Characterisation of a CMP nanoscale planarisation-based process for RF MEMS resonators

2006 ◽  
Author(s):  
S. Enderling ◽  
H. Lin ◽  
J. T. M. Stevenson ◽  
A. S. Bunting ◽  
A. J. Walton
Keyword(s):  
Rf Mems ◽  
Mems Resonators

Fully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators

2010 ◽  
Vol 46 (9) ◽  
pp. 640 ◽  
Author(s):  
J. Giner ◽  
A. Uranga ◽  
F. Torres ◽  
E. Marigó ◽  
N. Barniol
Keyword(s):  
Bandpass Filter ◽  
Rf Mems ◽  
Mechanical Coupling ◽  
Mems Resonators

Artificial neural network modeling of RF MEMS resonators

2004 ◽  
Vol 14 (4) ◽  
pp. 302-316 ◽  
Author(s):  
Yongjae Lee ◽  
Yonghwa Park ◽  
Feng Niu ◽  
Bonnie Bachman ◽  
K.C. Gupta ◽  
...  
Keyword(s):  
Neural Network ◽  
Artificial Neural Network ◽  
Rf Mems ◽  
Network Modeling ◽  
Neural Network Modeling ◽  
Artificial Neural Network Modeling ◽  
Mems Resonators ◽  
Artificial Neural

CMOS-Integrated RF MEMS Resonators

2010 ◽  
Vol 19 (4) ◽  
pp. 807-815 ◽  
Author(s):  
Maxim K. Zalalutdinov ◽  
Joshua D. Cross ◽  
Jeffrey W. Baldwin ◽  
Bojan R. Ilic ◽  
Wenzhe Zhou ◽  
...  
Keyword(s):  
Rf Mems ◽  
Mems Resonators

A low feed-through 3D vacuum packaging technique with silicon vias for RF MEMS resonators

2016 ◽  
Vol 27 (1) ◽  
pp. 014003 ◽  
Author(s):  
Jicong Zhao ◽  
Quan Yuan ◽  
Xiao Kan ◽  
Jinling Yang ◽  
Fuhua Yang
Keyword(s):  
Rf Mems ◽  
Vacuum Packaging ◽  
Mems Resonators ◽  
Silicon Vias ◽  
Packaging Technique

A Fully Coupled FEM Model of Electromechanically Actuated MEMS With Squeeze Film Damping

2009 ◽  
Author(s):  
Stephan D. A. Hannot ◽  
Daniel J. Rixen
Keyword(s):  
Rf Mems ◽  
Squeeze Film ◽  
Fem Model ◽  
Mems Switch ◽  
Squeeze Film Damping ◽  
Air Damping ◽  
Mems Resonators ◽  
Fluid Damping ◽  
Frequency Behavior ◽  
Damping Model

A specific type of Microsystems or MEMS is the so called RF-MEMS switch. In contrast to MEMS resonators switches generally do not operate in a vacuum. Therefore at the small scales of MEMS fluid (or air) damping is the most dominant damping form. This means that if one is interested in transient or frequency behavior a proper damping model is required. This paper presents a way of using the non-linear Reynolds equation to model the squeeze film damping that is often the type of fluid damping present in these switches. The formulation is provided ready for FEM implementation. Also the tangent matrices required for linearized eigen frequencies are derived. The equations are tested on a model of simple micro switch. The results show that with this model it is possible to predict the damped motion as well as the frequency behavior. The frequency results also show that damping shifts the zero frequency point away from the pull-in point. With a simple mechanical contact model it is also possible to model the closing and opening transient of a microsystem.

RF MEMS resonators: Material properties extraction

2009 ◽  
Author(s):  
Yasseen Nada ◽  
Steve Stoffels ◽  
Harrie A. C. Tilmans ◽  
Emad Hegazi ◽  
Hani F. Ragai ◽  
...  
Keyword(s):  
Material Properties ◽  
Rf Mems ◽  
Mems Resonators

scholarly journals Thin-Piezo on Single-Crystal Silicon Reactive Etched RF MEMS Resonators

IEEE Access ◽  
2020 ◽  
Vol 8 ◽  
pp. 139266-139273
Author(s):  
Adnan Zaman ◽  
Abdulrahman Alsolami ◽  
Ivan F. Rivera ◽  
Jing Wang
Keyword(s):  
Single Crystal ◽  
Rf Mems ◽  
Single Crystal Silicon ◽  
Crystal Silicon ◽  
Mems Resonators
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