The design and characterization of capacitive micromachined ultrasonic transducers (CMUTs) for generating high-intensity ultrasound for transmission of directional audio

2008 ◽  
Author(s):  
Ira O. Wygant ◽  
Mario Kupnik ◽  
Butrus T. Khuri-Yakub ◽  
Mark S. Wochner ◽  
Wayne M. Wright ◽  
...  
Keyword(s):  
High Intensity ◽  
Ultrasonic Transducers ◽  
High Intensity Ultrasound ◽  
Capacitive Micromachined Ultrasonic Transducers

Characterization of capacitive micromachined ultrasonic transducers

2015 ◽  
Vol 22 (3) ◽  
pp. 593-601 ◽  
Author(s):  
Fayçal Bellared ◽  
Joseph Lardiès ◽  
Gilles Bourbon ◽  
Patrice Le Moal ◽  
Vincent Walter ◽  
...  
Keyword(s):  
Ultrasonic Transducers ◽  
Capacitive Micromachined Ultrasonic Transducers

Characterization of Nanoscale Ultrasonic Transducer Elements as Effective Acoustical Devices

2016 ◽  
Vol 860 ◽  
pp. 35-40 ◽  
Author(s):  
Reshmi Maity ◽  
Niladri Pratap Maity ◽  
R.K. Thapa ◽  
S. Baishya
Keyword(s):  
Ultrasonic Transducer ◽  
Ultrasonic Transducers ◽  
Electrode Spacing ◽  
Capacitive Micromachined Ultrasonic Transducers ◽  
Non Destructive Evaluation ◽  
Electrostatic Transducers ◽  
Gap Spacing ◽  
Non Destructive ◽  
Half Decade

The generation and detection of ultrasound in air has many applications in the field of ranging, non-destructive evaluation, microscopy and the most impactful in medical imaging. Conventional designs of electrostatic transducers have large electrode spacing of 50-100 μm which reduces the sensitivity of these capacitors. In the last one and a half decade silicon micromachining is used to define capacitors with gap spacing as small as 500Å, making it possible highly efficient capacitive micromachined ultrasonic transducers (CMUTs). In this paper a CMUT element is analytically characterized and FEM simulated. The observations are compared with published experimental results and excellent agreement is found between them.

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