6F-5 Characterization of Fabrication Related Gap-Height Variations in Capacitive Micromachined Ultrasonic Transducers

2007 ◽  
Author(s):  
D.-S. Lin ◽  
X. Zhuang ◽  
S. H. Wong ◽  
A. S. Ergun ◽  
M. Kupnik ◽  
...  
Keyword(s):  
Ultrasonic Transducers ◽  
Capacitive Micromachined Ultrasonic Transducers ◽  
Gap Height

Characterization of capacitive micromachined ultrasonic transducers

2015 ◽  
Vol 22 (3) ◽  
pp. 593-601 ◽  
Author(s):  
Fayçal Bellared ◽  
Joseph Lardiès ◽  
Gilles Bourbon ◽  
Patrice Le Moal ◽  
Vincent Walter ◽  
...  
Keyword(s):  
Ultrasonic Transducers ◽  
Capacitive Micromachined Ultrasonic Transducers

Characterization of Nanoscale Ultrasonic Transducer Elements as Effective Acoustical Devices

2016 ◽  
Vol 860 ◽  
pp. 35-40 ◽  
Author(s):  
Reshmi Maity ◽  
Niladri Pratap Maity ◽  
R.K. Thapa ◽  
S. Baishya
Keyword(s):  
Ultrasonic Transducer ◽  
Ultrasonic Transducers ◽  
Electrode Spacing ◽  
Capacitive Micromachined Ultrasonic Transducers ◽  
Non Destructive Evaluation ◽  
Electrostatic Transducers ◽  
Gap Spacing ◽  
Non Destructive ◽  
Half Decade

The generation and detection of ultrasound in air has many applications in the field of ranging, non-destructive evaluation, microscopy and the most impactful in medical imaging. Conventional designs of electrostatic transducers have large electrode spacing of 50-100 μm which reduces the sensitivity of these capacitors. In the last one and a half decade silicon micromachining is used to define capacitors with gap spacing as small as 500Å, making it possible highly efficient capacitive micromachined ultrasonic transducers (CMUTs). In this paper a CMUT element is analytically characterized and FEM simulated. The observations are compared with published experimental results and excellent agreement is found between them.

The characterization of capacitive micromachined ultrasonic transducers in air

Ultrasonics ◽  
2002 ◽  
Vol 40 (1-8) ◽  
pp. 477-483 ◽  
Author(s):  
J.S. McIntosh ◽  
D.A. Hutchins ◽  
D.R. Billson ◽  
T.J. Robertson ◽  
R.A. Noble ◽  
...  
Keyword(s):  
Ultrasonic Transducers ◽  
Capacitive Micromachined Ultrasonic Transducers
Sign in / Sign up

Export Citation Format

Share Document