Sensitivity enhancement by striped arrow embossed diaphragms in low pressure MEMS piezoresistive pressure sensors

2017 ◽  
Author(s):  
S. Angel ◽  
R. Joseph Daniel
Keyword(s):  
Pressure Sensors ◽  
Low Pressure ◽  
Sensitivity Enhancement ◽  
Piezoresistive Pressure Sensors

scholarly journals Nanocomposite-Based Microstructured Piezoresistive Pressure Sensors for Low-Pressure Measurement Range

Micromachines ◽  
2018 ◽  
Vol 9 (2) ◽  
pp. 43 ◽  
Author(s):  
Vasileios Mitrakos ◽  
Philip Hands ◽  
Gerard Cummins ◽  
Lisa Macintyre ◽  
Fiona Denison ◽  
...  
Keyword(s):  
Pressure Measurement ◽  
Pressure Sensors ◽  
Low Pressure ◽  
Measurement Range ◽  
Piezoresistive Pressure Sensors

Ultrasensitive, flexible, and low-cost nanoporous piezoresistive composites for tactile pressure sensing

Nanoscale ◽  
2019 ◽  
Vol 11 (6) ◽  
pp. 2779-2786 ◽  
Author(s):  
Jing Li ◽  
Santiago Orrego ◽  
Junjie Pan ◽  
Peisheng He ◽  
Sung Hoon Kang
Keyword(s):  
Carbon Nanotube ◽  
Polymer Composites ◽  
Low Cost ◽  
Pressure Sensors ◽  
Nanoporous Carbon ◽  
Pressure Sensing ◽  
Etching Method ◽  
Piezoresistive Pressure Sensors

We report a facile sacrificial casting–etching method to synthesize nanoporous carbon nanotube/polymer composites for ultra-sensitive and low-cost piezoresistive pressure sensors.

Optimized technology for the fabrication of piezoresistive pressure sensors

2000 ◽  
Vol 10 (2) ◽  
pp. 204-208 ◽  
Author(s):  
A Merlos ◽  
J Santander ◽  
M D Alvarez ◽  
F Campabadal
Keyword(s):  
Pressure Sensors ◽  
Piezoresistive Pressure Sensors

scholarly journals Wearable Pressure Sensors Based on Carbonized Graphene Coated Waste Paper Aerogel

2021 ◽  
Author(s):  
Ang Li ◽  
Ce Cui ◽  
Weijie Wang ◽  
Yue Zhang ◽  
Jianyu Zhai ◽  
...  
Keyword(s):  
3D Structure ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Waste Paper ◽  
Low Density ◽  
Detection Range ◽  
Simple Strategy ◽  
Simple Filtration ◽  
Piezoresistive Pressure Sensors ◽  
Main Component

Abstract Graphene is complexed with cellulose fibers to construct 3D aerogels, which is generally considered to be an environmentally friendly and simple strategy to achieve wide sensing, high sensitivity and low detection of wearable piezoresistive pressure sensors. Here, graphene is incorporated into waste paper fibers with cellulose as the main component to prepare graphene coated waste paper aerogel (GWA) using a simple “filtration-oven drying” method under atmospheric pressure. The GWA was further annealed to obtain the carbonized graphene coated waste paper aerogel (C-GWA) to achieve low density and excellent resilience. The result shows that the C-GWA has a rough outer surface due to the 3D structure formed by interpenetrated fibers and the carbon skeleton with wrinkles. The sensor based on GCA shows low density (25mg/cm3), a wide detection range of 0-132 kPa, an ultra-low detection limit of 2.5 Pa (a green bean, ≈ 53.4 mg), and a high sensitivity of 31.6 kPa− 1. In addition, the sensor based on C-GWA with the excellent performance can be used to detect human motions including the pulse of the human body, cheek blowing and bending of human joints. The result indicates that the sensor based on C-GWA shows great potential for wearable electronic products.

High Sensitivity, Wearable, Piezoresistive Pressure Sensors Based on Irregular Microhump Structures and Its Applications in Body Motion Sensing

Small ◽  
2016 ◽  
Vol 12 (28) ◽  
pp. 3827-3836 ◽  
Author(s):  
Zongrong Wang ◽  
Shan Wang ◽  
Jifang Zeng ◽  
Xiaochen Ren ◽  
Adrian J. Y. Chee ◽  
...  
Keyword(s):  
Pressure Sensors ◽  
High Sensitivity ◽  
Body Motion ◽  
Motion Sensing ◽  
Piezoresistive Pressure Sensors

Assembly and Testing of Surface Micromachined, Piezoresistive Polysilicon Pressure Sensors

1999 ◽  
Author(s):  
Todd F. Miller ◽  
David J. Monk ◽  
Gary O’Brien ◽  
William P. Eaton ◽  
James H. Smith
Keyword(s):  
Pressure Sensor ◽  
Microelectromechanical Systems ◽  
Pressure Sensors ◽  
Single Crystal Silicon ◽  
Surface Micromachining ◽  
Process Technology ◽  
Crystal Silicon ◽  
Noise Characteristics ◽  
Testing Techniques ◽  
Piezoresistive Pressure Sensors

Abstract Surface micromachining is becoming increasingly popular for microelectromechanical systems (MEMS) and a new application for this process technology is pressure sensors. Uncompensated surface micromachined piezoresistive pressure sensors were fabricated by Sandia National Labs (SNL). Motorola packaged and tested the sensors over pressure, temperature and in a typical circuit application for noise characteristics. A brief overview of surface micromachining related to pressure sensors is described in the report along with the packaging and testing techniques used. The electrical data found is presented in a comparative manner between the surface micromachined SNL piezoresistive polysilicon pressure sensor and a bulk micromachined Motorola piezoresistive single crystal silicon pressure sensor.

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