Uniform Long-Slit Microwave Plasma Generation From a Longitudinal-Section Electric Mode Coupling
Keyword(s):
2009 ◽
Vol 18
(3)
◽
pp. 035014
◽
2005 ◽
Vol 44
(4A)
◽
pp. 1945-1950
◽
2017 ◽
Vol 56
(4)
◽
pp. 046203
◽
2013 ◽
Vol 8
(0)
◽
pp. 1406167-1406167
◽