Effects of thermal annealing in ion-implanted Gallium Nitride

2007 ◽  
Author(s):  
F. Iucolano ◽  
F. Giannazzo ◽  
F. Roccaforte ◽  
V. Puglisi ◽  
M. G. Grimaldi ◽  
...  
Keyword(s):  
Gallium Nitride ◽  
Thermal Annealing ◽  
Ion Implanted

Activation of silicon ion-implanted gallium nitride by furnace annealing

1999 ◽  
Vol 28 (3) ◽  
pp. 319-324 ◽  
Author(s):  
R. D. Dupuis ◽  
C. J. Eiting ◽  
P. A. Grudowski ◽  
H. Hsia ◽  
Z. Tang ◽  
...  
Keyword(s):  
Gallium Nitride ◽  
Furnace Annealing ◽  
Ion Implanted

Pulsed thermal annealing of ion‐implanted silicon

1983 ◽  
Vol 54 (5) ◽  
pp. 2413-2418 ◽  
Author(s):  
P. D. Scovell ◽  
E. J. Spurgin
Keyword(s):  
Thermal Annealing ◽  
Ion Implanted

Effect of rapid thermal annealing on carrier lifetimes of arsenic‐ion‐implanted GaAs

1996 ◽  
Vol 69 (7) ◽  
pp. 996-998 ◽  
Author(s):  
Gong‐Ru Lin ◽  
Wen‐Chung Chen ◽  
Feruz Ganikhanov ◽  
C.‐S. Chang ◽  
Ci‐Ling Pan
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Carrier Lifetimes ◽  
Ion Implanted

Observation of Thermal-Annealing Evolution of Defects in Ion-Implanted 4H-SiC by Luminsescence

2006 ◽  
pp. 847-850
Author(s):  
Jaime A. Freitas ◽  
Kenneth A. Jones ◽  
Michael A. Derenge ◽  
R.D. Vispute ◽  
Shiva S. Hullavarad
Keyword(s):  
Thermal Annealing ◽  
Ion Implanted

Enhancement of electrical activation of ion‐implanted phosphorus in Si(100) through two‐step thermal annealing

1993 ◽  
Vol 63 (8) ◽  
pp. 1125-1127 ◽  
Author(s):  
N. Yu ◽  
K. B. Ma ◽  
C. Kirschbaum ◽  
K. Varahramyan ◽  
W. K. Chu
Keyword(s):  
Thermal Annealing ◽  
Electrical Activation ◽  
Ion Implanted
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