Reliability of MEMS-based mass-flow controllers for semiconductor processing

2003 IEEE International Reliability Physics Symposium Proceedings, 2003. 41st Annual. ◽

10.1109/relphy.2003.1197795 ◽

2003 ◽

Author(s):

E.D. Lawrence ◽

A.K. Henning

Keyword(s):

Mass Flow ◽

Semiconductor Processing ◽

Mass Flow Controllers ◽

Flow Controllers

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STABLE GASEOUS ATMOSPHERES FOR NOSE-ONLY INHALATION USING MASS FLOW CONTROLLERS

Toxicology Methods ◽

10.1080/105172397243196 ◽

1997 ◽

Vol 7 (2) ◽

pp. 77-89 ◽

Cited By ~ 5

Author(s):

Josee Guenette, Sairin Hayes, and Renaud

Keyword(s):

Mass Flow ◽

Gaseous Atmospheres ◽

Mass Flow Controllers ◽

Flow Controllers

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A cautionary note on the use of some mass flow controllers

Journal of Geophysical Research Atmospheres ◽

10.1029/jd095id07p09817 ◽

1990 ◽

Vol 95 (D7) ◽

pp. 9817-9821 ◽

Cited By ~ 2

Author(s):

Andrew J. Weinheimer ◽

Brian A. Ridley

Keyword(s):

Mass Flow ◽

Cautionary Note ◽

Mass Flow Controllers ◽

Flow Controllers

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Pulse gas delivery mass flow controllers for TSV applications

2016 China Semiconductor Technology International Conference (CSTIC) ◽

10.1109/cstic.2016.7464085 ◽

2016 ◽

Author(s):

Junhua Ding ◽

Mike L'Bassi ◽

Jim Schwartz ◽

Wayne Cole

Keyword(s):

Mass Flow ◽

Mass Flow Controllers ◽

Flow Controllers

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Using the speed of sound forin situcalibration of mass flow controllers

Review of Scientific Instruments ◽

10.1063/1.1287749 ◽

2000 ◽

Vol 71 (9) ◽

pp. 3461-3463 ◽

Cited By ~ 3

Author(s):

Abdul Wajid

Keyword(s):

Mass Flow ◽

Speed Of Sound ◽

Mass Flow Controllers ◽

Flow Controllers

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The use of dynamic dilution by Mass Flow Controllers in the environmental monitoring of CO2: calibration issues and strategies

Journal of Physics Conference Series ◽

10.1088/1742-6596/1065/8/082011 ◽

2018 ◽

Vol 1065 ◽

pp. 082011 ◽

Cited By ~ 1

Author(s):

M Sega ◽

F Pennecchi ◽

F Rolle ◽

P G Spazzini

Keyword(s):

Environmental Monitoring ◽

Mass Flow ◽

Mass Flow Controllers ◽

Flow Controllers

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Extra fine control features with new MKS mass flow controllers

Vacuum ◽

10.1016/0042-207x(86)90295-2 ◽

1986 ◽

Vol 36 (1-3) ◽

pp. 171

Keyword(s):

Mass Flow ◽

Fine Control ◽

Mass Flow Controllers ◽

Flow Controllers

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A highly automated testing facility for calibration and performance testing of mass flow controllers

Proceedings of International Symposium on Semiconductor Manufacturing ◽

10.1109/issm.1995.524380 ◽

2002 ◽

Author(s):

T. McKnight

Keyword(s):

Mass Flow ◽

Performance Testing ◽

Automated Testing ◽

Testing Facility ◽

And Performance ◽

Mass Flow Controllers ◽

Flow Controllers

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Mass flow controllers: assuring precise process gas flows

Microelectronics Reliability ◽

10.1016/0026-2714(87)90706-2 ◽

1987 ◽

Vol 27 (1) ◽

pp. 188

Keyword(s):

Mass Flow ◽

Gas Flows ◽

Process Gas ◽

Mass Flow Controllers ◽

Flow Controllers

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Long-Term Drift Measurements in MEMS-Based Mass Flow Controllers

10.1117/12.498239 ◽

2003 ◽

Cited By ~ 2

Author(s):

Elizabeth Lawrence ◽

Albert K. Henning

Keyword(s):

Mass Flow ◽

Mass Flow Controllers ◽

Flow Controllers

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High-accuracy gas flow dilutor using mass flow controllers with binary weighted flows

Measurement Science and Technology ◽

10.1088/0957-0233/13/7/323 ◽

2002 ◽

Vol 13 (7) ◽

pp. 1138-1145 ◽

Cited By ~ 6

Author(s):

B A Goody ◽

M J T Milton

Keyword(s):

Mass Flow ◽

Gas Flow ◽

High Accuracy ◽

Binary Weighted ◽

Mass Flow Controllers ◽

Flow Controllers

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