Monte Carlo study of remote Coulomb and remote surface roughness scattering in nanoscale Ge PMOSFETs with ultrathin high-k dielectrics

2006 ◽  
Author(s):  
Bahniman Ghosh ◽  
Xiao-feng Fan ◽  
Leonard Register ◽  
Sanjay Banerjee
Keyword(s):  
Surface Roughness ◽  
Monte Carlo ◽  
Monte Carlo Study ◽  
Surface Roughness Scattering ◽  
High K

Monte Carlo study of remote Coulomb and remote surface roughness scattering in nanoscale Ge PMOSFETs with ultrathin high-κ dielectrics

2006 ◽  
Vol 50 (2) ◽  
pp. 248-253 ◽  
Author(s):  
Bahniman Ghosh ◽  
Jer-Hueih Chen ◽  
Xiao-Feng Fan ◽  
Leonard F. Register ◽  
Sanjay K. Banerjee
Keyword(s):  
Surface Roughness ◽  
Monte Carlo ◽  
Monte Carlo Study ◽  
Surface Roughness Scattering

Kinetic Monte Carlo study on the evolution of silicon surface roughness under hydrogen thermal treatment

2017 ◽  
Vol 414 ◽  
pp. 361-364 ◽  
Author(s):  
Gang Wang ◽  
Yu Wang ◽  
Junzhuan Wang ◽  
Lijia Pan ◽  
Linwei Yu ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Monte Carlo ◽  
Thermal Treatment ◽  
Silicon Surface ◽  
Kinetic Monte Carlo ◽  
Monte Carlo Study

Effect of Remote-Surface-Roughness Scattering on Electron Mobility in MOSFETs with High-k Dielectrics

2019 ◽  
Vol 33 (3) ◽  
pp. 249-255 ◽  
Author(s):  
Mamat Mamatrishat ◽  
Miyuki Kouda ◽  
Takamasa Kawanago ◽  
K. Kakushima ◽  
P. Ahmet ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Electron Mobility ◽  
Surface Roughness Scattering ◽  
High K
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