Diagnostics and two-dimensional simulation of low-frequency inductively coupled plasmas with neutral gas heating and electron heat fluxes
2002 ◽
Vol 20
(2)
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pp. 325-334
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2011 ◽
Vol 166
(6)
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pp. 399-407
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Keyword(s):
2005 ◽
Vol 33
(2)
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pp. 240-241
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Keyword(s):
2002 ◽
Vol 20
(2)
◽
pp. 313-324
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1999 ◽
Vol 27
(5)
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pp. 1297-1309
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Keyword(s):