Two-dimensional ion flux distributions in inductively coupled plasmas: Effect of adding electronegative gases to Ar

Tae Won Kim; Eray S. Aydil

doi:10.1063/1.1517733

Two-dimensional ion flux distributions in inductively coupled plasmas: Effect of adding electronegative gases to Ar

Journal of Applied Physics ◽

10.1063/1.1517733 ◽

2002 ◽

Vol 92 (11) ◽

pp. 6444-6450 ◽

Cited By ~ 5

Author(s):

Tae Won Kim ◽

Eray S. Aydil

Keyword(s):

Ion Flux ◽

Two Dimensional ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Experimental and theoretical study of two-dimensional ion flux uniformity at the wafer plane in inductively coupled plasmas

IEEE Transactions on Plasma Science ◽

10.1109/tps.2003.815243 ◽

2003 ◽

Vol 31 (4) ◽

pp. 614-627 ◽

Cited By ~ 5

Author(s):

Tae Won Kim ◽

E.S. Aydil

Keyword(s):

Theoretical Study ◽

Ion Flux ◽

Two Dimensional ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Two-dimensional modeling of long-term transients in inductively coupled plasmas using moderate computational parallelism. II. Ar/Cl2 pulsed plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1434965 ◽

2002 ◽

Vol 20 (2) ◽

pp. 325-334 ◽

Cited By ~ 34

Author(s):

Pramod Subramonium ◽

Mark J. Kushner

Keyword(s):

Two Dimensional ◽

Inductively Coupled Plasmas ◽

Pulsed Plasmas ◽

Inductively Coupled ◽

Dimensional Modeling ◽

Coupled Plasmas

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Two-dimensional modeling of long-term transients in inductively coupled plasmas using moderate computational parallelism. I. Ar pulsed plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1434964 ◽

2002 ◽

Vol 20 (2) ◽

pp. 313-324 ◽

Cited By ~ 37

Author(s):

Pramod Subramonium ◽

Mark J. Kushner

Keyword(s):

Two Dimensional ◽

Inductively Coupled Plasmas ◽

Pulsed Plasmas ◽

Inductively Coupled ◽

Dimensional Modeling ◽

Coupled Plasmas

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Kinetic two-dimensional modeling of inductively coupled plasmas based on a hybrid kinetic approach

IEEE Transactions on Plasma Science ◽

10.1109/27.799806 ◽

1999 ◽

Vol 27 (5) ◽

pp. 1297-1309 ◽

Cited By ~ 18

Author(s):

U. Kortshagen ◽

B.G. Heil

Keyword(s):

Kinetic Approach ◽

Two Dimensional ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Dimensional Modeling ◽

Coupled Plasmas

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Diagnostics and two-dimensional simulation of low-frequency inductively coupled plasmas with neutral gas heating and electron heat fluxes

Journal of Applied Physics ◽

10.1063/1.1510598 ◽

2002 ◽

Vol 92 (9) ◽

pp. 4935-4946 ◽

Cited By ~ 27

Author(s):

K. N. Ostrikov ◽

I. B. Denysenko ◽

E. L. Tsakadze ◽

S. Xu ◽

R. G. Storer

Keyword(s):

Low Frequency ◽

Heat Fluxes ◽

Two Dimensional ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Neutral Gas ◽

Electron Heat ◽

Gas Heating ◽

Dimensional Simulation ◽

Coupled Plasmas

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Two-dimensional modeling of pulsed inductively coupled plasmas with and without a substrate bias

IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255) ◽

10.1109/ppps.2001.961252 ◽

2002 ◽

Author(s):

P. Subramonium ◽

M.J. Kushner

Keyword(s):

Substrate Bias ◽

Two Dimensional ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Dimensional Modeling ◽

Coupled Plasmas

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Ion flux and ion distribution function measurements in synchronously pulsed inductively coupled plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4790364 ◽

2013 ◽

Vol 31 (2) ◽

pp. 020604 ◽

Cited By ~ 22

Author(s):

Melisa Brihoum ◽

Gilles Cunge ◽

Maxime Darnon ◽

David Gahan ◽

Olivier Joubert ◽

...

Keyword(s):

Distribution Function ◽

Ion Flux ◽

Inductively Coupled Plasmas ◽

Ion Distribution ◽

Inductively Coupled ◽

Coupled Plasmas

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Control of the spatial distribution of ion flux in dual inductively coupled plasmas

Journal of Applied Physics ◽

10.1063/5.0026248 ◽

2021 ◽

Vol 129 (10) ◽

pp. 103305

Author(s):

Sung-Won Cho ◽

Jun-Hyeon Moon ◽

Aixian Zhang ◽

Chin-Wook Chung

Keyword(s):

Spatial Distribution ◽

Ion Flux ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Erratum: Power Matching to Pulsed Inductively Coupled Plasmas [J. Appl. Phys. 127, 133302 (2020)]

Journal of Applied Physics ◽

10.1063/5.0023888 ◽

2020 ◽

Vol 128 (8) ◽

pp. 089901

Author(s):

Chenhui Qu ◽

Steven J. Lanham ◽

Steven C. Shannon ◽

Sang Ki Nam ◽

Mark J. Kushner

Keyword(s):

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Power Matching ◽

Coupled Plasmas

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Etching characteristics of ZnO thin films in chlorine-containing inductively coupled plasmas

Microelectronic Engineering ◽

10.1016/j.mee.2005.09.007 ◽

2006 ◽

Vol 83 (2) ◽

pp. 328-335 ◽

Cited By ~ 39

Author(s):

S.W. Na ◽

M.H. Shin ◽

Y.M. Chung ◽

J.G. Han ◽

S.H. Jeung ◽

...

Keyword(s):

Thin Films ◽

Zno Thin Films ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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