Design and Analysis of Lithium–Niobate-Based High Electromechanical Coupling RF-MEMS Resonators for Wideband Filtering

2013 ◽  
Vol 61 (1) ◽  
pp. 403-414 ◽  
Author(s):  
Songbin Gong ◽  
Gianluca Piazza
Keyword(s):  
Lithium Niobate ◽  
Electromechanical Coupling ◽  
Rf Mems ◽  
Mems Resonators

scholarly journals Figure of Merit Enhancement of Laterally Vibrating RF-MEMS Resonators via Energy-Preserving Addendum Frame

Micromachines ◽  
2022 ◽  
Vol 13 (1) ◽  
pp. 105
Author(s):  
Temesgen Bailie Workie ◽  
Zhaohui Wu ◽  
Panliang Tang ◽  
Jingfu Bao ◽  
Ken-ya Hashimoto
Keyword(s):  
Quality Factor ◽  
Figure Of Merit ◽  
Electromechanical Coupling ◽  
Rf Mems ◽  
Acoustic Energy ◽  
Frame Structure ◽  
Electromechanical Coupling Coefficient ◽  
Element Analysis ◽  
Mems Resonators ◽  
Spurious Mode

This paper examines a new technique to improve the figure of merit of laterally vibrating RF-MEMS resonators through an energy-preserving suspended addendum frame structure using finite element analysis. The proposed suspended addendum frame on the sides of the resonant plate helps as a mechanical vibration isolator from the supporting substrate. This enables the resonator to have a low acoustic energy loss, resulting in a higher quality factor. The simulated attenuation characteristics of the suspended addendum frame are up to an order of magnitude larger than those achieved with the conventional structure. Even though the deployed technique does not have a significant impact on increasing the effective electromechanical coupling coefficient, due to a gigantic improvement in the unloaded quality factor, from 4106 to 51,136, the resonator with the suspended frame achieved an 11-folds improvement in the figure of merit compared to that of the conventional resonator. Moreover, the insertion loss was improved from 5 dB down to a value as low as 0.7 dB. Furthermore, a method of suppressing spurious mode is demonstrated to remove the one incurred by the reflected waves due to the proposed energy-preserving structure.

Fully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators

2010 ◽  
Vol 46 (9) ◽  
pp. 640 ◽  
Author(s):  
J. Giner ◽  
A. Uranga ◽  
F. Torres ◽  
E. Marigó ◽  
N. Barniol
Keyword(s):  
Bandpass Filter ◽  
Rf Mems ◽  
Mechanical Coupling ◽  
Mems Resonators

scholarly journals In-Situ Process and Simulation of High-Performance Piezoelectric-on-Silicon Substrate for SAW Sensor

2021 ◽  
Vol 8 ◽  
Author(s):  
Rui Ma ◽  
Weiguo Liu ◽  
Xueping Sun ◽  
Shun Zhou
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
High Performance ◽  
Electromechanical Coupling ◽  
Substrate Material ◽  
Electromechanical Coupling Coefficient ◽  
Bonding Layer ◽  
Saw Sensor ◽  
Rayleigh Mode

This paper studied the manufacturing process of Piezoelectric-on-Silicon (POS) substrate which integrates 128° Y–X Lithium niobate thin film and silicon wafer using Smart-Cut technology. The blistering and exfoliation processes of the He as-implanted LN crystal under different annealing temperatures are observed by the in-situ method. Unlike the conventional polishing process, the stripping mechanism of the Lithium niobate thin film is changed by controlling annealing temperature, which can improve the surface morphology of the peeling lithium niobate thin film. We prepared the 128° Y–X POS substrate with high single-crystal Lithium niobate thin film and surface roughness of 3.91 nm through Benzocyclobutene bonding. After simulating the surface acoustic wave (SAW) characteristics of the POS substrate, the results demonstrate that the Benzocyclobutene layer not only performs as a bonding layer but also can couple more vibrations into the LN thin film. The electromechanical coupling coefficient of the POS substrate is up to 7.59% in the Rayleigh mode when hLN/λ is 0.3 and hBCB/λ is 0.1. Therefore, as a high-performance substrate material, the POS substrate has proved to be an efficient method to miniaturize and integrate the SAW sensor.

Characterisation of a CMP nanoscale planarisation-based process for RF MEMS resonators

2006 ◽  
Author(s):  
S. Enderling ◽  
H. Lin ◽  
J. T. M. Stevenson ◽  
A. S. Bunting ◽  
A. J. Walton
Keyword(s):  
Rf Mems ◽  
Mems Resonators
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