Uniform and long-slit microwave plasma generation from a longitudinal section electric mode coupling
Keyword(s):
Keyword(s):
2009 ◽
Vol 18
(3)
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pp. 035014
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2005 ◽
Vol 44
(4A)
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pp. 1945-1950
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2017 ◽
Vol 56
(4)
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pp. 046203
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2013 ◽
Vol 8
(0)
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pp. 1406167-1406167
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