Experimental and theoretical study of two-dimensional ion flux uniformity at the wafer plane in inductively coupled plasmas

2003 ◽  
Vol 31 (4) ◽  
pp. 614-627 ◽  
Author(s):  
Tae Won Kim ◽  
E.S. Aydil
Keyword(s):  
Theoretical Study ◽  
Ion Flux ◽  
Two Dimensional ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

Ion flux and ion distribution function measurements in synchronously pulsed inductively coupled plasmas

2013 ◽  
Vol 31 (2) ◽  
pp. 020604 ◽  
Author(s):  
Melisa Brihoum ◽  
Gilles Cunge ◽  
Maxime Darnon ◽  
David Gahan ◽  
Olivier Joubert ◽  
...  
Keyword(s):  
Distribution Function ◽  
Ion Flux ◽  
Inductively Coupled Plasmas ◽  
Ion Distribution ◽  
Inductively Coupled ◽  
Coupled Plasmas

Control of the spatial distribution of ion flux in dual inductively coupled plasmas

2021 ◽  
Vol 129 (10) ◽  
pp. 103305
Author(s):  
Sung-Won Cho ◽  
Jun-Hyeon Moon ◽  
Aixian Zhang ◽  
Chin-Wook Chung
Keyword(s):  
Spatial Distribution ◽  
Ion Flux ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

scholarly journals Erratum: Power Matching to Pulsed Inductively Coupled Plasmas [J. Appl. Phys. 127, 133302 (2020)]

2020 ◽  
Vol 128 (8) ◽  
pp. 089901
Author(s):  
Chenhui Qu ◽  
Steven J. Lanham ◽  
Steven C. Shannon ◽  
Sang Ki Nam ◽  
Mark J. Kushner
Keyword(s):  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Power Matching ◽  
Coupled Plasmas

Etching characteristics of ZnO thin films in chlorine-containing inductively coupled plasmas

2006 ◽  
Vol 83 (2) ◽  
pp. 328-335 ◽  
Author(s):  
S.W. Na ◽  
M.H. Shin ◽  
Y.M. Chung ◽  
J.G. Han ◽  
S.H. Jeung ◽  
...  
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas
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