Appling Micro Devices to Scanning Probe Microscopes for Micro/Nano Tribology Study (Keynote)

2005 ◽  
Author(s):  
Yasuhisa Ando ◽  
Shiraishi Naoki
Keyword(s):  
Three Dimensional ◽  
Force Sensor ◽  
Lateral Force ◽  
Scanning Probe Microscope ◽  
Silicon On Insulator ◽  
Experimental Results ◽  
The Other ◽  
Scanning Probe ◽  
Electromechanical Systems ◽  
Probe Microscope

We have designed and fabricated two kinds of micro devices. The mechanisms of the micro devices and some experimental results using the micro devices are described in this paper. The first device is a three-dimensional (3D) microstage and the other is a lateral force sensor. Each device was fabricated on an SOI (silicon on insulator) wafer using MEMS (micro electromechanical systems) technology. We applied these devices to an SPM (scanning probe microscope) and conducted tribology tests.

Scanning-probe microscope analysis of optical thin films: A new analytical tool in a manufacturing environment

1994 ◽  
Vol 52 ◽  
pp. 1068-1069
Author(s):  
S. P. Sapers ◽  
R. Clark ◽  
P. Somerville
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Thermal Control ◽  
Scanning Probe Microscope ◽  
Scanning Probe ◽  
List Type ◽  
Manufacturing Environment ◽  
Physical Measurements ◽  
Probe Microscope

OCLI is a leading manufacturer of thin films for optical and thermal control applications. The determination of thin film and substrate topography can be a powerful way to obtain information for deposition process design and control, and about the final thin film device properties. At OCLI we use a scanning probe microscope (SPM) in the analytical lab to obtain qualitative and quantitative data about thin film and substrate surfaces for applications in production and research and development. This manufacturing environment requires a rapid response, and a large degree of flexibility, which poses special challenges for this emerging technology. The types of information the SPM provides can be broken into three categories:(1)Imaging of surface topography for visualization purposes, especially for samples that are not SEM compatible due to size or material constraints;(2)Examination of sample surface features to make physical measurements such as surface roughness, lateral feature spacing, grain size, and surface area;(3)Determination of physical properties such as surface compliance, i.e. “hardness”, surface frictional forces, surface electrical properties.

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