Design, Fabrication, and Characterization of a Micro Vapor-Jet Vacuum Pump

2007 ◽  
Vol 129 (10) ◽  
pp. 1339-1345 ◽  
Author(s):  
Marco Doms ◽  
Jörg Müller
Keyword(s):  
Pressure Sensors ◽  
Plasma Electron ◽  
Mass Spectrometers ◽  
Deep Reactive Ion Etching ◽  
Fully Integrated ◽  
Glass Substrates ◽  
Mems Fabrication ◽  
New Type ◽  
Vacuum Generation

A microelectromechanical system (MEMS) vapor-jet pump for vacuum generation in miniaturized analytical systems, e.g., micro-mass-spectrometers (Wapelhorst, E., Hauschild, J., and Mueller, J., 2005, “A Fully Integrated Micro Mass Spectrometer,” in Fifth Workshop on Harsh-Environment Mass Spectrometry;Hauschild, J., Wapelhorst, E., and Mueller, J., 2005, “A Fully Integrated Plasma Electron Source for Micro Mass Spectrometers,” in Ninth International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS), pp. 476–478), is presented. A high velocity nitrogen or water vapor jet is used for vacuum generation. Starting from atmospheric pressure, a high throughput of more than 23ml∕min and an ultimate pressure of 495mbars were obtained with this new type of micropump. An approach for the full integration of all components of the pump is presented and validated by experimental results. The pump is fabricated from silicon and glass substrates using standard MEMS fabrication techniques including deep reactive ion etching, trichlorosilane molecular vapor deposition, and metal-assisted chemical etching for porous silicon fabrication. Micromachined pressure sensors based on the Pirani principle have been developed and integrated into the pump for monitoring.

Design, Fabrication and Characterization of a Fully Integrated Micro Vapor-Jet Vacuum Pump

2006 ◽  
Author(s):  
Marco Doms ◽  
Jo¨rg Mu¨ller
Keyword(s):  
Atmospheric Pressure ◽  
Pressure Sensors ◽  
Absolute Pressure ◽  
Mass Spectrometers ◽  
Fully Integrated ◽  
Glass Substrates ◽  
Mems Fabrication ◽  
New Type ◽  
Vacuum Generation

A MEMS vapor-jet pump for vacuum generation in miniaturized analytical systems, e.g. micro mass-spectrometers [1, 2], is presented. A high velocity gas- or vapor-jet is used for vacuum generation. Starting from atmospheric pressure, a high throughput of more than 23 ml/min and an absolute pressure of 495 mbar were obtained with this new type of micropump. An approach for the full integration of all components of the pump is presented, validated by experimental results. The pump is fabricated from silicon and glass substrates using standard MEMS fabrication techniques including DRIE, trichlorosilane MVD and metal-assisted chemical etching for porous silicon fabrication. Micromachined pressure sensors based on the Pirani principle have been developed and integrated into the pump for monitoring.

Trial production of γ-type energy filtering TEM

1995 ◽  
Vol 53 ◽  
pp. 604-605
Author(s):  
Y. Taniguchi ◽  
E. Nakazawa ◽  
S. Taya
Keyword(s):  
Magnetic Energy ◽  
Electron Optics ◽  
Electron Microscopic ◽  
Mass Spectrometers ◽  
Ion Optics ◽  
Energy Filtering ◽  
New Information ◽  
New Type ◽  
Fringing Fields

Imaging energy filters can add new information to electron microscopic images with respect to energy-axis, so-called electron spectroscopic imaging (ESI). Recently, many good results have been reported using this imaging technique. ESI also allows high-contrast observation of unstained biological samples, becoming a trend of the field of morphology. We manufactured a new type of energy filter as a trial production. This energy filter consists of two magnets, and we call γ-filter since the trajectory of electrons shows ‘γ’-shape inside the filter. We evaluated the new energyγ-filter TEM with the γ-filter.Figure 1 shows schematic view of the electron optics of the γ-type energy filter. For the determination of the electron-optics of the γ-type energy filter, we used the TRIO (Third Order Ion Optics) program which has been developed for the design of high resolution mass spectrometers. The TRIO takes the extended fringing fields (EFF) into consideration. EFF makes it difficult to design magnetic energy filters with magnetic sector fields.

Characterization of a new type of mead fermented with Cannabis sativa L. (hemp)

2021 ◽  
Author(s):  
Raffaele Romano ◽  
Alessandra Aiello ◽  
Lucia De Luca ◽  
Rosario Sica ◽  
Emilio Caprio ◽  
...  
Keyword(s):  
Cannabis Sativa ◽  
New Type

scholarly journals Microstructure and Thermoelectric Properties of (Bi0.48Sb1.52)Te3 Thick Films Prepared with Tape Casting Method

Electronics ◽  
2021 ◽  
Vol 10 (2) ◽  
pp. 140
Author(s):  
Lichen Liu ◽  
Ziping Cao ◽  
Min Chen ◽  
Jun Jiang
Keyword(s):  
Thermoelectric Properties ◽  
Low Cost ◽  
Thick Films ◽  
Tape Casting ◽  
Casting Process ◽  
Casting Method ◽  
Glass Substrates ◽  
Conductive Films ◽  
Casting Technology

This paper reports the fabrication and characterization of (Bi0.48Sb1.52)Te3 thick films using a tape casting process on glass substrates. A slurry of thermoelectric (Bi0.48Sb1.52)Te3 was developed and cured thick films were annealed in a vacuum chamber at 500–600 °C. The microstructure of these films was analyzed, and the Seebeck coefficient and electric conductivity were tested. It was found that the subsequent annealing process must be carefully designed to achieve good thermoelectric properties of these samples. Conductive films were obtained after annealing and led to acceptable thermoelectric performance. While the properties of these initial materials are not at the level of bulk materials, this work demonstrates that the low-cost tape casting technology is promising for fabricating thermoelectric modules for energy conversion.

scholarly journals Mass Spectrometric Calibration Procedure for Real-Time Detection of Lighter Hydrocarbons

Energies ◽  
2021 ◽  
Vol 14 (8) ◽  
pp. 2123
Author(s):  
Makuachukwu F. Mbaegbu ◽  
Puspa L. Adhikari ◽  
Ipsita Gupta ◽  
Mathew Rowe
Keyword(s):  
Real Time ◽  
Mass Spectrometer ◽  
Calibration Procedure ◽  
Mass Spectrometric ◽  
Spectrometric Method ◽  
Mass Selection ◽  
Mass Spectrometric Method ◽  
Mass Spectrometers ◽  
Drilling Rig

Determining gas compositions from live well fluids on a drilling rig is critical for real time formation evaluation. Development and utilization of a reliable mass spectrometric method to accurately characterize these live well fluids are always challenging due to lack of a robust and effectively selective instrument and procedure. The methods currently utilized need better calibration for the characterization of light hydrocarbons (C1–C6) at lower concentrations. The primary goal of this research is to develop and optimize a powerful and reliable analytical method to characterize live well fluid using a quadruple mass spectrometer (MS). The mass spectrometers currently being used in the field have issues with detection, spectra deconvolution, and quantification of analytes at lower concentrations (10–500 ppm), particularly for the lighter (<30 m/z) hydrocarbons. The objectives of the present study are thus to identify the detection issues, develop and optimize a better method, calibrate and QA/QC the MS, and validate the MS method in lab settings. In this study, we used two mass spectrometers to develop a selective and precise method to quantitatively analyze low level lighter analytes (C1–C6 hydrocarbons) with masses <75 m/z at concentrations 10–500 ppm. Our results suggest that proper mass selection like using base peaks with m/z 15, 26, 41, 43, 73, and 87, respectively, for methane, ethane, propane, butane, pentane, and hexane can help detect and accurately quantify hydrocarbons from gas streams. This optimized method in quadrupole mass spectrometer (QMS) will be invaluable for early characterization of the fluid components from a live hydrocarbon well in the field in real time.

scholarly journals Noise and Breakdown Characterization of SPAD Detectors with Time-Gated Photon-Counting Operation

Sensors ◽  
2021 ◽  
Vol 21 (16) ◽  
pp. 5287
Author(s):  
Hiwa Mahmoudi ◽  
Michael Hofbauer ◽  
Bernhard Goll ◽  
Horst Zimmermann
Keyword(s):  
Breakdown Voltage ◽  
Single Photon ◽  
Photon Counting ◽  
Low Noise ◽  
Dark Count ◽  
Fully Integrated ◽  
Trade Offs ◽  
And Performance ◽  
Noise Models

Being ready-to-detect over a certain portion of time makes the time-gated single-photon avalanche diode (SPAD) an attractive candidate for low-noise photon-counting applications. A careful SPAD noise and performance characterization, however, is critical to avoid time-consuming experimental optimization and redesign iterations for such applications. Here, we present an extensive empirical study of the breakdown voltage, as well as the dark-count and afterpulsing noise mechanisms for a fully integrated time-gated SPAD detector in 0.35-μm CMOS based on experimental data acquired in a dark condition. An “effective” SPAD breakdown voltage is introduced to enable efficient characterization and modeling of the dark-count and afterpulsing probabilities with respect to the excess bias voltage and the gating duration time. The presented breakdown and noise models will allow for accurate modeling and optimization of SPAD-based detector designs, where the SPAD noise can impose severe trade-offs with speed and sensitivity as is shown via an example.

scholarly journals Cavity-BOX SOI: Advanced Silicon Substrate with Pre-Patterned BOX for Monolithic MEMS Fabrication

Micromachines ◽  
2021 ◽  
Vol 12 (4) ◽  
pp. 414
Author(s):  
Marta Maria Kluba ◽  
Jian Li ◽  
Katja Parkkinen ◽  
Marcus Louwerse ◽  
Jaap Snijder ◽  
...  
Keyword(s):  
Complex Geometry ◽  
Pressure Sensors ◽  
Silicon On Insulator ◽  
Test Case ◽  
Mems Devices ◽  
Device Layer ◽  
Mems Fabrication ◽  
Silicon Islands ◽  
Design Freedom ◽  
Deep Brain

Several Silicon on Insulator (SOI) wafer manufacturers are now offering products with customer-defined cavities etched in the handle wafer, which significantly simplifies the fabrication of MEMS devices such as pressure sensors. This paper presents a novel cavity buried oxide (BOX) SOI substrate (cavity-BOX) that contains a patterned BOX layer. The patterned BOX can form a buried microchannels network, or serve as a stop layer and a buried hard-etch mask, to accurately pattern the device layer while etching it from the backside of the wafer using the cleanroom microfabrication compatible tools and methods. The use of the cavity-BOX as a buried hard-etch mask is demonstrated by applying it for the fabrication of a deep brain stimulation (DBS) demonstrator. The demonstrator consists of a large flexible area and precisely defined 80 µm-thick silicon islands wrapped into a 1.4 mm diameter cylinder. With cavity-BOX, the process of thinning and separating the silicon islands was largely simplified and became more robust. This test case illustrates how cavity-BOX wafers can advance the fabrication of various MEMS devices, especially those with complex geometry and added functionality, by enabling more design freedom and easing the optimization of the fabrication process.

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