A model to study the effect of selective anodic oxidation on ultrathin gate oxides

IEEE Transactions on Electron Devices ◽

10.1109/ted.2004.841284 ◽

2005 ◽

Vol 52 (1) ◽

pp. 118-121 ◽

Cited By ~ 7

Keyword(s):

Anodic Oxidation ◽

Gate Oxides

Download Full-text

SiO2/Si Suboxide Characteristics of Ultra-Thin Gate Oxides Prepared by Room Temperature Anodic Oxidation and Rapid Thermal Oxidation

10.7567/ssdm.2002.a-9-3 ◽

2002 ◽

Author(s):

Yen-Po Lin ◽

Zhi-Hao Chen ◽

Jenn-Gwo Hwu

Keyword(s):

Thermal Oxidation ◽

Anodic Oxidation ◽

Room Temperature ◽

Gate Oxides ◽

Rapid Thermal Oxidation

Download Full-text

Enhanced nitrogen incorporation and improved breakdown endurance in nitrided gate oxides prepared by anodic oxidation followed by rapid thermal nitridation in N2O

Applied Physics Letters ◽

10.1063/1.117134 ◽

1996 ◽

Vol 69 (25) ◽

pp. 3875-3877 ◽

Cited By ~ 11

Author(s):

Ming‐Jer Jeng ◽

Jenn‐Gwo Hwu

Keyword(s):

Anodic Oxidation ◽

Gate Oxides ◽

Nitrogen Incorporation ◽

Thermal Nitridation

Download Full-text

Thermodynamic functions of the reactions of anodic oxidation of niobium and tantalum

Physics and Chemistry of Materials Treatment ◽

10.30791/0015-3214-2019-5-36-41 ◽

2019 ◽

pp. 36-41

Author(s):

A.S. Kamysheva ◽

◽

A.I. Koroleva ◽

L.P. Mileshko ◽

◽

...

Keyword(s):

Anodic Oxidation ◽

Thermodynamic Functions

Download Full-text

Methods of test for anodic oxidation coatings on aluminium and its alloys

10.3403/00026243u ◽

2015 ◽

Keyword(s):

Anodic Oxidation

Download Full-text

Methods of test for anodic oxidation coatings on aluminium and its alloys

10.3403/00148501 ◽

1985 ◽

Keyword(s):

Anodic Oxidation

Download Full-text

Methods of test for anodic oxidation coatings on aluminium and its alloys

10.3403/00137682 ◽

1984 ◽

Keyword(s):

Anodic Oxidation

Download Full-text

Methods of test for anodic oxidation coatings on aluminium and its alloys

10.3403/00167743 ◽

1987 ◽

Keyword(s):

Anodic Oxidation

Download Full-text

Methods of test for anodic oxidation coatings on aluminium and its alloys

10.3403/00167640u ◽

2015 ◽

Keyword(s):

Anodic Oxidation

Download Full-text

Method for specifying anodic oxidation coatings on aluminium and its alloys

10.3403/00167952 ◽

1987 ◽

Keyword(s):

Anodic Oxidation

Download Full-text

Methods of test for anodic oxidation coatings on aluminium and its alloys

10.3403/00167640 ◽

1987 ◽

Keyword(s):

Anodic Oxidation

Download Full-text