Miniaturization is the most sophisticated method for achieving UHF and SHF resonance frequencies in RF MEMS
resonators. However, by reducing the dimensions of the resonators, the size of their supports become more comparable
with the size of the resonator and anchor loss becomes the dominant loss mechanism, thereby suppressing
the quality factor. This study considers, Ring Shape Anchored Contour Mode Disk Resonator and calculates anchor
loss effects using both energy loss and acoustic impedance ratio methods. Results of analytical calculations
are verified using finite element harmonic analysis. Simulation results show that RSACMDRs have an acceptable
quality factor in comparison with the other state-of-the-art resonators.
Design of novel mechanical coupling for contour mode piezoelectric RF MEMS filters