Nonvolatile Flash Memory Device Using Ge Nanocrystals Embedded in HfAlO High-<tex>$kappa$</tex>Tunneling and Control Oxides: Device Fabrication and Electrical Performance

2004 ◽  
Vol 51 (11) ◽  
pp. 1840-1848 ◽  
Author(s):  
J.H. Chen ◽  
Y.Q. Wang ◽  
W.J. Yoo ◽  
Y.-C. Yeo ◽  
G. Samudra ◽  
...  
Keyword(s):  
Flash Memory ◽  
Memory Device ◽  
Device Fabrication ◽  
Electrical Performance ◽  
And Control ◽  
Ge Nanocrystals

Study for aluminum metal patterning process with oxide hard mask in 90-nm s-flash memory device fabrication

2008 ◽  
Author(s):  
Sang Il Hwang ◽  
Ki Jun Yun ◽  
Sang Wook Ryu ◽  
Kang Hyun Lee ◽  
Jae Won Han
Keyword(s):  
Flash Memory ◽  
Memory Device ◽  
Device Fabrication ◽  
Hard Mask ◽  
Aluminum Metal

Selective oxidation of poly-Si with embedded Ge nanocrystals in Si/SiO2/Ge(NCs)/poly-Si structure for memory device fabrication

2009 ◽  
Vol 24 (2) ◽  
pp. 025015 ◽  
Author(s):  
N P Stepina ◽  
V V Kirienko ◽  
A V Dvurechenskii ◽  
S A Alyamkin ◽  
V A Armbrister ◽  
...  
Keyword(s):  
Selective Oxidation ◽  
Memory Device ◽  
Device Fabrication ◽  
Ge Nanocrystals

Model-assisted template extraction SRAF application to contact holes patterns in high-end flash memory device fabrication

2018 ◽  
Author(s):  
Ahmed Seoud ◽  
Le Hong ◽  
Dae-Jin Park ◽  
Hyoung-Soon Yune ◽  
Yuansheng Ma ◽  
...  
Keyword(s):  
Flash Memory ◽  
Memory Device ◽  
Device Fabrication ◽  
Template Extraction

Carrier Profiling of the 10-nm-order Structure in a 3D Flash Memory Cell Using Scanning Nonlinear Dielectric Microscopy

2019 ◽  
Author(s):  
Jun Hirota ◽  
Ken Hoshino ◽  
Tsukasa Nakai ◽  
Kohei Yamasue ◽  
Yasuo Cho
Keyword(s):  
Spatial Resolution ◽  
Flash Memory ◽  
Analytical Techniques ◽  
Memory Cell ◽  
Memory Device ◽  
Floating Gate ◽  
Order Structure ◽  
Carrier Distribution ◽  
Nonlinear Dielectric ◽  
Flash Memory Cell

Abstract In this paper, the authors report their successful attempt to acquire the scanning nonlinear dielectric microscopy (SNDM) signals around the floating gate and channel structures of the 3D Flash memory device, utilizing the custom-built SNDM tool with a super-sharp diamond tip. The report includes details of the SNDM measurement and process involved in sample preparation. With the super-sharp diamond tips with radius of less than 5 nm to achieve the supreme spatial resolution, the authors successfully obtained the SNDM signals of floating gate in high contrast to the background in the selected areas. They deduced the minimum spatial resolution and seized a clear evidence that the diffusion length differences of the n-type impurity among the channels are less than 21 nm. Thus, they concluded that SNDM is one of the most powerful analytical techniques to evaluate the carrier distribution in the superfine three dimensionally structured memory devices.

Enhanced Programming and Erasing Speeds in P-Channel Charge-Trapping Flash Memory Device With SiGe Buried Channel

2012 ◽  
Vol 33 (9) ◽  
pp. 1264-1266 ◽  
Author(s):  
Li-Jung Liu ◽  
Kuei-Shu Chang-Liao ◽  
Yi-Chuen Jian ◽  
Jen-Wei Cheng ◽  
Tien-Ko Wang ◽  
...  
Keyword(s):  
Flash Memory ◽  
Charge Trapping ◽  
Memory Device ◽  
Buried Channel

Irradiation Induced Changes in Semiconducting Thin Films

2013 ◽  
Vol 341 ◽  
pp. 181-210 ◽  
Author(s):  
S.K. Tripathi
Keyword(s):  
Thin Films ◽  
Solar Cells ◽  
Heavy Ions ◽  
Semiconductor Device ◽  
High Energy ◽  
Device Fabrication ◽  
Electrical Performance ◽  
Radiation Environment ◽  
Extended Defects ◽  
Semiconducting Thin Films

High-energy electron, proton, neutron, photon and ion irradiation of semiconductor diodes and solar cells has long been a topic of considerable interest in the field of semiconductor device fabrication. The inevitable damage production during the process of irradiation is used to study and engineer the defects in semiconductors. In a strong radiation environment in space, the electrical performance of solar cells is degraded due to direct exposure to energetically charged particles. A considerable amount of work has been reported on the study of radiation damage in various solar cell materials and devices in the recent past. In most cases, high-energy heavy ions damage the material by producing a large amount of extended defects, but high-energy light ions are suitable for producing and modifying the intrinsic point defects. The defects can play a variety of electronically active roles that affect the electrical, structural and optical properties of a semiconductor. This review article aims to present an overview of the advancement of research in the modification of glassy semiconducting thin films using different types of radiations (light, proton and swift heavy ions). The work which has been done in our laboratory related to irradiation induced effects in semiconducting thin films will also be compared with the existing literature.

Sign in / Sign up

Export Citation Format

Share Document