Study of Damage Engineering—Quantitative Scatter Defect Measurements of Ultralow Energy Implantation Doping Using the Continuous Anodic Oxidation Technique/Differential Hall Effect
2012 ◽
Vol 40
(3)
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pp. 877-882
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Keyword(s):
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2009 ◽
Vol 37
(9)
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pp. 1754-1759
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Keyword(s):
2011 ◽
Vol 11
(5)
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pp. 3808-3813
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