfaces flexure hinges (CSFHs) as flexures. Such correspondence has been assessed by means of finite element analysis (FEA) simulations and theoretical models.


2021 ◽  
Vol 7 (1) ◽  
Author(s):  
Anton Melnikov ◽  
Hermann A. G. Schenk ◽  
Jorge M. Monsalve ◽  
Franziska Wall ◽  
Michael Stolz ◽  
...  

AbstractElectrostatic micromechanical actuators have numerous applications in science and technology. In many applications, they are operated in a narrow frequency range close to resonance and at a drive voltage of low variation. Recently, new applications, such as microelectromechanical systems (MEMS) microspeakers (µSpeakers), have emerged that require operation over a wide frequency and dynamic range. Simulating the dynamic performance under such circumstances is still highly cumbersome. State-of-the-art finite element analysis struggles with pull-in instability and does not deliver the necessary information about unstable equilibrium states accordingly. Convincing lumped-parameter models amenable to direct physical interpretation are missing. This inhibits the indispensable in-depth analysis of the dynamic stability of such systems. In this paper, we take a major step towards mending the situation. By combining the finite element method (FEM) with an arc-length solver, we obtain the full bifurcation diagram for electrostatic actuators based on prismatic Euler-Bernoulli beams. A subsequent modal analysis then shows that within very narrow error margins, it is exclusively the lowest Euler-Bernoulli eigenmode that dominates the beam physics over the entire relevant drive voltage range. An experiment directly recording the deflection profile of a MEMS microbeam is performed and confirms the numerical findings with astonishing precision. This enables modeling the system using a single spatial degree of freedom.


2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Saurabhi Samant ◽  
Wei Wu ◽  
Shijia Zhao ◽  
Behram Khan ◽  
Mohammadali Sharzehee ◽  
...  

AbstractLeft main (LM) coronary artery bifurcation stenting is a challenging topic due to the distinct anatomy and wall structure of LM. In this work, we investigated computationally and experimentally the mechanical performance of a novel everolimus-eluting stent (SYNERGY MEGATRON) purpose-built for interventions to large proximal coronary segments, including LM. MEGATRON stent has been purposefully designed to sustain its structural integrity at higher expansion diameters and to provide optimal lumen coverage. Four patient-specific LM geometries were 3D reconstructed and stented computationally with finite element analysis in a well-validated computational stent simulation platform under different homogeneous and heterogeneous plaque conditions. Four different everolimus-eluting stent designs (9-peak prototype MEGATRON, 10-peak prototype MEGATRON, 12-peak MEGATRON, and SYNERGY) were deployed computationally in all bifurcation geometries at three different diameters (i.e., 3.5, 4.5, and 5.0 mm). The stent designs were also expanded experimentally from 3.5 to 5.0 mm (blind analysis). Stent morphometric and biomechanical indices were calculated in the computational and experimental studies. In the computational studies the 12-peak MEGATRON exhibited significantly greater expansion, better scaffolding, smaller vessel prolapse, and greater radial strength (expressed as normalized hoop force) than the 9-peak MEGATRON, 10-peak MEGATRON, or SYNERGY (p < 0.05). Larger stent expansion diameters had significantly better radial strength and worse scaffolding than smaller stent diameters (p < 0.001). Computational stenting showed comparable scaffolding and radial strength with experimental stenting. 12-peak MEGATRON exhibited better mechanical performance than the 9-peak MEGATRON, 10-peak MEGATRON, or SYNERGY. Patient-specific computational LM stenting simulations can accurately reproduce experimental stent testing, providing an attractive framework for cost- and time-effective stent research and development.


2011 ◽  
Vol 36 (1) ◽  
pp. 141-150 ◽  
Author(s):  
Sylwia Muc ◽  
Tadeusz Gudra

Abstract The possibility of acoustic wave propagation in optical waveguides creates new prospects for simultaneous transmission of laser beams and ultrasonic waves. Combined laser-ultrasonic technology could be useful in e.g. surgical treatment. The article presents the results of experimental studies of transmission of ultrasonic wave in optical fibres, the core of which is doped by 7.5% of TiO2, using a sandwich-type transducer. It also presents amplitude characteristics of an ultrasonic signal propagated in the optical fibre. Authors studied the effect which the length of the fibre has on the achieved output signal amplitudes. They presented the relation of the output signal amplitude from a capacitive sensor to the power applied to the sandwich-type transducer. The obtained results were compared with the results produced when using an optical fibre with a core doped by 3% of GeO2, in order to select optical fibre suitable for simultaneous transmission of ultrasonic waves and laser rays.


2005 ◽  
Vol 58 (1) ◽  
pp. 37-48 ◽  
Author(s):  
Alan T. Zehnder ◽  
Mark J. Viz

The fracture mechanics of plates and shells under membrane, bending, twisting, and shearing loads are reviewed, starting with the crack tip fields for plane stress, Kirchhoff, and Reissner theories. The energy release rate for each of these theories is calculated and is used to determine the relation between the Kirchhoff and Reissner theories for thin plates. For thicker plates, this relationship is explored using three-dimensional finite element analysis. The validity of the application of two-dimensional (plate theory) solutions to actual three-dimensional objects is analyzed and discussed. Crack tip fields in plates undergoing large deflection are analyzed using von Ka´rma´n theory. Solutions for cracked shells are discussed as well. A number of computational methods for determining stress intensity factors in plates and shells are discussed. Applications of these computational approaches to aircraft structures are examined. The relatively few experimental studies of fracture in plates under bending and twisting loads are also reviewed. There are 101 references cited in this article.


2008 ◽  
Vol 75 (3) ◽  
Author(s):  
Peter J. Ryan ◽  
George G. Adams ◽  
Nicol E. McGruer

In beam theory, constraints can be classified as fixed/pinned depending on whether the rotational stiffness of the support is much greater/less than the rotational stiffness of the freestanding portion. For intermediate values of the rotational stiffness of the support, the boundary conditions must account for the finite rotational stiffness of the constraint. In many applications, particularly in microelectromechanical systems and nanomechanics, the constraints exist only on one side of the beam. In such cases, it may appear at first that the same conditions on the constraint stiffness hold. However, it is the purpose of this paper to demonstrate that even if the beam is perfectly bonded on one side only to a completely rigid constraining surface, the proper model for the boundary conditions for the beam still needs to account for beam deformation in the bonded region. The use of a modified beam theory, which accounts for bending, shear, and extensional deformation in the bonded region, is required in order to model this behavior. Examples are given for cantilever, bridge, and guided structures subjected to either transverse loads or residual stresses. The results show significant differences from the ideal bond case. Comparisons made to a three-dimensional finite element analysis show a good agreement.


2021 ◽  
Vol 7 (2) ◽  
pp. 58
Author(s):  
Celal Çakıroğlu ◽  
Gebrail Bekdaş

In the recent years natural fiber reinforced composites are increasingly receiving attention from the researchers and engineers due to their mechanical properties comparable to the conventional synthetic fibers and due to their ease of preparation, low cost and density, eco-friendliness and bio-degradability. Natural fibers such as kenaf or flux are being considered as a viable replacement for glass, aramid or carbon. Extensive experimental studies have been carried out to determine the mechanical behavior of different natural fiber types such as the elastic modulus, tensile strength, flexural strength and the Poisson’s ratio. This paper presents a review of the various experimental studies in the field of fiber reinforced composites while summarizing the research outcome about the elastic properties of the major types of natural fiber reinforced composites. Furthermore, the performance of a kenaf reinforced composite plate is demonstrated using finite element analysis and results are compared to a glass fiber reinforced laminated composite plate.


Author(s):  
Gürkan İrsel

In this study, the total algorithm of the strength-based design of the system for mass production has been developed. The proposed algorithm, which includes numerical, analytical, and experimental studies, was implemented through a case study on the strength-based structural design and fatigue analysis of a tractor-mounted sunflower stalk cutting machine (SSCM). The proposed algorithm consists of a systematic engineering approach, material selection and testing, design of the mass criteria suitability, structural stress analysis, computer-aided engineering (CAE), prototype production, experimental validation studies, fatigue calculation based on an FE model and experimental studies (CAE-based fatigue analysis), and an optimization process aimed at minimum weight. Approximately 85% of the system was designed using standard commercially available cross-section beams and elements using the proposed algorithm. The prototype was produced, and an HBM data acquisition system was used to collect the strain gage output. The prototype produced was successful in terms of functionality. Two- and three-dimensional mixed models were used in the structural analysis solution. The structural stress analysis and experimental results with a strain gage were 94.48% compatible in this study. It was determined using nCode DesignLife software that fatigue damage did not occur in the system using the finite element analysis (FEA) and experimental data. The SSCM design adopted a multi-objective genetic algorithm (MOGA) methodology for optimization with ANSYS. With the optimization solved from 422 iterations, a maximum stress value of 57.65 MPa was determined, and a 97.72 kg material was saved compared to the prototype. This study provides a useful methodology for experimental and advanced CAE techniques, especially for further study on complex stress, strain, and fatigue analysis of new systematic designs desired to have an optimum weight to strength ratio.


Sensors ◽  
2018 ◽  
Vol 18 (9) ◽  
pp. 3120 ◽  
Author(s):  
Shanshan Hu ◽  
Huaiyang Wang ◽  
Yong Wang ◽  
Zhengshi Liu

A novel elastic body design idea of six-axis wrist force sensor with a floating beam was raised based on the analysis of the robot six-axis wrist force sensor with a floating beam. The design ideas improve the sensor’s dynamic performance significantly, while not reducing its sensitivity. First, the design ideas were described in detail, which were analyzed by mechanical modeling and were verified by finite element analysis. Second, the static simulation analysis of the novel elastomer of sensor was carried out. According to the strain distribution performance, the position of the strain gauges pasted and the connection mode of the full-bridge circuits were decided, which can achieve theoretical decoupling. Finally, the comparison between the static and dynamic performance of the novel sensor and the original sensor with floating beams was done. The results show that the static and dynamic performance of the novel six-axis wrist sensor are all better than the original sensor.


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