High-Resolution Characterization of Ultra-Shallow Junctions by Scanning Spreading Resistance Microscopy

2007 ◽  
Author(s):  
Li Zhang ◽  
Kanna Adachi ◽  
Hiroyoshi Tanimoto ◽  
Akira Nishiyama
Keyword(s):  
High Resolution ◽  
Spreading Resistance ◽  
Shallow Junctions ◽  
Ultra Shallow Junctions

Photoluminescence Characterization of Defects in Rapidly Annealed Ultra Shallow Junctions

2013 ◽  
Vol 2 (5) ◽  
pp. P195-P204 ◽  
Author(s):  
Masahiro Yoshimoto ◽  
Masashi Okutani ◽  
Gota Murai ◽  
Shuji Tagawa ◽  
Hiroki Saikusa ◽  
...  
Keyword(s):  
Shallow Junctions ◽  
Ultra Shallow Junctions

Optical characterization of laser processed ultra-shallow junctions

2003 ◽  
Vol 208-209 ◽  
pp. 277-284 ◽  
Author(s):  
G. Kerrien ◽  
M. Hernandez ◽  
C. Laviron ◽  
T. Sarnet ◽  
D. Débarre ◽  
...  
Keyword(s):  
Optical Characterization ◽  
Shallow Junctions ◽  
Ultra Shallow Junctions

Electron Holography Characterization of Ultra-Shallow Junctions in 30-nm Gate-length MOS-FETs

2007 ◽  
Author(s):  
Nobuyuki Ikarashi ◽  
Makiko Oshida ◽  
Makoto Miyamura ◽  
Motofumi Saitoh ◽  
Akira Mineji ◽  
...  
Keyword(s):  
Electron Holography ◽  
Gate Length ◽  
Shallow Junctions ◽  
Ultra Shallow Junctions

High-resolution characterization of ultrashallow junctions by measuring in vacuum with scanning spreading resistance microscopy

2007 ◽  
Vol 90 (19) ◽  
pp. 192103 ◽  
Author(s):  
L. Zhang ◽  
K. Ohuchi ◽  
K. Adachi ◽  
K. Ishimaru ◽  
M. Takayanagi ◽  
...  
Keyword(s):  
High Resolution ◽  
Spreading Resistance ◽  
Ultrashallow Junctions

Electron holographic characterization of ultra-shallow junctions in si for nanoscale MOSFETs

2003 ◽  
Vol 2 (2) ◽  
pp. 102-109 ◽  
Author(s):  
P.S. Chakraborty ◽  
M.R. McCartney ◽  
Jing Li ◽  
C. Gopalan ◽  
M. Gilbert ◽  
...  
Keyword(s):  
Shallow Junctions ◽  
Nanoscale Mosfets ◽  
Ultra Shallow Junctions

GIXRF In The Soft X-Ray Range Used For The Characterization Of Ultra Shallow Junctions

2009 ◽  
Author(s):  
B. Beckhoff ◽  
P. Hoenicke ◽  
D. Giubertoni ◽  
G. Pepponi ◽  
M. Bersani ◽  
...  
Keyword(s):  
X Ray ◽  
Shallow Junctions ◽  
Ultra Shallow Junctions
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